Volume 594, Issue 1

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December 1999

Symposium V — Thin Films - Stresses & Mechanical Properties VIII

Issue Editors:

P. Besser,
E. Shaffer II,
O. Kraft,
N. Moody,
R. Vinci

83 articles in this issue

Stress in Spin Valve Multilayers During Antiferromagnetic Phase Transformation
B. J. Daniels
S. P. Bozeman
H. Ha
OriginalPaper 10 February 2011 Pages: 3 - 8
The Microstructure and Nanoindentation Behaviour of TiN/NbN Multilayers
J. M. Molina-Aldareguia
S. J. Lloyd
W. J. Clegg
OriginalPaper 10 February 2011 Pages: 9 - 14
Influence of Nanometer-Scale Multilayered Thin Films on Fatigue Crack Initiation
M. R. Stoudt
R. C. Cammarata
R. E. Ricker
OriginalPaper 10 February 2011 Pages: 15 - 17
Processing, Microstructure, and Fracture Behavior of Nickel / Nickel Aluminide Multilayered Thin Films
R. Banerjee
J. P. Fain
H. L. Fraser
OriginalPaper 10 February 2011 Pages: 19 - 24
Nanoindentation Study of Amorphous Metal Multilayered Thin Films
J. B. Vella
R. C. Cammarata
H. Kung
OriginalPaper 10 February 2011 Pages: 25 - 29
Thermal Shock Behaviour of Thin Bi-Material Ceramic Systems
E. P. Busso
Y. V. Tkach
R. P. Travis
OriginalPaper 10 February 2011 Pages: 31 - 36
Ion Implantation and Misfit Dislocation Formation in P/P+Silicon
Petra Feichtinger
Hiroaki Fukuto
Mark S. Goorsky
OriginalPaper 10 February 2011 Pages: 37 - 42
Effect of Annealing on Microstructure and Properties of Al−Ti Multilayered Films
R. Mitra
A. Madan
J. R. Weertman
OriginalPaper 10 February 2011 Pages: 43 - 48
Wafer Curvature Studies of Strengthening Mechanisms in Thin Films on Substrates
O. S. Leung
W. D. Nix
OriginalPaper 10 February 2011 Pages: 51 - 56
Activation Volume for Inelastic Deformation in Polycrystalline Ag Films at Low Temperatures
Mauro J. Kobrinsky
Carl V. Thompson
OriginalPaper 10 February 2011 Pages: 57 - 62
Mechanical Properties of Electroplated Copper Thin Films
R. Spolenak
C. A. Volkert
W. L. Brown
OriginalPaper 10 February 2011 Pages: 63 - 68
Hall-Petch Hardening in Pulsed Laser Deposited Nickel and Copper Thin Films
J. A. Knapp
D. M. Follstaedt
S. M. Myers
OriginalPaper 10 February 2011 Pages: 69 - 73
Hydrogen Induced Plastic Deformation of Thin Films
A. Pundt
U. Laudahn
R. Kirchheim
OriginalPaper 10 February 2011 Pages: 75 - 86
Plasticity in Copper Thin Films
V. Weihnacht
W. Brückner
OriginalPaper 10 February 2011 Pages: 87 - 92
Strain Relaxation in Thin Films: the Effect of Dislocation Blocking
Peter J. Goodhew
OriginalPaper 10 February 2011 Pages: 93 - 98
Relation Between Macro- and Microstress in Thin Metallic Layers
Léon J. Seijbel
Rob Delhez
OriginalPaper 10 February 2011 Pages: 99 - 104
Influence of the Deposition Parameters on the Electrical and Mechanical Properties of Physically Vapor-Deposited Iridium and Rhodium Thin Films
Ilan Golecki
Margaret Eagan
OriginalPaper 10 February 2011 Pages: 105 - 110
Microstructural Evolution in Copper Films Undergoing Laser Pulsing at High Pressures
R. Jakkaraju
C. D. Dobson
A. L. Greer
OriginalPaper 10 February 2011 Pages: 111 - 116
The influence of thermal history and alloying elements on temporary strengthening of thin Al−Cu films
J. P. Lokker
G. C. A. M. Janssen
S. Radelaar
OriginalPaper 10 February 2011 Pages: 117 - 122
In Situ Study of Dislocation Behavior in Columnar Al Thin Film on Si Substrate During Thermal Cycling
Charles W. Allen
Herbert Schroeder
Jon M. Hiller
OriginalPaper 10 February 2011 Pages: 123 - 128
Diffusional Hillock Formation in Al Thin Films Controlled by Creep
Deok-kee Kim
William D. Nix
James D. Plummer
OriginalPaper 10 February 2011 Pages: 129 - 134
Mechanical Properties of Al Thin Films as Measured by Bulge Testing
Yinmin Wang
Richard L. Edwards
Kevin J. Hemker
OriginalPaper 10 February 2011 Pages: 135 - 140
Silicide Induced Mechanical Stress in Si: What are the Consequences for MOS Technology
Karen Maex
An Steegen
OriginalPaper 10 February 2011 Pages: 143 - 149
Excess Vacancy Generation by Silicide Formation in Si
R. J. Jaccodine
OriginalPaper 10 February 2011 Pages: 151 - 155
Sequential Operation of Three Distinct Misfit Dislocation Introduction Mechanisms in an Epitaxial Bilayer Film
