Volume 380, Issue 1

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December 1995

Symposium D – Materials–Fabrication and Patterning at the Nanoscale

Issue Editors:

C. R. K. Marrian,
K. Kash,
F. Cerrina,
M. G. Lagally

25 articles in this issue

Molecular Beam Epitaxy Of Si/ZnS/Si(100) Heterostructures For Silicon-Based Quantum Devices
Xiaochuan Zhou
Feng Li
Wiley P. Kirk
Articles 15 February 2011 Pages: 3 - 8
Nanoscale Features Grown by MBE on Nonplanar Patterned Si Substrates
Karl D. Hobart
Fritz J. Kub
Phillip E. Thompson
Articles 15 February 2011 Pages: 9 - 15
Creating Three-Dimensionally Confined Nanoscale Strained Structures Via Substrate Encoded Size-Reducing Epitaxy and the Enhancement of Critical Thickness for Island Formation
A. Konkar
A. Madhukar
P. Chen
Articles 15 February 2011 Pages: 17 - 22
Self-Assembled Monolayer Films for Nanofabrication
Elizabeth A. Dobisz
F. Keith Perkins
Christie R.K. Marrian
Articles 15 February 2011 Pages: 23 - 34
High Rate Dry Etching of GaN, AIN and InN in ECR Cl₂/CH₄/H₂/Ar Plasmas
C. B. Vartuli
S. J. Pearton
J. E. Parmeter
Articles 15 February 2011 Pages: 37 - 42
Nanoscale Structures by Laser Direct Writing in Silicon
H. Dirac
M. Müllenborn
J. W. Petersen
Articles 15 February 2011 Pages: 43 - 48
Nanolithography Developed Through Electron Beam Induced Surface Reaction
S. Matsui
Y. Ochiai
R. Shimizu
Articles 15 February 2011 Pages: 49 - 60
Atomic Diffusion and Strain Measurement on Si Grating Structures by X-Ray Diffraction
So Tanaka
Christopher C. Umbach
Jack M. Blakely
Articles 15 February 2011 Pages: 61 - 66
Lateral Diffusion Limitations of Ingaas/Gaas for Nanostructure Fabrication
Gregory F. Redinbo
Harold G. Craighead
Articles 15 February 2011 Pages: 67 - 72
Manufacture of Submicron Light-Emitting Porous Silicon Areas for Miniature LEDs
S. P. Duttagupta
C. Peng
P. M. Fauchet
Articles 15 February 2011 Pages: 73 - 78
TiO₂ Nanophases Formed Using the Sol-Gel Technique
T. López
R. Gómez
O. Novaro
Articles 15 February 2011 Pages: 81 - 86
Microstructure of Agglomerates of Nanometer Particles
Alfred P. Weber
James D. Thorne
Sheldon K. Friedlander
Articles 15 February 2011 Pages: 87 - 92
Surface Structure of A Liquid Perfluoropolyether Examined by Reactive Ion/Surface Scattering
T. Pradeep
S. A. Miller
R. G. Cooks
Articles 15 February 2011 Pages: 93 - 98
Laser Beam Lithography of Metal Oxide Electrodes for PZT Memory Applications
Jarrod L. Norton
Said A. Mansour
C. Venkatraman
Articles 15 February 2011 Pages: 99 - 104
Formation of Sub-100 NM GE Wires on Si by E-Beam Evaporation/Lithography
C. Deng
J. C. Wu
M. N. Wybourne
Articles 15 February 2011 Pages: 105 - 109
Scanning Tunneling Spectroscopy of Photoexcitations on a Nanosecond Time-Scale
Todd G. Ruskell
Dong Chen
Dror Sarid
Articles 15 February 2011 Pages: 113 - 117
Effects of Gallium Arsenide Passivation on Scanning Tunneling Microscope Excited Luminescence
E. E. Reuter
S. Q. Gu
S. G. Bishop
Articles 15 February 2011 Pages: 119 - 124
Atomic Force Microscope-Based Lithography of Titanium
A. E. Gordon
D. D. Litfin
T. K. Higman
Articles 15 February 2011 Pages: 125 - 130
Fabrication of Semiconductor Nanostructures With an Atomic Force Microscope
E. S. Snow
P. M. Campbell
Articles 15 February 2011 Pages: 131 - 142
Direct Nanoscale Patterning by Atomic Manipulation
Craig T. Salling
Articles 15 February 2011 Pages: 143 - 151
SPM-Based Lithography for Electronics Device Fabrication: New Strategies and Directions
J. A. Dagata
Articles 15 February 2011 Pages: 153 - 162
Does 0.1 Micron = MACH 1?
R. Fabian Pease
Articles 15 February 2011 Pages: 165 - 171
The limits of patterning in X-ray lithography
F. Cerrina
Articles 15 February 2011 Pages: 173 - 177
Probing the Limits of Silicon-Based Nanoelectronics
S. J. Wind
Y. Taur
K. A. Jenkins
Articles 15 February 2011 Pages: 179 - 185
Silicon Nanofabrication and Chemical Modification by UHV-STM
J. W. Lyding
T. C. Shen
J. R. Tucker
Articles 15 February 2011 Pages: 187 - 197

Volume 380, Issue 1

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