Volume 75, Issue 1

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December 1986

Symposium B — Photon, Beam, and Plasma Stimulated Chemical Processes at Surfaces

Issue Editors:

V.M. Donnelly,
I.P. Herman,
M. Hirose

96 articles in this issue

An Overview of Laser Chemical Processing
Richard M. Osgood Jr.
OriginalPaper 28 February 2011 Pages: 3 - 15
Microfabrication Technologies for Advanced VLSI Devices
Y. Horiike
R. Yoshikawa
T. Takigawa
OriginalPaper 28 February 2011 Pages: 17 - 26
Fundamentals of Picosecond and Femtosecond Laser Solid Interactions
H. Kurz
OriginalPaper 28 February 2011 Pages: 27 - 38
The Role of Low-Energy Ion/Surface Interactions During Crystal Growth From the Vapor Phase
J. E. Greene
A. Rockett
J. -E. Sundgren
OriginalPaper 28 February 2011 Pages: 39 - 53
Surface Temperature Rise Induced by a Focused Laser Beam. Application to Laser-Induced Chemical Vapor Deposition
Toivo T. Kodas
Thomas H. Baum
Paul B. Comita
OriginalPaper 28 February 2011 Pages: 57 - 63
Nucleation and Growth of Silicon Microstructures by Direct-Laser Writing
David E. Kotecki
Irving P. Herman
OriginalPaper 28 February 2011 Pages: 65 - 73
Pyrolytic Laser Direct Writing of Nickel Over Polyimides
S. J. Bezuk
R. J. Baseman
G. Thomes
OriginalPaper 28 February 2011 Pages: 75 - 81
Laser-Induced Thermal Decomposition of Platinum Metallo-Organic Films
A. Gupta
R. C. Sausa
J. R. White
OriginalPaper 28 February 2011 Pages: 83 - 90
Photon and Ion Beam-Induced Chemistry of Palladium Acetate Films
M. E. Gross
W. L. Brown
H. O. Funsten
OriginalPaper 28 February 2011 Pages: 91 - 97
Fine Line Patterning By Focused Ion Beam Induced Decomposition of Palladium Acetate Films
L. R. Harriott
K. D. Cummings
H. O. Funsten
OriginalPaper 28 February 2011 Pages: 99 - 105
Chemically-Enhanced GaAs Maskless Etching Using a Novel Focused Ion Beam Etching System with a Chlorine Molecular and Radical Beam
N. Takado
K. Asakawa
H. Hashimoto
OriginalPaper 28 February 2011 Pages: 107 - 114
Surface Photochemically Activated Chemical Vapor Deposition of Patterned Aluminum Thin Films
G. S. Higashi
G. E. Blonder
C. G. Fleming
OriginalPaper 28 February 2011 Pages: 117 - 127
Direct Writing of Al on Si by UV Exposure Prior to Laser-Assisted CVD
J. E. Bouree
J. Flicstein
Y. I. Nissim
OriginalPaper 28 February 2011 Pages: 129 - 140
Laser-Induced Deposition of Gold
Thomas H. Baum
OriginalPaper 28 February 2011 Pages: 141 - 144
UV Photon-Assisted Refractory Metal Deposition
G. A. Kovall
J. C. Matthews
R. Solanki
OriginalPaper 28 February 2011 Pages: 145 - 150
UV Multiphoton Dissociation of Group VIB Hexacarbonyls and Derivatives
George W. Tyndall
Robert L. Jackson
OriginalPaper 28 February 2011 Pages: 151 - 157
Mechanisms for the Deposition of Thin Metallic Films by Laser Driven Gas Phase Reactions
T. R. Jervis
S. K. Menon
D. W. Carroll
OriginalPaper 28 February 2011 Pages: 159 - 163
Laser-Induced Deposition of Gold Micropatterns from Metallopolymer Thin Films: A Photochemical Approach
V. H. Houlding
N. S. Clements
G. A. West
OriginalPaper 28 February 2011 Pages: 165 - 172
UV Laser-Induced Metal Deposition on Semiconductors From Electroplating Solutions
Joseph Zahavi
Pehr E. Pehrsson
OriginalPaper 28 February 2011 Pages: 173 - 178
Photon-Induced Adhesion and Chemical Changes in Aluminium Films on Silicon
Andrew J. Kellock
J. Liesegang
J. S. Williams
OriginalPaper 28 February 2011 Pages: 179 - 185
Laser Photochemical Vapor Deposition of Ge Films (300 ≤ T ≤ 873 K) from GeH₄: Roles of Ge₂H₆ and Ge
K. K. King
V. Tavitian
J. G. Eden
OriginalPaper 28 February 2011 Pages: 189 - 194
Comparison of the Processes Induced by Mercury Lamp and ArF Excimer Laser Photoassisted CVD of a-Si:H Films
C. Fuchs
E. Fogarassy
OriginalPaper 28 February 2011 Pages: 195 - 200
Modelling of Hg(³P₁) Photosensitization of SiH₄ and Surface Reactions of the SiH₃ Radical
Jérome Perrin
Ton Biroekhuizen
OriginalPaper 28 February 2011 Pages: 201 - 208
Deposition of a-Si Films Using Silane Molecular Beams Excited by Heated Wire and ArF Laser
M. Hanabusa
T. Tsuboi
T. Inoue
OriginalPaper 28 February 2011 Pages: 209 - 213
Stepwise Monolayer Growth of GaAs by Pulsed Laser Metal Organic Vapor Phase Epitaxy
Atsutoshi Doi
Yoshinobu Aoyagi
Susumu Namba
