1. Crystalline Films on Amorphous Substrates by Zone Melting and Surface-Energy-Driven Grain Growth in Conjunction with Patterning

   • Henry I. Smith
   • M. W. Geis
   • C. K. Chen

   OriginalPaper 01 May 1985 Pages: 3 - 13

2. A Study of Melting and Resolidification of Silicon-On-Insulator Structures Formed by Lateral Epitaxy

   • D A Williams
   • R A McMahon
   • D J Godfrey

   OriginalPaper 01 May 1985 Pages: 15 - 20

3. Formation of Facets at the Solid-Melt Interface in Silicon

   • Emil Arnold
   • Uzi Landman
   • B. Khan

   OriginalPaper 01 May 1985 Pages: 21 - 27

4. Reduced Subboundary Misalignment in SOI Films Scanned at Low Velocities

   • Loren Pfeiffer
   • K. W. West
   • A. E. Gelman

   OriginalPaper 01 May 1985 Pages: 29 - 38

5. Elimination of Subboundaries from Zone-Melting-Recrystallized Silicon-On-Insulator Films

   • M. W. Gels
   • C. K. Chen
   • R. W. Mountain

   OriginalPaper 01 May 1985 Pages: 39 - 44

6. Addressing the Problems of Agglomeration, Surface Roughness and Crystal Imperfection in SOI Films

   • S. Ramesh
   • A. Martinez
   • Emil Arnold

   OriginalPaper 01 May 1985 Pages: 45 - 51

7. Capping Techniques for Zone-Melting-Recrystallized Si-On-Insulator Films

   • C. K. Chen
   • L. Pfeiffer
   • B-Y. Tsaur

   OriginalPaper 01 May 1985 Pages: 53 - 58

8. Improvement of Wetting of Silicon on Insulator during Lamp Zone Melting using Plasma Nitridation

   • M. Haond
   • D. Dutartre
   • B. Vuillennoz

   OriginalPaper 01 May 1985 Pages: 59 - 64

9. Twin Stabilzed Planar Growth of SOI Films

   • H. Baumgart
   • F. Phillipp
   • E. Arnold

   OriginalPaper 01 May 1985 Pages: 65 - 70

10. Two-Beam Laser Recrystallization of Silicon on an Insulating Substrate

    • Samhita Dasgupta
    • Howard E. Jackson
    • Joseph T. Boyd

    OriginalPaper 01 May 1985 Pages: 71 - 76

11. A Seeded Channel Approach to Silicon-On-Insulator Technology

    • C. H. Ting
    • W. Baerg
    • J. F. Gibbons

    OriginalPaper 01 May 1985 Pages: 77 - 82

12. <100> Single Crystal SOI Films Obtained on 4. in Wafers using Halogen Lamps

    • M. Haond
    • D. Dutartre
    • D. Bensahel

    OriginalPaper 01 May 1985 Pages: 83 - 88

13. Microscopy of Thin Si Films during Lamp Zone Melting

    • D. Dutartre
    • M. Haond
    • D. Bensahel

    OriginalPaper 01 May 1985 Pages: 89 - 94

