Volume 541, Issue 1 | MRS Online Proceedings Library

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Volume 541, Issue 1

December 1998

Symposium O — Ferroelectric Thin Films VII

Issue Editors:

R. E. Jones,
R. W. Schwartz,
S. Summerfelt,
I. K. Yoo

113 articles in this issue

Chemical Vapor Deposition Technology of (Ba, Sr)TiO₃ Thin Films for Gbit-Scale Dynamic Random Access Memories
Tsuyoshi Horikawa
Masayoshi Tarutani
Tatsuo Oomori
OriginalPaper 10 February 2011 Pages: 3 - 10
Barium Strontium Titanate Capacitors for Embedded Dram
Peter Zurcher
C. J. Tracy
S. J. Gillespie
OriginalPaper 10 February 2011 Pages: 11 - 22
Nonlinear Dielectric Relaxation of Mn Doped Polycrystalline (Ba, Sr)TiO₃ Thin Films Over the Temperature Range of 4.2 - 473 K
J. D. Baniecki
R. B. Laibowitz
Q. Y. Mat
OriginalPaper 10 February 2011 Pages: 23 - 28
Surface Roughness and Growth Texture of (Ba, Sr)TiO₃ Thin Films Formed by MOCVD
Y. Gao
P. Alluri
R. L. Hance
OriginalPaper 10 February 2011 Pages: 29 - 34
The Effect of Atmospheric Water Vapour on the Temperature Dependence of Capacitance in Ba_xSr_1−xTiO₃ Thin Films
D. O’Neill
J. M. Gregg
OriginalPaper 10 February 2011 Pages: 35 - 40
Studies of Dielectric Properties of Pulsed Laser Deposited (Ba, Sr)TiO₃ Films Using LaNiO₃ as Conductive Electrode
Anuranjan Srivastava
D. Kumar
Rajiv K. Singh
OriginalPaper 10 February 2011 Pages: 41 - 46
Study of Rf-Sputtered Ba(Zr_xTi_1−x)O₃ Thin Films for Ulsi Dram Application
Jian-Hung Lee
Tung-Sheng Chen
Jack C. Lee
OriginalPaper 10 February 2011 Pages: 47 - 52
Synchrotron X-Ray Scattering of (Ba_0.5Sr_0.5)TiO₃ Thin Films Epitaxially Grown on MgO(100)
Sang S. Kim
Jung H. Je
OriginalPaper 10 February 2011 Pages: 53 - 58
A High Stability Electrode Technology for Stacked SrBi₂Ta₂O₂ Capacitors
J. Kudo
M. Nagata
K. Ishihara
OriginalPaper 10 February 2011 Pages: 61 - 70
Electrical Properties of PZT Thin Film Capacitors with Novel Pt-Ir Based Electrode Barriers for Nonvolatile Memories
Chandra S. Desu
Ramakrishna Vedula
Seshu B. Desu
OriginalPaper 10 February 2011 Pages: 71 - 76
Dielectric Properties of Pulsed Laser Deposited SrTiO₃ Thin Films
A. M. Clark
Jianhua Hao
X. X. Xi
OriginalPaper 10 February 2011 Pages: 77 - 82
Interconnect-Related Degradation of PZT Capacitor for FeRAM
S. Kobayashi
K. Amanuma
H. Hada
OriginalPaper 10 February 2011 Pages: 83 - 88
Electrode Structures for Integration of Ferroelectric or High Dielectric Constant Films in Semiconductor Devices
Alfred Grill
OriginalPaper 10 February 2011 Pages: 89 - 99
Metallorganic Chemical Vapor Deposition of Ir Films With Iridium Acetylacetonate and Carbonyl Precursors
Y. M. Sun
J. Endle
J. M. White
OriginalPaper 10 February 2011 Pages: 101 - 106
Effect of Bottom Electrode System on Ferroelectric Properties of Sputter Deposited PZT Capacitors
Kwon Hong
Yong Sik Yu
Shang Kyoo Lee
OriginalPaper 10 February 2011 Pages: 107 - 112
Dry Etching of PZT Films with CF₄/Ar High Density Plasma
Chanro Park
Jun Hee Cho
Il Hyun Choi
OriginalPaper 10 February 2011 Pages: 113 - 118