OriginalPaper 28 February 2011 Pages: 217 - 222
Characterization of Excimer Laser Deposited Gaas Films From the Photolysis of Trimethylgallium and Trimethylarsine At 193 nm
V. R. Mccrary
V. M. Donnelly
R. C. Farrow
OriginalPaper 28 February 2011 Pages: 223 - 232
Excimer Laser Assisted Deposition of GaAs, AlAs, and [Al,Ga]As from Lewis Acid-Base Adducts
J. J. Zinck
P. D. Brewer
L. W. Tutt
OriginalPaper 28 February 2011 Pages: 233 - 240
Laser Stimulated Deposition of GaAs, GaAsP and GaAsP-GaAs Superlattices
N. H. Karam
S. M. Bedair
D. Griffis
OriginalPaper 28 February 2011 Pages: 241 - 248
Optically-Induced, Room-Temperature Oxidation of Gallium Arsenide
Chien-Fan Yu
Michael T. Schmidt
Richard M. Osgood Jr.
OriginalPaper 28 February 2011 Pages: 251 - 255
Photoenhanced Deposition of Silicon Oxide Thin Films Using an Internal Nitrogen Discharge Lamp
Paul A. Robertson
W. I. Milne
OriginalPaper 28 February 2011 Pages: 257 - 264
Photo-CVD of Dielectric Films by a Microwave-Excited VUV Lamp
Kouichi Tamagawa
Toshio Hayashi
Souji Komiya
OriginalPaper 28 February 2011 Pages: 265 - 272
Alternative Reactants for the Laser-Assisted Deposition of Silicon Nitride on Metals
Julian P. Partridge
Peter R. Strutt
OriginalPaper 28 February 2011 Pages: 273 - 280
Real-Time Studies of Laser Oxidation of Copper: Characteristics of an Optical Heat Source
L. Baufay
F. A. Houle
R. J. Wilson
OriginalPaper 28 February 2011 Pages: 281 - 287
Laser-Induced Formation of Thin TiO₂ Films from TiC1₄ and Oxygen an a Silicon Surface.
Tomoji Kawai
Takahiro Choda
Shichio Kawai
OriginalPaper 28 February 2011 Pages: 289 - 295
Oxidation and Nitridation by Pulsed Laser Irradiation of Solids Immersed in Liquids
S. Roorda
A. Polman
F. W. Saris
OriginalPaper 28 February 2011 Pages: 297 - 302
Rapid Formation of Beryllium Nitride and Beryllium Oxide by Excimer Laser Irradiation of Samples Immersed in Liquids
D. Dijkkamp
X. D. Wu
T. Venkatesan
OriginalPaper 28 February 2011 Pages: 303 - 308
Synthesis of Diamond by Laser-Induced CVD
K. Kitahama
K. Hirata
T. Imai
OriginalPaper 28 February 2011 Pages: 309 - 315
Investigations of Low-Temperature Epitaxy, Ion Damage, and Reactive-Ion Cleaning Utilizing Ion Beam Deposition
B. R. Appleton
R. A. Zuhr
S. J. Pennycook
OriginalPaper 28 February 2011 Pages: 319 - 332
Influence of Ion Bombardment on the Nucleation and Growth of Plasna Deposited Amorphous Silicon
A. M. Antoine
B. Drevillon
OriginalPaper 28 February 2011 Pages: 333 - 339
Ion Bombarment Effect on the Growth of Microcrystalline Germanium
B. Drevillon
C. Godet
A. M. Antoine
OriginalPaper 28 February 2011 Pages: 341 - 348
Room Temperature Growth of Silicon Dioxide Using a Low Energy Ion Beam
S. S. Todorov
E. R. Fossum
OriginalPaper 28 February 2011 Pages: 349 - 354
Surface Processes in Laser-Induced Etching of Silicon Studied by X-Ray Photoelectron Spectroscopy
Masataka Hirose
Tsuyoshi Ogura
OriginalPaper 28 February 2011 Pages: 357 - 367
Photochemical Dry Etching of Semiconductors and its Relationship to Semiconductor Electronic Properties
Carol I. H. Ashby
OriginalPaper 28 February 2011 Pages: 369 - 375
Direct-Writing of High-Aspect-Ratio Trenches in Silicon
G. V. Treyz
R. Beach
R. M. Osgood Jr.
OriginalPaper 28 February 2011 Pages: 377 - 383
Fluorine Atom Production Mechanisms From COF₂ and NF₃ in Uv Laser Etching of Poly-Silicon and Molybdenum
Gary L. Loper
Martin D. Tabat
OriginalPaper 28 February 2011 Pages: 385 - 393
Etching of SiO₂ with CO₂ and CO₂ + Ar⁺ Lasers
D. Pan
B. T. Dai
S. D. Allen
OriginalPaper 28 February 2011 Pages: 395 - 401
Ultrafast Aqueous Etching of Gallium Arsenide
A. E. Willner
D. V. Podlesnik
R. M. Osgood Jr.
OriginalPaper 28 February 2011 Pages: 403 - 410
Laser-Assisted Selective Chemical Etching of GaAs/AlGaAs Layered Structures
R. T. Brown
J. F. Black
F. J. Leonberger
OriginalPaper 28 February 2011 Pages: 411 - 417
Etching of LiNbO₃ by Laser-Driven Fusion of Salts
C. I. H. Ashby
P. J. Brannon
OriginalPaper 28 February 2011 Pages: 419 - 423
A Mechanistic Study of the Interaction of Ultraviolet Laser Radiation with Low Density Polymers
Philip J. Hargis Jr.
OriginalPaper 28 February 2011 Pages: 425 - 432

Volume 75, Issue 1

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