Volume 406, Issue 1 | MRS Online Proceedings Library

Search all MRS Online Proceedings Library articles

Volume 406, Issue 1

December 1995

Symposium L — Diagnostic Techniques for Semiconductor Materials Processing

Issue Editors:

F.G. Celii,
O.J. Glembocki,
S.W. Pang,
F.H. Pollak,
C.M.S. Torres

86 articles in this issue

Optical and Mass Spectrometric Diagnostic Methods for Plasma Etching
V. M. Donnelly
OriginalPaper 01 November 1995 Pages: 3 - 13
Diagnostics and Control of High-Density Etching Plasmas
H. Sugai
K. Nakamura
M. Nakamura
OriginalPaper 01 November 1995 Pages: 15 - 25
Response Time for Optical Emission and Mass Spectrometric Signals During Etching of Heterostructures
S. Thomas III
H. H. Chen
S. W. Pang
OriginalPaper 01 November 1995 Pages: 27 - 32
Monitoring of Direct Reactions During Etching of Silicon
K. P. Giapis
T. K. Minton
OriginalPaper 01 November 1995 Pages: 33 - 38
Monitoring of the Intermediate Products in the Thermal Decomposition of SiH₄, Si₂H₆, SiF₄ and SiH₂F₂
Jae Hyun Han
Hyun-Kyu Ryu
Sang Heup Moon
OriginalPaper 01 November 1995 Pages: 39 - 44
High Density Plasma Diagnostics for Predictive Model Development
C.R. Eddy Jr.
S.R. Douglass
OriginalPaper 01 November 1995 Pages: 45 - 50
Characterization of Nitrogen Species for P-Type Doping of ZnSe
K. Kimura
H. Kajiyama
T. Yao
OriginalPaper 01 November 1995 Pages: 51 - 56
Hydrogen Assisted Remote Plasma Enhanced Chemical Vapor Deposition of Amorphous Silicon Nitride Films
P. Santos-Filho
K. Koh
G. Lucovsky
OriginalPaper 01 November 1995 Pages: 57 - 62
Process Diagnostics for Remote Plasma-Enhanced Chemical-Vapor Deposition (PECVD) of Silicon Nitrides
A. Banerjee
G. Lucovsky
OriginalPaper 01 November 1995 Pages: 63 - 68
Precision of Non-invasive Temperature Measurement by Diffuse Reflectance Spectroscopy
Zhongze Wang
Siu L. Kwan
Shane R. Johnson
OriginalPaper 01 November 1995 Pages: 69 - 74
In-situ Fiberoptic Thermometry Measurements of Wafer Temperature During Plasma Etching Using an Electron Cyclotron Resonance Source
S. Thomas III
E. W. Berg
S. W. Pang
OriginalPaper 01 November 1995 Pages: 75 - 80
Simultaneous Spatially Resolved Multispectral Optical Emission of Sputter Processes
J.D. Klein
S.L. Clauson
OriginalPaper 01 November 1995 Pages: 81 - 86
An Extended Kalman Filter Based Method for Fast In-Situ Etch Rate Measurements
T. L. Vincent
P. P. Khargonekar
F. L. Terry Jr.
OriginalPaper 01 November 1995 Pages: 87 - 93
Optical Second Harmonic Generation Method for Silicon Material Monitoring and Characterization During Ion Implantation and Annealing Processes
Y. Gu
Y.C. Chou
G.P. Li
OriginalPaper 01 November 1995 Pages: 95 - 100
Single-Photon Ionization, in situ Optical Diagnostic of Molecular Beam Epitaxial Growth of GaAs
Adina K. Ott
Sean M. Casey
Stephen R. Leone
OriginalPaper 01 November 1995 Pages: 101 - 107
Optical-based Flux Monitoring of Atomic Antimony Sources for Molecular Beam Epitaxy
P.D. Brewer
K.P. Killeen
OriginalPaper 01 November 1995 Pages: 109 - 114
In-Situ Monitoring of MOCVD Grown In_xAl_1−xAs/GaAs Epitaxial Layers by Two Laser Beams Reflectometry
Jong-Hyeob Baek
Bun Lee
El-Hang Lee
OriginalPaper 01 November 1995 Pages: 115 - 120
Influence of Growth Parameters on Interface Broadening in MBE-Grown Interfaces: A Non Destructive Study by Magneto-Optics
W. Grieshaber
A. Haury
A. Wasiela
OriginalPaper 01 November 1995 Pages: 121 - 126
Real-time Optical Monitoring of Ga_xIn_1−xP/GaP Heterostructures on Silicon
N. Dietz
U. Rossow
K.J. Bachmann
OriginalPaper 01 November 1995 Pages: 127 - 132
Real-Time Composition and Thickness Control Techniques in A Metalorganic Chemical Vapor Deposition Process
M.S. Gaffney
C.M. Reaves
S.P. Den Baars
OriginalPaper 01 November 1995 Pages: 133 - 138
Temperature Measurements Using Rotating Thermocouple in the Mocvd Rotating Disk Reactors
A.I. Gurary
R.A. Stall
OriginalPaper 01 November 1995 Pages: 139 - 143
Evaluation of Reaction Dynamics of Film Depositions in Plasma CVDs by Using a Remote Plasma CVD System
S. Wickramanayaka
K. Kitamura
Y. Hatanaka
OriginalPaper 01 November 1995 Pages: 145 - 150
Real-Time Monitoring of GaAs(100) Etching by Surface Photoabsorption
Joseph Eng Jr.
Hongbin Fang
Brian E. Bent
OriginalPaper 01 November 1995 Pages: 151 - 156
Diagnostic Techniques for Polycrystalline Thin Film Growth
Kuan-Lun Cheng
Huang-Chung Cheng
Tri-Rung Yew