Stability and Oxidation Behavior of Ir Thin Film Electrodes on Si and SiO₂
K. L. Saenger
A. Grill
Y. Y. Wang
OriginalPaper 10 February 2011 Pages: 119 - 127
Chemical Vapor Deposition (CVD) of Iridium and Platinum Films and Gas-Phase Chemical Etching of Iridium Thin Films
Chongying Xu
Frank Dimeo Jr
Michael Russell
OriginalPaper 10 February 2011 Pages: 129 - 139
Characterization of Ruo₂ Films Prepared by Rf Reactive Magnetron Sputtering
Li-jian Meng
M. P. dos Santos
OriginalPaper 10 February 2011 Pages: 141 - 146
Epitaxial and Conductive RuO₂ Thin Films Grown on MgO and LaAlO₃ by MOCVD
P. Lu
S. He
Q. X. Jia
OriginalPaper 10 February 2011 Pages: 147 - 152
Fabrication of PZT Based Capacitor with SrRuO₃ Electrode for Memory Device Applications
Ashok Kumar
H. Rahman
M. Shamsuzzoha
OriginalPaper 10 February 2011 Pages: 153 - 160
Defect Identification in (La, Sr)CoO_3−δ Using Positron Annhiiilation Spectroscopy
T. Friessnegg
B. Nielsen
R. Ramesh
OriginalPaper 10 February 2011 Pages: 161 - 165
Atomic-Scale Structure and Properties of Thin Epitaxial SrRuO₃ Films Grown on SrTiO₃ (100) by Pulsed Laser Deposition
K. M. Satyalakshmi
N. D. Zakharov
G. Koren
OriginalPaper 10 February 2011 Pages: 167 - 172
The Phase Transition of Bi-Pt Alloys at the Interface of Pt/SrBi₂Ta₂O₉ and its Effect on Interface Roughness
Dong Suk Shin
Ho Nyung Lee
In-Hoon Choi
OriginalPaper 10 February 2011 Pages: 173 - 178
Deposition of Pb(Zr, Ti)O₃-Films on High-Grade Steel Hastelloy and Modification by Ion Implantation
R. Klarmann
W. Biegel
B. Stritzker
OriginalPaper 10 February 2011 Pages: 179 - 184
Dependence of Ferroelectric Properties of SBT Based Capacitors on the Electrode Material
S. Tirumala
S. O. Ryu
S. B. Desu
OriginalPaper 10 February 2011 Pages: 185 - 190
Characterization and Oxidation Kinetics of Reactively Sputtered Ti_1−xAl_xN Film
Yoshiki Ishizuka
Dong Joo Kim
Angus I. Kingon
OriginalPaper 10 February 2011 Pages: 191 - 196
Simple Electrode-Barrier Structure Using Ir for Integration of PZT-Based High-Density Nonvolatile Memories
Kwang B. Lee
S. Tirumala
Seshu B. Desu
OriginalPaper 10 February 2011 Pages: 197 - 202
All Epitaxial Babi₄Ti₄O₁₅ - LaNiO₃ Heterostructures
K. M. Satyalakshmi
A. Pignolet
U. Gösele
OriginalPaper 10 February 2011 Pages: 205 - 210
Influence of the substrate temperature on the structure of SrBi₂Ta₂O₉ thin films obtained by laser ablation
J. A. Díaz
M. P. Cruz
J. Portelles
OriginalPaper 10 February 2011 Pages: 211 - 215
Influence of Ti additions on the Texture and Dielectric Properties of LSBN-BST Complex Ceramics
J. Portelles
H. Amorín
S. Aguilera
OriginalPaper 10 February 2011 Pages: 217 - 222
Ferroelectric Properties of SBT (Sr/Bi/Ta = 0.8/2.3/2) Thin Films Using a Novel Chemical Solution Deposition
Seung-Hyun Kim
D. J. Kim
Angus I. Kingon
OriginalPaper 10 February 2011 Pages: 223 - 228
Preparation and Properties of Barium Incorporated Strontium Bismuth Tantalate Ferroelectric Thin Films
Chung-Hsin Lu
Cheng-Yen Wen
OriginalPaper 10 February 2011 Pages: 229 - 234
Composition Dependence of Dielectric Anomaly in Strontium Bismuth Tantalate Thin Films
