Volume 518, Issue 1

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December 1998

Symposium N – Microelectromechanical Structures for Materials Research

Issue Editors:

S. Denbaars,
J. Palmour,
M. S. Shur,
M. Spencer

39 articles in this issue

Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films
P. Atria
P. Hesto
OriginalPaper 01 December 1998 Pages: 3 - 8
Transversal Type Piezoelectric Resonator Using ZnO Thin Film on Micro-Fabricated Elinver (Fe-Ni-Cr-Ti) Alloy
Y. Yoshino
OriginalPaper 01 December 1998 Pages: 9 - 14
Multilayer Microelectromechanical Structures for Material Property Characterization
R. I. Pratt
G. C. Johnson
OriginalPaper 01 December 1998 Pages: 15 - 20
The Effects of Texture and Doping on the Young’s Modulus of Polysilicon
Sangwoo Lee
Changho Cho
Dong-Il Dan Cho
OriginalPaper 01 December 1998 Pages: 21 - 26
Mechanical Property Measurement of 0.5-µm CMOS Microstructures
M. S.-C. Lu
X. Zhu
G. K. Fedder
OriginalPaper 01 December 1998 Pages: 27 - 32
Heating Effects on The Young’s Modulus of Films Sputtered onto Micromachined Resonators
H. Kahn
M. A. Huff
A. H. Heuer
OriginalPaper 01 December 1998 Pages: 33 - 38
Measurement of Mechanical Properties in Small Dimensions by Microbeam Deflection
O. Kraft
R. Schwaiger
W. D. Nix
OriginalPaper 01 December 1998 Pages: 39 - 44
Failure of micron scale Single Crystal Silicon bars due to torsion developed by MEMS micro instruments
Taher Saif
N. C. MacDonald
OriginalPaper 01 December 1998 Pages: 45 - 49
Young’s Modulus, Yield Strength and Fracture Strength of Microelements Determined by Tensile Testing
S. Greek
F. Ericson
OriginalPaper 01 December 1998 Pages: 51 - 56
Round-Robin Tests of Modulus and Strength of Polysilicou
W. N. Sharpe Jr.
S. Brown
W. Knauss
OriginalPaper 01 December 1998 Pages: 57 - 65
Curvature of a Cantilever Beam Subjected to an Equi-Biaxial Bending Moment
P. Krulevitch
G. C. Johnson
OriginalPaper 01 December 1998 Pages: 67 - 72
Meso (Intermediate)-Scale Electromechanical Systems for the Measurement and Control of Sagging in LtcC Structures
Patricio Espinoza-Vallejos
Jihua Zhong
J. J. Santiago-Aviles
OriginalPaper 01 December 1998 Pages: 73 - 79
Observations of Low Cycle Fatigue of Al Thin Films for Mems Applications
G. Cornella
R. P. Vinci
J. C. Bravman
OriginalPaper 01 December 1998 Pages: 81 - 86
Investigation of the Mechanical Properties and Adhesion of P.V.D. Tungsten Films on Si and Silicon Compounds by Bulge and Blister Tests
Michel Dupeux
Alain Bosseboeuf
Denis Buttard
OriginalPaper 01 December 1998 Pages: 87 - 92
Strength of Surface Micromachined Diaphragms
Xing Yang
Frances M. Siu
Yu-Chong Tai
OriginalPaper 01 December 1998 Pages: 93 - 97
Silicon Oxynitride Membrane for Chemical Sensor Application
S. Astle
E. Scheid
L. Lescouzeres
OriginalPaper 01 December 1998 Pages: 99 - 104
Bulge Test Investigation of The Influence of Moisture on Mechanical Properties of Thin Polymer Layers
A. Nakladal
R. Buchhold
B. Nowak
OriginalPaper 01 December 1998 Pages: 105 - 110
A Novel Technique for the Fabrication of Free-Standing Adhesive Films Using a Polymer Template
D. J. Hansford
L. P. Lee
M. Ferrari
OriginalPaper 01 December 1998 Pages: 111 - 115
Test Methods for Characterizing Piezoelectric Thin Films
F. J. von Preissig
H. Zeng