OriginalPaper 01 November 1995 Pages: 157 - 162
Light Scattering Measurement of Surface Topography During Formation of Titanium Silicide.
C. Lavoie
C. Cabral Jr.
F. Doany
OriginalPaper 01 November 1995 Pages: 163 - 168
Characterization of Materials and Devices by Near-Field Scanning Optical Microscopy
B. B. Goldberg
H. F. Ghaemi
W. D. Herzog
OriginalPaper 01 November 1995 Pages: 171 - 182
Near Field Scanning Optical Microscopy and Spectroscopy of Electronic Materials and Structures
W.M. Duncan
OriginalPaper 01 November 1995 Pages: 183 - 188
Imaging of Silicon Carrier Dynamics with Near-Field Scanning Optical Microscopy
A.H. La Rosa
B.I. Yakobson
H.D. Hallen
OriginalPaper 01 November 1995 Pages: 189 - 194
AFM/TEM Investigation of Low Temperature Polycrystalline Silicon Grown by ECR-CVD
H.L. Hsiao
K.C. Wang
H.L. Hwang
OriginalPaper 01 November 1995 Pages: 195 - 200
AFM Probe Tip and Image Reconstruction from Noisy Measurements
H. Fischer
J. Nittmann
OriginalPaper 01 November 1995 Pages: 201 - 208
AFM Analysis of ECR Dry-Etched InGaP, AlInP and AlGaP
F. Ren
W. S. Hobson
M. W. Cole
OriginalPaper 01 November 1995 Pages: 209 - 214
Nano-scale Imaging of Corrosion: Application of Scanning Polarization Force Microscopy
Qing Dai
Jun Hu
Miquel Salmeron
OriginalPaper 01 November 1995 Pages: 215 - 220
Single-Crystal Fine-Positioning Devices for Scanned-Probe Microscopies
R. N. Kleiman
OriginalPaper 01 November 1995 Pages: 221 - 226
Double Modulation and Selective Excitation Photoreflectance for Characterizing Highly Luminescent Semiconductor Structures and Samples with Poor Surface Morphology
P.M. Amirtharaj
D. Chandler-Horowitz
D.P. Bour
OriginalPaper 01 November 1995 Pages: 229 - 240
Room Temperature Contactless Electromodulation Characterization of a Wafer-Sized InGaAs/GaAs/GaAlAs Grinsch Laser Structure
Wojciech Krystek
M. Leibovitch
T. Konopelski
OriginalPaper 01 November 1995 Pages: 241 - 246
Fourier Transform Analysis of Franz-Keldysh Oscillations Observed in Electromodulation Spectra
R.T. Holm
O.J. Glembocki
J.A. Tuchman
OriginalPaper 01 November 1995 Pages: 247 - 252
Characterization of AlGaAs/GaAs Heterojunction Bipolar Transistors Using Photoreflectance and Spectral Ellipsometry
Patricia B. Smith
Tae S. Kim
Nick A. Brette
OriginalPaper 01 November 1995 Pages: 253 - 258
Quantitative Photoreflectance Experiments on Indium Phosphide Surfaces and Structures
S. Hildebrandt
J. Schreiber
L. Höring
OriginalPaper 01 November 1995 Pages: 259 - 264
Lineshape Analysis of Intersubband Transitions in Multiple Quantum Wells
G. Gumbs
OriginalPaper 01 November 1995 Pages: 265 - 270
Investigation of Passivation Effects in InP HEMT Layers
M. Van Hove
J. Finders
M. Van Rossum
OriginalPaper 01 November 1995 Pages: 271 - 276
Origin of the 1.3 eV Transition in InP/InAlAs/InP Heterostructure
T. Benyattou
M.A. Garcia-Perez
C. Caneau
OriginalPaper 01 November 1995 Pages: 277 - 282
Exciton Dynamics in Ultrathin InAs/GaAs Quantum-Wells
J. Brübach
J.E.M. Haverkort
C.M. Sotomayor Torres
OriginalPaper 01 November 1995 Pages: 283 - 288
Three-Dimensional Active Gratings for Light Emission Control
S. G. Romanov
A. Fokin
C.M. Sotomayor Torres
OriginalPaper 01 November 1995 Pages: 289 - 294
Effect of Heavy Doping on the Photoluminescence and Photoreflectance Spectra of Silicon and SiGe Layers.
C. Bru-Chevallier
B. Trui
J. A. Chroboczek
OriginalPaper 01 November 1995 Pages: 295 - 300
Electron Density Effects in the Modulation Spectroscopy of Strained and Lattice-Matched InGaAs/InAlAs/InP HEMTs.
A. Dimoulas
J. Davidow
N. Kornelios
OriginalPaper 01 November 1995 Pages: 301 - 306
Fabrication and Luminescence of Etched Quantum Rings and Vertically Coupled Dots
G.E. Philipp
J.A. Mejia Galeana
C.M. Sotomayor Torres
OriginalPaper 01 November 1995 Pages: 307 - 312
Optical Characterization of Hydrogenated Silicon Films in the Extended Energy Range
T. Globus
S. J. Fonash
G. Gildenblat
OriginalPaper 01 November 1995 Pages: 313 - 318
Reflectivity Difference Spectra of GaAs and ZnSe (100) Surfaces
C. C. Kim
S. Sivananthan
OriginalPaper 01 November 1995 Pages: 319 - 325
Optical and Electrical Characterisation of Plasma Processed n-GaAs
M. Murtagh
P. A. F. Herbert
G. M. Crean
OriginalPaper 01 November 1995 Pages: 327 - 332
Steplike Lineshape of Low Temperature Photoreflectance Spectra of InAlAs
Y. Baltagi
E. Bearzi
J.C. Harmand
OriginalPaper 01 November 1995 Pages: 333 - 338