Volume 695, Issue 1 | MRS Online Proceedings Library

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Volume 695, Issue 1

December 2001

Symposium L — Thin Films: Stresses and Mechanical Properties IX

Issue Editors:

R. C. Cammarata,
L. B. Freund,
H. Gao,
C. S. Ozkan

77 articles in this issue

Assessment of New Relation for the Elastic Compliance of a Film-Substrate System
Andrei Rar
H. Song
G. M. Pharr
OriginalPaper 21 March 2011 Article: 10101
The Design of Multilayered Polysilicon for MOEMS Applications
D. Sherman
H. Kahn
A. H. Heuer
OriginalPaper 21 March 2011 Article: 8101
Mechanical Properties and Porosity of Organo-Silicate Glass (OSG) Low-k Dielectric Films
J. B. Vella
Q. Xie
K. H. Junker
OriginalPaper 21 March 2011 Article: 6251
Effects of Various Passivation Dielectrics and Via Reservoir Lengths on Stress and Electromigration Reliability of Metal Interconnects
Young-Bae Park
Young-Ah Cho
Won-Gyu Lee
OriginalPaper 21 March 2011 Article: 6241
Gold/Niobium Thin Film Metallizations for GaAs Devices and Circuits
Robert Esser
Aris Christou
OriginalPaper 21 March 2011 Article: 6231
An Analytical Model for Intrinsic Residual Stress Effect on Out-of-Plane Deflection in Chemical-Vapor-Deposited Free-Standing Thick Film
Jeung-hyun Jeong
Young-Joon Baik
Dongil Kwon
OriginalPaper 21 March 2011 Article: 6201
Mechanistic Understanding of the Stress-Induced Failure of Si₃N₄ Metal-Insulator-Metal Capacitors
Dongwoo Suh
Bongki Mheen
Jin-Yeong Kang
OriginalPaper 21 March 2011 Article: 6151
Residual Stress Measurement in a Pt-Aluminide Bond Coat
Makoto Watanabe
Daniel R. Mumm
Anthony G. Evans
OriginalPaper 21 March 2011 Article: 6141
Mechanical Behavior of Contact Aluminum Alloy
David T. Read
Yi-Wen Cheng
Robert R. Keller
OriginalPaper 21 March 2011 Article: 6111
Magnetoresistive, Mechanically Hard Superlattices of CrN, NbN, TiN Multilayers Deposited on Monocrystalline Si Wafers
Andrzej Wolkenberg
Hanna Wrzesinska
Piotr Dluzewski
OriginalPaper 21 March 2011 Article: 5211
Tribological Behavior of Nanocomposite Diamondlike Carbon-Aluminum Films
E. Liu
J. X. Gao
X. Shi
OriginalPaper 21 March 2011 Article: 5101
Nanoindentation and Magneto-Optical Study of Oxidized Co Thin Films
S. R. Mishra
J. Rho
T. Buckner
OriginalPaper 21 March 2011 Article: 3281
Thin Film Characterization Using the Point-Deflection Method
Ning Tang
Roxann L. Engelstad
Edward G. Lovell
OriginalPaper 21 March 2011 Article: 3271
Near-Edge X-ray Absorption Fine Structure of Hard Carbon Film Formed by Gas Cluster Ion Beam Assisted Deposition
Kazuhiro Kanda
Yutaka Shimizugawa
Masao Kamada
OriginalPaper 21 March 2011 Article: 3251
Self-Formed Aluminum Nitride Microtubes that Exhibit a Large Bending Stress
Morito Akiyama
Kazuhisa Shobu
Kazuhiro Nonaka
OriginalPaper 21 March 2011 Article: 3231
Bulge Test Characterization of Static Softening and Dynamic Instabilities in Foils of an Al-Based Alloy
Miroslav Cieslar
Ayatollah Karimi
Jean-Luc Martin
OriginalPaper 21 March 2011 Article: 3181
Nanoindentation Analysis of Viscoelastic Thin Films: Strain Rate and Adhesion Effects
Manuel Luis B. Palacio
Tracey Scherban
William W. Gerberich
OriginalPaper 21 March 2011 Article: 3151
Relaxation of a Strained Elastic Film on a Viscous Layer
R. Huang
H. Yin
Z. Suo
OriginalPaper 21 March 2011 Article: 3141
Modification of Stress in CVD Tungsten Silicide (Polycide) Film by SiO₂ Capping
Joshua Pelleg
E. Elish
OriginalPaper 21 March 2011 Article: 3121
Structural Properties of Carbon Nitride Films Deposited by Reactive — Pulsed Laser Deposition Technique
A. R. Phani
J. E. Krzanowski
J. J. Nainaparampil
OriginalPaper 21 March 2011 Article: 3111
Effects of Pressure on the Vibrational, Structural and Electronic Properties of C₆₀ Powder and Thin Films
S. C. Sharma
B. Ha
R. Govinthasamy
OriginalPaper 21 March 2011 Article: 3101
Effects of Surface Constraints on Stresses in Heteroepitaxial Films Grown on Compliant Substrates
Zhaohua Feng
Edward G. Lovell
Thomas F. Kuech
OriginalPaper 21 March 2011 Article: 2101
Thermal Stability of Self-Supported Metallic Multilayered Thin Films
A. Misra
H. Kung
R. G. Hoagland
OriginalPaper 21 March 2011 Article: 1391
Controlled Stress Refractory Metallizations