14. Large Grain Growth of Silicon Films on Low Temperature Glass Substrates

    • C. E. Bleil
    • J. R. Troxell

    OriginalPaper 01 May 1985 Pages: 95 - 100

15. Zone Melting Recrystallization of GaAs Films on Oxidized Si

    • Weiwen Zhu
    • Weiyuan Wang

    OriginalPaper 01 May 1985 Pages: 101 - 106

16. Laser Recrystallization of MOCVD Poly-GaAs on Insulating Substrates

    • X. M. Bao
    • X. F. Huang
    • J. M. Yin

    OriginalPaper 01 May 1985 Pages: 107 - 111

17. Laser Recrystallization of InP Films on Oxidized Si Substrate

    • Li Xiqiang
    • Zhu Weiwen
    • Tsou Shihchang

    OriginalPaper 01 May 1985 Pages: 113 - 118

18. Solid Phase Epitaxial Recrystallization of SOS, with Applications to Submicrometer CMOS and Bipolar Devices

    • P. K. Vasudev

    OriginalPaper 01 May 1985 Pages: 121 - 127

19. Formation of Epitaxial SOI Structures using Alkaline Earth Fluoride Films

    • Hiroshi Ishiwara
    • Tanemasa Asano

    OriginalPaper 01 May 1985 Pages: 129 - 136

20. MOS Circuits on Silicon-Boron Phosphide-Silicon Multilayers

    • D. J. Dumin

    OriginalPaper 01 May 1985 Pages: 137 - 141

21. High-Quality Thin Si Film by SPE Regrowth on Epitaxially Grown Spinel

    • Takafumi Kimura
    • Hideki Yamawaki
    • Masashi Ozeki

    OriginalPaper 01 May 1985 Pages: 143 - 148

22. Reduction of Ca and F Segregated at the Surface of a Si/CaF₂/Si(100) Structure by Solid Phase Epitaxy of Si

    • Masayoshi Sasaki
    • Hiroshi Onoda
    • Norio Hirashita

    OriginalPaper 01 May 1985 Pages: 149 - 154

23. Improving the Structural and Electrical Properties of Epitaxial CaF₂ on Si by Rapid Thermal Annealing

    • Julia M. Phillips
    • Mary L. Manger
    • K. W. West

    OriginalPaper 01 May 1985 Pages: 155 - 161

24. Enhancing the Grain Size and {110} Texture of Polycrystalline Si Films by Seed Selection Through Ion Channeling: Implant-Dose Dependence

    • Kenneth T-Y. Kung
    • Rafael Reif

    OriginalPaper 01 May 1985 Pages: 163 - 168

25. Morphology of Silicon Islands Grown by Selective Epitaxy Over Silicon Dioxide

    • S. T. Liu
    • K. Newstrom
    • J. D. Meindl

    OriginalPaper 01 May 1985 Pages: 169 - 174

26. Comparison of Structural and Electrical Characteristics of Solid-Phase Epitaxial Films Recrystallized by Rapid Thermal Annealing and Furnace Annealing

