Volume 523, Issue 1 | MRS Online Proceedings Library

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Volume 523, Issue 1

December 1998

Symposium U — Electron Microscopy of Semiconducting Materials & ULSI Devices

Issue Editors:

C. Hayzelden,
F.M. Ross,
C.J.D. Hetherington

34 articles in this issue

Transmission Electron Microscopy of Semiconductor Based Products
John Mardinly
David W. Susnitzky
OriginalPaper 10 February 2011 Pages: 3 - 12
Failure Analysis Using Voltage Contrast and Ebic
Larry Rice
Wei Chen
OriginalPaper 10 February 2011 Pages: 13 - 17
Preparation of Tem Plan View Sections on Specific Devices Using the Tripod Polisher
J. P. Benedict
R. M. Anderson
S. J. Klepeis
OriginalPaper 10 February 2011 Pages: 19 - 30
Applications of Plasma Cleaning for Electron Microscopy of Semiconducting Materials
T. C. Isabell
P. E. Fischione
OriginalPaper 10 February 2011 Pages: 31 - 38
Reduction of the Damage Induced in an Fib-Fabricated X-Tem Specimen
N. I. Kato
K. Tsujimoto
N. Miura
OriginalPaper 10 February 2011 Pages: 39 - 44
Application of Tem on Sub-Half Micron Semiconductor Devices
Hong Zhang
OriginalPaper 10 February 2011 Pages: 45 - 56
The Challenge and Methods of TEM Cross-Sectioning of < 0.25 Micron Plugs
C. Amy Hunt
Yuhong Zhang
David Su
OriginalPaper 10 February 2011 Pages: 57 - 63
Evaluation of Single Semiconductor Defects Using Multiple Microanalysis Techniques
P. D. Kinney
Y. Uritsky
L. McCaig
OriginalPaper 10 February 2011 Pages: 65 - 70
Application of Electron Microscopy Towards the Analysis of Submicron Particles and Microcorrosion
Larry Rice
B. Carpenter
Wei Chen
OriginalPaper 10 February 2011 Pages: 71 - 75
Texture Analysis of Al and Cu Metallization Materials Using Orientation Imaging Microscopy
D. T. Carpenter
R. Alvis
G. Morales
OriginalPaper 10 February 2011 Pages: 79 - 84
Grain Size Distribution and Degree of Texture in Films Used in Integrated Circuits
R. Lindsay
J. N. Chapman
I. Molchanov
OriginalPaper 10 February 2011 Pages: 85 - 90
Effect of Mo Doping on Formation of Ti-Silicide Phases Studied by HRTEM
M. A. Gribelyuk
S. B. Samavedam
J. A. Kittl
OriginalPaper 10 February 2011 Pages: 91 - 96
Tem Investigation of Titanium Silicide Thin Films
A. F. Myers
E. B. Steel
J. A. Burns
OriginalPaper 10 February 2011 Pages: 97 - 102
Characterization of Electrically Pulsed Chromium Disilicide Fusible Links
A. G. Domenicucci
B. Cunningham
P. Tsang
OriginalPaper 10 February 2011 Pages: 103 - 108
Microstructural Changes in W-Polycide Gates Capped with a Thin Polysilicon Layer
Y. O. Kima
J. Bevk
P. J. Silverman
OriginalPaper 10 February 2011 Pages: 109 - 113
Aluminum Spiking Mechanism in Contact Holes Studied by High-Resolution Analytical TEM
H. Cerva
V. Klüppel
H. Helneder
OriginalPaper 10 February 2011 Pages: 115 - 125
Application of Energy-Filtering Transmission Electron Microscopy on Advanced IC Device Processing
K. M. Yin
L. Chang
H. L. Chang
OriginalPaper 10 February 2011 Pages: 127 - 131
Electron Microscopic Studies of Co- and Ti-Germanosilicide Films Formed on SiGe Layers
S. Jin