Ilan Golecki
Margaret Eagan
OriginalPaper 21 March 2011 Article: 1381
Pressure Assisted Crystallization of MnAl Thin Films
Gregory A. Fischer
M. Lea Rudee
Sastry Indrakanti
OriginalPaper 21 March 2011 Article: 1351
Depth Profile of Structure, Strain, and Composition in an Annealed Al-Cu-Fe-Cr Quasicrystalline Film
M. J. Daniels
D. King
J. C. Bilello
OriginalPaper 21 March 2011 Article: 1241
Highly Oriented NiTiCu Shape Memory Thin Films Grown by Molecular Beam Epitaxy
R. Hassdorf
J. Feydt
M. Moske
OriginalPaper 21 March 2011 Article: 1231
Stressed States and Self-Organized Structuring of W/C Multilayers
D. C. Meyer
A. Klingner
P. Paufler
OriginalPaper 21 March 2011 Article: 1221
The correlation of indentation size effect experiments with pyramidal and spherical indenters
J. G. Swadener
E. P. George
G. M. Pharr
OriginalPaper 21 March 2011 Article: 1151
Analysis of Nucleation of Dislocation Loops from Stressed Surfaces Based on the Peierls-Nabarro Dislocation Model
Guanshui Xu
OriginalPaper 21 March 2011 Article: 1111
Residual Stress and Microstructure of Electroplated Cu Film on Different Barrier Layers
Alex A. Volinsky
Meike Hauschildt
William W. Gerberich
OriginalPaper 21 March 2011 Article: 1111
Stress-Strain Response of Free-Standing Nano-Crystalline Gold Thin-Films
Sauri Gudlavalleti
Sharvan Kumar
Lallit Anand
OriginalPaper 21 March 2011 Article: 1081
Plastic Deformation of Thin Films–Bending–
T. Nozaki
Y. Kogure
Masao Doyama
OriginalPaper 21 March 2011 Article: 1021
Coarse-Grained Molecular Dynamics: Dissipation Due to Internal Modes
Robert E. Rudd
OriginalPaper 21 March 2011 Article: 1021
The Role of Chemical Composition for the Ductility and Microstructure of Thin NiAl Films
Patrick Wellner
Oliver Kraft
Eduard Arzt
OriginalPaper 21 March 2011 Article: 961
Wear and Adhesion Optimization of Thin TiAlN Films by Structure Design
E. Lugscheider
O. Knotek
G. Erkens
OriginalPaper 21 March 2011 Article: 951
Stress development and adhesion behavior in thin ceramic coatings monitored by positron annihilation during bending
R. Escobar Galindo
A. van Veen
J. Th. M. de Hosson
OriginalPaper 21 March 2011 Article: 941
Multiple Cracks of a Thin Film on a Ductile Substrate
Ming-Hao Zhao
Ran Fu
Tong-Yi Zhang
OriginalPaper 21 March 2011 Article: 931
Real-Time In Situ Imaging of the Delamination of thin Ta Films on Si(100) Substrates Via a Synchrotron Radiation Technique
B. L. French
J. C. Bilello
OriginalPaper 21 March 2011 Article: 921
Low Temperature Silicon Dioxide Thin Films Deposited Using Tetramethylsilane for Stress Control and Coverage Applications
Xin Lin
Stephen J. Fonash
OriginalPaper 21 March 2011 Article: 891
Adsorption-Induced Failure Modes of Thin-Film Resonators
R. Kazinczi
J. R. Mollinger
A. Bossche
OriginalPaper 21 March 2011 Article: 881
In-Situ Mechanical Characterization of a Freestanding 100 Nanometer Thick Aluminum Film in SEM Using MEMS Sensors
Aman Haque
Taher Saif
OriginalPaper 21 March 2011 Article: 871
Fracture behavior of micro-sized specimens prepared from an amorphous alloy thin film at ambient and elevated temperatures
K. Takashima
R. Tarumi
Y. Higo
OriginalPaper 21 March 2011 Article: 841
Effects of Film Thickness on the Yielding Behavior of Polycrystalline Gold Films
H. D. Espinosa
B. C. Prorok
OriginalPaper 21 March 2011 Article: 831
Metal Adhesion to <100> Si Substrates with Varying Surface Conditions
Nicholas Barbosa III
Rodney S. Ridley Sr
Richard P. Vinci
OriginalPaper 21 March 2011 Article: 791
Nanoindentation Induced Fracture in Hard Multilayer Thin Films
A. Karimi
D. Bethmont
Y. Wang
OriginalPaper 21 March 2011 Article: 781
Interfacial Adhesion of Cu to Self-Assembled Monolayers on SiO₂
G. Cui
M. Lane
G. Ramanath
OriginalPaper 21 March 2011 Article: 771
The Effects of Copper on the Interfacial Failure of Gold Films
N. R. Moody
D. P. Adams
D. F. Bahr
OriginalPaper 21 March 2011 Article: 751
Thin Film Fracture During Nanoindentation of Hard Film — Soft Substrate Systems
M. Pang
K. D. Weaver
D. F. Bahr
OriginalPaper 21 March 2011 Article: 721
Constitutive Response of Passivated Copper Films: Experiments and Analyses
Y. L. Shen
U. Ramamurty
OriginalPaper 21 March 2011 Article: 681