Volume 324, Issue 1 | MRS Online Proceedings Library

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Volume 324, Issue 1

December 1993

Symposium K — Diagnostic Techniques for Semiconductor Materials Processing

Issue Editors:

G.M. Crean,
O.J. Glembocki,
G. Larrabee,
S.W. Pang,
F.H. Pollak

74 articles in this issue

Real-Time Surface and Near-Surface Optical Diagnostics for Epitaxial Growth
D. E. Aspnes
OriginalPaper 01 December 1993 Pages: 3 - 14
In situ and Ex situ Applications of Spectroscopic Ellipsometry
John A. Woollam
Blaine Johs
Huade Walter Yao
OriginalPaper 01 December 1993 Pages: 15 - 25
In-situ Multilayer Film Growth Characterization by Brewster Angle Reflectance Differential Spectroscopy
N. Dietz
D. J. Stephens
K. J. Bachmann
OriginalPaper 01 December 1993 Pages: 27 - 32
Simultaneous Real Time Spectroscopic Ellipsometry and Reflectance for Monitoring Semiconductor and Thin Film Preparation
Ilsin An
Hien V. Nguyen
R. W. Collins
OriginalPaper 01 December 1993 Pages: 33 - 38
Spectroscopic Ellipsometry Characterisation of Thin Film Polysilicon
S. Lynch
L. Spinelli
G. M. Crean
OriginalPaper 01 December 1993 Pages: 39 - 45
Characterization of Polycrystalline Silicon Multilayers with Thin Nitride/Oxide Films using Spectroscopic Ellipsometry
L. M. Asinovsky
OriginalPaper 01 December 1993 Pages: 47 - 52
In-Situ Dual-Wavelength Ellipsometry and Light Scattering Monitoring of Si/Si_1-xGe_x Heterostructures and Multi-Quantum Wells
C. Pickering
D. A. O. Hope
R. Greef
OriginalPaper 01 December 1993 Pages: 53 - 58
Reflectance Anisotropy and Spectroscopic Ellbpsometry Characterisation of Wet Silicon Wafer Cleaning
J. T. Beechinor
P. V. Kelly
G. M. Crean
OriginalPaper 01 December 1993 Pages: 59 - 64
Process Monitoring for Fabrication of Mercuric Iodide Room Temperature Radiation Detectors
J. M. Van Scyoc
T. E. Schlesinger
L. van den Berg
OriginalPaper 01 December 1993 Pages: 65 - 71
Characterization of Electronic Materials by Optical Reflectance Spectroscopy and Digital Signal Processing
Pieter L. Swart
OriginalPaper 01 December 1993 Pages: 75 - 86
Infrared and Ultraviolet Analysis of Dual-Ion Implanted Gaas
Beatrys M. Lacquet
Gustavo E. Aizenberg
Pieter L. Swart
OriginalPaper 01 December 1993 Pages: 87 - 92
Determination of Bpsg Thin-Film Properties using IR Reflection Spectroscopy of Product Wafers
Thomas M. Niemczyk
James E. Franke
Kenneth J. Radigan
OriginalPaper 01 December 1993 Pages: 93 - 98
Spectral Reflectance as an in Situ Monitor for Mocvd
W. G. Breiland
K. P. Killeen
OriginalPaper 01 December 1993 Pages: 99 - 104
Real Time Process Monitoring with Multiwave-Length Pyrometric Interferometry (PI)
F. G. Böbel
A. Wowchak
L. A. Chow
OriginalPaper 01 December 1993 Pages: 105 - 110
Characterization of Quantum Well Structures using Microscope-Spectrophotometry
Rachel M. Geatches
Karen J. Reeson
Roger P. Webb
OriginalPaper 01 December 1993 Pages: 111 - 117
Light Scattering Measurements of Surface Roughness in Molecular Beam Epitaxy Growth of GaAs
C. Lavoie
M. K. Nissen
T. Tiedje
OriginalPaper 01 December 1993 Pages: 119 - 124
REAL-TIME in situ MONITORING OF DEFECT EVOLUTION AT WIDEGAP II-VI/GaAs HETEROINTERFACES DURING EPITAXIAL GROWTH
C. M. Rouleau
R. M. Park
OriginalPaper 01 December 1993 Pages: 125 - 131
The Utility of Laser Light Scattering in Assessing the Mixability Of Reagents for Chemical Vapor Deposition
Bin Ni
Gene P. Reck
James W. Proscia
OriginalPaper 01 December 1993 Pages: 133 - 138
Contactless Electromodulation Characterization of Compound Semiconductor Surfaces and Device Structures
J. M. Woodall
OriginalPaper 01 December 1993 Pages: 141 - 152
Photoreflectance Characterization of Etch-Induced Damage in Dry Etched GaAs
O. J. Glembocki
J. A. Tuchman
C. E. Stutz
OriginalPaper 01 December 1993 Pages: 153 - 159
In-Situ Diagnostics of Plasma-Induced Damage on GaAs by Photoreflectance Spectroscopy
Hideo Nakanishi
Kazumi Wada
OriginalPaper 01 December 1993 Pages: 161 - 166
Photoreflectance Characterisation of Reactive Ion Etched Silicon
M. Murtagh
J. T. Beechinor
C. Jeynes
OriginalPaper 01 December 1993 Pages: 167 - 173