    • R. Sundaresan
    • P.-H. Chang
    • H. W. Lam

    OriginalPaper 01 May 1985 Pages: 175 - 180

27. Gallium Arsenide Layers Grown by MBE on Germanium Islands on Insulator

    • M. Takai
    • Y. Kodama
    • S. Namba

    OriginalPaper 01 May 1985 Pages: 181 - 186

28. Epitaxial Regrowth of a-GaAs/(100) Silicon by Excimer Laser Annealing at 248 nm

    • A. Christou
    • T. Efthimiopoulos
    • C. Varmazis

    OriginalPaper 01 May 1985 Pages: 187 - 192

29. Si-MBE SOI

    • T. L. Lin
    • S. C. Chen
    • S. Iyer

    OriginalPaper 01 May 1985 Pages: 193 - 197

30. LPCVD Tungsten Deposition on Porous Silicon for Formation of Buried Conductors

    • S. S. Tsao
    • R. S. Blewer

    OriginalPaper 01 May 1985 Pages: 199 - 204

31. Silicon on Insulator Formed by O⁺ or N⁺ Ion Implantation

    • P. L. F. Hemment

    OriginalPaper 01 May 1985 Pages: 207 - 221

32. Epitaxial Growth on Simox Wafers

    • Hon Wai Lam

    OriginalPaper 01 May 1985 Pages: 223 - 226

33. Improved SOI Films by High Dose Oxygen Implantation and Lamp Annealing

    • G. K. Celler
    • P. L. F. Hemment
    • J. M. Gibson

    OriginalPaper 01 May 1985 Pages: 227 - 232

34. Formation of Buried SIO₂ by High Dose Implantation of Oxygen at Room and Liquid Nitrogen Temperatures

    • F. Namavar
    • J. I. Budnick
    • H. C. Hayden

    OriginalPaper 01 May 1985 Pages: 233 - 238

35. Heavy Metal Gettering in Implanted Buried-Oxide Structures

    • T. I. Kamins
    • S. Y. Chiang

    OriginalPaper 01 May 1985 Pages: 239 - 244

36. Donor Creation during Oxygen Implanted Buried Oxide Formation

    • M. Delfino
    • P. K. Chu

    OriginalPaper 01 May 1985 Pages: 245 - 250

37. The Effects of Annealing Temperature on the Characteristics of Buried Oxide Silicon-On-Insulator

    • B.-Y Mao
    • P.-H. Chang
    • J. A. Keenan

    OriginalPaper 01 May 1985 Pages: 251 - 256

38. Effect of Annealing on the Structure of Buried Si02 Layers Formed by Elevated Temperature High Dose Oxygen Implantation

    • S. J. Krause
    • C. O. Jung
    • M. E. Burnham

    OriginalPaper 01 May 1985 Pages: 257 - 262

39. Strain and Damage in Silicon Due to a Deep Oxygen Implantation

    • Thad Vreeland Jr.
    • T. S. Jayadev

    OriginalPaper 01 May 1985 Pages: 263 - 268

40. The Physical and Electrical Properties of Buried Nitride SOI Structures Synthesized by Nitrogen ION Implantation

    • C. Slawinski
    • B.-Y. Mao
    • J. A. Keenan

    OriginalPaper 01 May 1985 Pages: 269 - 272

41. Formation of Silicon on Insulator Structures by Implanted Nitrogen

    • L. Nesbit
    • S. Stiffler
    • H. Vinton

    OriginalPaper 01 May 1985 Pages: 273 - 280

42. Study of Dose and Dose Rate in the Implantation of Nitrogen Isotopes into SI(100)

    • F. Namavar
    • J. I. Budnick
    • H. C. Hayden

    OriginalPaper 01 May 1985 Pages: 281 - 286

43. Thermal Stress During Zone-Melting-Recrystallization of Silicon on Insulator Films: The Origin of Subboundaries and In-Plane Orientation of SOI

    • J. M. Gibson
    • L. N. Pfeiffer
    • D. C. Joy

    OriginalPaper 01 May 1985 Pages: 289 - 299

44. The Microchemistry of the SiO₂/Silicon Interface

    • C. R. M. Grovenor

    OriginalPaper 01 May 1985 Pages: 301 - 310

45. Properties of Thin Films after Focused Beam Processing

    • I. H. Campbell
    • P. M. Fauchet
    • Fran Adar

    OriginalPaper 01 May 1985 Pages: 311 - 316

46. Interpretation of UV Reflectance Measurements on Silicon-On-Sapphire by Spectral Reflectance and Spectroscopic Ellipsometry Studies

    • C. Pickering
    • A. M. Hodge
    • R. Greef

    OriginalPaper 01 May 1985 Pages: 317 - 322

47. A Technique for in-situ Detection of Growth Dislocations

    • S. D. Peteves
    • J. A. Sarreal
    • G. J. Abbaschian

    OriginalPaper 01 May 1985 Pages: 323 - 328

48. Mechanical Properties of Ga_1−x In_xAs

    • S. Guruswamy
    • J. P. Hirth
    • K. T. Faber

    OriginalPaper 01 May 1985 Pages: 329 - 335

49. Electrical Characterization of Crystallized-Silicon Thin Films

    • N. M. Johnson

    OriginalPaper 01 May 1985 Pages: 337 - 347

50. Minority Carrier Lifetime Studies in Halogen Lamp Recrystallized SOI Films

    • A. Chantre
    • D. Ronzani
    • D. P. Vu

    OriginalPaper 01 May 1985 Pages: 349 - 355