V. Gopal
E. P. Kvam
J. M. Woodall
OriginalPaper 10 February 2011 Pages: 157 - 162
Stress Relaxation in Uniquely Oriented SiGe/Si Epitaxial Layers
M. E. Ware
R. J. Nemanich
OriginalPaper 10 February 2011 Pages: 163 - 168
Coherent and Incoherent Relaxation in III–V Heterostructures
André Rocher
Etienne Snoeck
OriginalPaper 10 February 2011 Pages: 169 - 174
Stress Effects in the Oxidation of Planar SiO₂ Thin Films
T. J. Delph
R. J. Jaccodine
OriginalPaper 10 February 2011 Pages: 175 - 180
Phase Formation and Mechanical Properties of Multiphase Carbide Coatings
J. E. Krzanowski
S. H. Koutzaki
J. S. Zabinski
OriginalPaper 10 February 2011 Pages: 181 - 186
Strain and Mosaic Structure in Si_0.7Ge_0.3 Epilayers Grown on Si (001) Substrates Characterized by High Resolution X-Ray Diffraction
J. H. Li
S. C. Moss
OriginalPaper 10 February 2011 Pages: 187 - 192
Wafer Scale Testing of MEMS Structural Films
Brian J. Gally
C. Cameron Abnet
Clarence Chui
OriginalPaper 10 February 2011 Pages: 195 - 200
Fatigue of Thin Silver Films Investigated by Dynamic Microbeam Deflection
R. Schwaiger
O. Kraft
OriginalPaper 10 February 2011 Pages: 201 - 206
Bending Response of a 100nm Thick Free Standing Aluminum Cantilever Beam
M. Taher
A. Saif
Aman Haque
OriginalPaper 10 February 2011 Pages: 207 - 211
Film Stress Influence of Bilayer Metallization on the Structure of RF MEMS Switches
R. E. Strawser
R. Cortez
H. T. Henderson
OriginalPaper 10 February 2011 Pages: 213 - 218
The Effect of Film Thickness on Stress and Transformation Behavior in Cobalt Thin Films
H. Th. Hesemann
P. Müllner
E. Arzt
OriginalPaper 10 February 2011 Pages: 219 - 224
Mechanical Properties and Adhesion of PZT Thin Films for MEMS
J. M. Jungk
B. T. Crozier
D. F. Bahr
OriginalPaper 10 February 2011 Pages: 225 - 230
Residual Stresses in MEMS Structures
B. S. Majumdar
W. D. Cowan
N. J. Pagano
OriginalPaper 10 February 2011 Pages: 231 - 236
Stress and Stress Relaxation Study of Sputtered PZT Thin Films for Microsystems Applications
E. Defaÿ
C. Malhaire
D. Barbier
OriginalPaper 10 February 2011 Pages: 237 - 242
Nanoindentation Probing of Environmental Effects on Polymer Coating Properties
X. Xia
D. Rowenhorst
W. W. Gerberich
OriginalPaper 10 February 2011 Pages: 245 - 250
Viscoelastic Behavior of Polymer Films During Scratch Test: A Quantitative Analysis
Vincent D. Jardret
Warren C. Oliver
OriginalPaper 10 February 2011 Pages: 251 - 256
Mechanical Properties and Toughening of a Polymethylsilsesquioxane Network
Bizhong Zhu
Dimitris E. Katsoulis
Frederick J. McGarry
OriginalPaper 10 February 2011 Pages: 257 - 262
In-Situ Characterization of Stress Development in Gelatin Film During Controlled Drying
Mengcheng Lu
Siu-Yue Tam
C. Jeffrey Brinker
OriginalPaper 10 February 2011 Pages: 263 - 268
Tribochemistry of ZDOL Decomposition on Carbon Overcoats in Ultra-High Vacuum (UHV)
C. S. Bhatia
C. Y. Chen
D. B. Bogy
OriginalPaper 10 February 2011 Pages: 271 - 282
Micro-Wear Scan Test on the Carbon Overcoats as Thin as 6 NM or Less
T. W. Wu
Thomas W. Scharf
John A. Barnard
OriginalPaper 10 February 2011 Pages: 283 - 288
Elastic Constants of Diamond Like Carbon Films by Surface Brillouin Scattering
A. C. Ferrari
J. Robertson
C. E. Bottani
OriginalPaper 10 February 2011 Pages: 289 - 294
Tensile Properties of Amorphous Diamond Films
D. A. LaVan
R. J. Hohlfelder
C. I. H. Ashby
OriginalPaper 10 February 2011 Pages: 295 - 300
Computing Thin Film Mechanical Properties with the Oliver and Pharr Method
P. J. Wolff
B. N. Lucas
E. G. Herbert
OriginalPaper 10 February 2011 Pages: 301 - 306
Microcrystalline and Nanocrystalline Diamond Film Deposition on Cobalt Chrome Alloy
Marc D. Fries
Yogesh K. Vohra
OriginalPaper 10 February 2011 Pages: 307 - 312
Fabrication and Characterization of Functionally Gradient Diamondlike Carbon Coatings
Q. Wei
A. K. Sharma
J. Narayan
OriginalPaper 10 February 2011 Pages: 313 - 318
Nanomechanical Properties of Amorphous Carbon and Carbon Nitride Thin Films Prepared by Shielded Arc Ion Plating
N. Tajima
H. Saze
O. Takai
OriginalPaper 10 February 2011 Pages: 319 - 324

Volume 594, Issue 1

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