R. A. Donaton
K. Maex
OriginalPaper 10 February 2011 Pages: 133 - 138
New Techniques for the Nanostructural Characterization of Semiconductor Materials and Devices Using Combined Focused Ion Beam and Transmission Electron Microscopy Techniques
R. Hull
D. Dunn
OriginalPaper 10 February 2011 Pages: 141 - 151
Electron Microscopy on GaAs Based Devices
P. Etienne
M. Magis
P. Galtier
OriginalPaper 10 February 2011 Pages: 153 - 158
Energy-Filtered Transmission Electron Microscopy of Multilayers in Semiconductors
C. P. Liu
C. B. Boothroyd
C. J. Humphreys
OriginalPaper 10 February 2011 Pages: 159 - 164
Analysis of Layered Structures at High Spatial Resolution Using Energy Filtered Imaging
P. L. Flaitz
J. Bruley
OriginalPaper 10 February 2011 Pages: 165 - 170
Installing and Operating Fegtem’s
C. J. D. Hetherington
A. G. Cullis
M. A. O’Keefe
OriginalPaper 10 February 2011 Pages: 171 - 176
Applications of High Resolution Immersion Lens Scanning Electron Microscopes to Sem-Based Defect Review at 250nm Design Rules
B. Tracy
OriginalPaper 10 February 2011 Pages: 177 - 185
Microstructure Analysis of Barium Strontium Titanate Thin Film
Wei Chen
Joe Hooker
Peir Chu
OriginalPaper 10 February 2011 Pages: 187 - 192
Tem Studies of Polysilicon Emitter Bipolar Materials & Devices: Increased Interfacial Oxide Break-Up and Polysilicon Regrowth and Decreased Emitter Resistance by Fluorine Implantation
C. D. Marsh
N. E. Moiseiwitsch
P. Ashburn
OriginalPaper 10 February 2011 Pages: 195 - 200
A Study of Substrate Orientation Dependence of the Solid-Phase Epitaxial Growth of Amorphised GaAs
K. B. Belay
D. J. Llewellyn
M. C. Ridgway
OriginalPaper 10 February 2011 Pages: 201 - 206
Electron Microscopy, Electrical Activity, Artefacts and the Assessment of Semiconductor Epitaxial Growth
Paul D. Brown
Colin J. Humphreys
OriginalPaper 10 February 2011 Pages: 207 - 224
Relaxation of Metamorphic III-V Heterostructures Studied by Digital Processing of HREM Images
André Rocher
Etienne Snoeck
Catherine Fortin
OriginalPaper 10 February 2011 Pages: 225 - 230
Dislocations in InAs Epilayers Grown by MBE on GaAs Substrates under Various Conditions
Hongmei Wang
Yiping Zeng
Meiying Kong
OriginalPaper 10 February 2011 Pages: 231 - 234
The Effect of Growth Temperature and Substrate Misorientation on Degree of Order and Antiphase Domain Size in Ga_0.52In_0.48P Epilayers Grown on GaAs (001) Substrates by Gs-Mbe
C. Meenakarn
A. E. Staton-Bevan
A. H. Kean
OriginalPaper 10 February 2011 Pages: 235 - 240
Ordering in Compound Semiconductors: The Role of Transmission Electron Microscopy
D. S. Su
A. T. Tham
E. Zeitler
OriginalPaper 10 February 2011 Pages: 241 - 246
HRTEM Study of Structure and Evolution of Highly Mismatched Heteroepitaxial Interface, GaSe/GaAs(100)
Z. R. Dai
S. R. Chegwidden
F. S. Ohuchi
OriginalPaper 10 February 2011 Pages: 247 - 251
Crystallographic Mapping in Scanning and Transmission Electron Micrsocopy with Application to Semiconductor Materials
D. J. Dingley
S. I. Wright
D. J. Dingley Jr.
OriginalPaper 10 February 2011 Pages: 253 - 264