Koichi Takemura
Takehiro Noguchi
Yoichi Miyasaka
OriginalPaper 10 February 2011 Pages: 235 - 240
Studies of Electrical Polarization Fatigue in SrBi₂Ta₂O₉ Thin Films
K. M. Lee
D. Thomas
H. M. Jang
OriginalPaper 10 February 2011 Pages: 241 - 246
Raman Study of SrBi₂Ta₂O₉ Bi₃TiNbO₉ Thin Films
W. Pérez
E. Ching-Prado
S. B. Desu
OriginalPaper 10 February 2011 Pages: 247 - 252
Synthesis and Dielectric Properties of SrBi₂Nb₂O₉ Layered Perovskite by Sol-Gel Processing
Y. Wu
F. S. Ohuchi
G. Z. Cao
OriginalPaper 10 February 2011 Pages: 253 - 258
Chemical Solution Processing of Strontium Bismuth Tantalate Films
C. D. E. Lakeman
T. J. Boyle
OriginalPaper 10 February 2011 Pages: 259 - 267
Origin of Imprint in Ferroelectric CSD SrBi₂Ta₂O₉ Thin Films
M. Grossmann
O. Lohse
C. Dehm
OriginalPaper 10 February 2011 Pages: 269 - 274
Correlations Between Composition, Texture, and Polarization in Sr_xBi_yTa₂O_5+x+3y/2 Thin Films Deposited by MOCVD
Bryan C. Hendrix
Frank Hintermaieri
Carlos Mazure
OriginalPaper 10 February 2011 Pages: 275 - 280
Studies of Metallic Species Incorporation During Growth of SrBi₂Ta₂O₉ Films on YBa₂Cu₃O_7−x Substrates Using Mass Spectroscopy of Recoiled Ions
A. M. Dhote
A. R. Krauss
T. Venkatesan
OriginalPaper 10 February 2011 Pages: 281 - 286
In Situ Mass Spectroscopy of Recoiled Ion Studies of Degradation Processes in SrBi₂Ta₂O₉ Thin Films During Hydrogen Gas Annealing
J. Im
O. Auciello
A. I. Kingon
OriginalPaper 10 February 2011 Pages: 287 - 292
Low Temperature Crystallization of SrBi₂Ta₂O₉ Film by Excimer Laser Irradiation
K. S. Seol
H. Hiramatsu
Y. T. Kim
OriginalPaper 10 February 2011 Pages: 293 - 298
Preparation of Sr_0.7Bi_2+xTa₂O₉ Thin Films on SiO₂/Si at Low Temperature by Pulsed Laser Deposition and Fatigue-Tolerant C-V Characteristics with Large Memory Window
Masanori Okuyama
Yoshinori Matsumuro
Minoru Noda
OriginalPaper 10 February 2011 Pages: 299 - 304
Sol-Gel Growth of High-Quality Pb(Zr, Ti)O₃ Films on RUO₂ Using Seed Layers
G. J. Norga
Laura Fè
H. E. Maes
OriginalPaper 10 February 2011 Pages: 307 - 312
Effect of Characteristics of SrRuO₃ Buffer Layer on the Ferroelectric Properties of (Pb_0.97La_0.30)(Zr_0.66Ti_0.34)O₃ Thin Films
Yu-Jen Chen
Gwo Jamn
I-Nan Lina
OriginalPaper 10 February 2011 Pages: 313 - 318
Growth, Microstructural and Ferroelectric Properties of PZT Films Prepared by Pulsed Laser Deposition Method
Ashok Kumar
M. R. Alam
M. Shamsuzzoha
OriginalPaper 10 February 2011 Pages: 319 - 326
Control of Grain Size of Pb(Zr, Ti)O₃ Thin Films by MOCVD and the Effect of Size on the Electrical Properties
H. Fujisawa
S. Nakashima
H. Niu
OriginalPaper 10 February 2011 Pages: 327 - 332
Novel Precursors for MOCVD of Thin Films of Metal Oxides Containing Early Transition Metals
Hywel O. Davies
Kirsty A. Fleeting
David J. Otway
OriginalPaper 10 February 2011 Pages: 333 - 338
Effect of Stoichiometry on the Ferroelectric Properties of (Pb_1−xLa_x)TiO₃ Thin Films
I-Nan Lin
Cheng-Hsiung Lin
Hsiu-Fung Cheng
OriginalPaper 10 February 2011 Pages: 339 - 344