E. S. Kim
OriginalPaper 01 December 1998 Pages: 117 - 122
Silicon Strength Testing for Mesoscale Structural Applications
Kuo-Shen Chen
Arturo A. Ayon
S. Mark Spearing
OriginalPaper 01 December 1998 Pages: 123 - 130
Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients
M. P. de Boer
P. J. Clews
T. A. Michalske
OriginalPaper 01 December 1998 Pages: 131 - 136
The Fracture Toughness of Polysilicon Microdevices
R. Ballarini
R. L. Mullen
A. H. Heuer
OriginalPaper 01 December 1998 Pages: 137 - 142
The Surface Modification with Fluorocarbon Thin Films for the Prevention of Stiction in Mems
Sang-Ho Lee
Myong-Jong Kwon
Hyung-Jae Shin
OriginalPaper 01 December 1998 Pages: 143 - 148
Adhesion Promotion by Surface-Modification at the Pmma-Metal Interface for Liga-Type Processing
S. S. Das
C. G. Khan Malek
OriginalPaper 01 December 1998 Pages: 149 - 154
Buckling Evolution of Microelectromechanical Structures
Xin Zhang
Tong-Yi Zhang
Yitshak Zohar
OriginalPaper 01 December 1998 Pages: 155 - 160
Mems as Temperature Sensors During High Temperature Processing
H. Tada
A. R. Abramson
P. Y. Wong
OriginalPaper 01 December 1998 Pages: 161 - 166
Silicon-Framed Tensile Specimens: Techniques and Results
D. T. Read
OriginalPaper 01 December 1998 Pages: 167 - 172
Mechanical Property Evaluation of Electroplated High Aspect Ratio Microstructures
L. S. Stephens
K. W. Kelly
S. Simhadri
OriginalPaper 01 December 1998 Pages: 173 - 178
Tensile Testing of Ultra-Thin-Film Materials Deposited on Polyimide for Mems Applications
J. H. Tregilgas
M. Strumpell
OriginalPaper 01 December 1998 Pages: 179 - 184
Mechanical and Metallographic Characterization of Liga Fabricated Nickel and 80%Ni-20%Fe Permalloy
T. R. Christenson
T. E. Buchheit
R. J. Bourcier
OriginalPaper 01 December 1998 Pages: 185 - 190
Polysilicon Tensile Testing with Electrostatic Gripping
W. N. Sharpe Jr.
K. Turner
R. L. Edwards
OriginalPaper 01 December 1998 Pages: 191 - 196
Fracture Strength of Polycrystalline Silicon
P. T. Jonestt
G. C. Johnsontt
R. T. Howe
OriginalPaper 01 December 1998 Pages: 197 - 202
Measurement of Elastic Modulus and Poisson’s Ratio of Diamond–Like Carbon Films
Sung-Jin Cho
Kwang-Ryeol Lee
Dae-Hong Ko
OriginalPaper 01 December 1998 Pages: 203 - 208
Residual Stress of Silicon Films Deposited by LPCVD From Silane
P. Temple-Boyer
E. Imbernon
E. Scheid
OriginalPaper 01 December 1998 Pages: 209 - 214
Internal Stress of ZnO thin Films Caused by Thickness Distribution and Crystallinity
M. Takeuchi
K. Inoue
K. Ohwada
OriginalPaper 01 December 1998 Pages: 215 - 220
Finite-Element Modeling of Residual Stress in SiC Diaphragms
Russell G. DeAnna
Christian A. Zorman
Mehran Mehregany
OriginalPaper 01 December 1998 Pages: 221 - 226
Finite Element Simulations of the Mechanical Stress in and Around Narrow Tisl₂Lines
A. Steegen
I. De Wolf
M. Ignat
OriginalPaper 01 December 1998 Pages: 227 - 232
Silicon-Based Epitaxial Films for Mems
E. A. Fitzgerald
K. C. Wu
J. Borenstein
OriginalPaper 01 December 1998 Pages: 233 - 238
Dopant Mapping and Strain Analysis in B Doped Silicon Structures Using Micro-Raman Spectroscopy
M. Bowden
D. J. Gardiner
A. J. Harris
OriginalPaper 01 December 1998 Pages: 239 - 244

Volume 518, Issue 1

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