Layered Semiconductor Photoreflectance Diagnostics
Konstantin O. Boltar
Valery A. Fedirko
OriginalPaper 01 December 1993 Pages: 175 - 180
Optical Characterization of InGaAs/InP Quantum Wires and Dots
S. Q. Gu
E. Reuter
R. Bhat
OriginalPaper 01 December 1993 Pages: 181 - 186
Photoreflectance Study of Modulation-Doped GaAs/GaAlAs Quantum Dots Fabricated by Reactive-Ion Etching
P. D. Wang
C. M. Sotomayor Torres
G. Gumbs
OriginalPaper 01 December 1993 Pages: 187 - 192
Raman and Photoluminescence Characterization of FIB Patterned AlGaAs/GaAs Multiple Quantum Wells
Ahn Goo Choo
Xuelong Cao
Joseph T. Boyd
OriginalPaper 01 December 1993 Pages: 193 - 198
Influence of Growth Conditions on the Modulation Mechanism of Photoreflectance Spectra of Single InGaAs/InAlAs Quantum Wells
Y. Baltagi
C. Bru
G. Hollinger
OriginalPaper 01 December 1993 Pages: 199 - 204
Characterization of Pseudomorphic Hemt Structures by Modulation Spectroscopy
A. Dimoulas
K. Zekentes
M. Androulidaki
OriginalPaper 01 December 1993 Pages: 205 - 210
Photoluminescence Characterization of InPs-Based Hemt Structures
Henry T. Hendriks
Steven K. Brierley
Noren Pan
OriginalPaper 01 December 1993 Pages: 211 - 216
Photoreflectance Characterization of InGaAs/GaAs Superlattices Grown on [111]-Oriented Substrates
R. G. Rodrigues
K. Yang
J. M. Borrego
OriginalPaper 01 December 1993 Pages: 217 - 223
Photoreflectance Characterization of InGaAs Lattice Matched to InP
V. Bellani
M. Amiotti
G. Landgren
OriginalPaper 01 December 1993 Pages: 225 - 230
Room Temperature Measurement of Photoluminescence Spectra of Semiconductors using an FT-Raman Spectrophotometer
J. D. Webb
D. J. Dunlavy
S. M. Vernon
OriginalPaper 01 December 1993 Pages: 233 - 240
FIBER OPTICS-BASED FOURIER TRANSFORM INFRARED SPECTROSCOPY FOR IN-SITU CONCENTRATION MONITORING IN OMCVD
Sateria Salim
K. F. Jensen
R. D. Driver
OriginalPaper 01 December 1993 Pages: 241 - 247
Application of FTIR Spectroscopy to the Characterization of As-Deposited and Chemical Mechanical Polished (CMP) Electron Cyclotron Resonance (ECR) Plasma Based SiO₂ Films
Mukeh Pesai
Ron Carpio
Robert Tolles
OriginalPaper 01 December 1993 Pages: 249 - 254
Characterization of Polysilicon Films by Raman Spectroscopy and Transmission Electron Microscopy: A Comparative Study ^*
David R. Tallant
Thomas J. Headley
Franz Geyling
OriginalPaper 01 December 1993 Pages: 255 - 260
Photoluminescence Study of Hydrogen-Related Defects in Silicon
A. Henry
B. Monemar
J.W. Corbett
OriginalPaper 01 December 1993 Pages: 261 - 266
Raman Scattering Characterization of Ultrathin Films of β-SiC
Ahn Goo Choo
Spirit Tlali
Andrew J. Steckl
OriginalPaper 01 December 1993 Pages: 267 - 271
Characterization of Cd_1-X Zn_xTe Alloys Using Infrared Reflectivity and Raman Scattering Spectroscopy
D. N. Talwar
Z. C. Feng
P. Becla
OriginalPaper 01 December 1993 Pages: 273 - 277
Optical Characterization of AlInP/GaAs Heterostructures
F.G. Johnson
G.E. Kohnke
G.W. Wicks
OriginalPaper 01 December 1993 Pages: 279 - 284
Characterization of Interfacial Structure of InGaAs/InP Short Period Superlattices by Raman Scattering and High Resolution X-RAY Diffraction
Teruo Mozume
OriginalPaper 01 December 1993 Pages: 285 - 290
In-Process Diagnostic System for Semiconductor Materials Using UHV Wafer Transfer Chamber
F. Uchida
M. Matsui
H. Nagano
OriginalPaper 01 December 1993 Pages: 293 - 298
Developing a Method for Wide-Control of the Self-Bias and its Adoption to Ion-Damage Control
Takeo Ohte
Makoto Goto
Minoru Sugawara
OriginalPaper 01 December 1993 Pages: 299 - 304
Relating Photoresist Etch Characteristics to Langmuir Probe Measurements in an Electron Cyclotron Resonance Source
K. T. Sung
W. H. Juan
M. Dahimene
OriginalPaper 01 December 1993 Pages: 305 - 310
Surface Reactivity of Silicon and Germanium in Cf₄-O₂ Reactive Ion Etching
Christophe Cardinaud
A. Campo
G. Turban
OriginalPaper 01 December 1993 Pages: 311 - 316
Real-Time Thermo-Mechanical Property Evaluation of Thin Films
John A. Rogers
K. A. Nelson
OriginalPaper 01 December 1993 Pages: 317 - 321
Hydrocarbon ECR Reactive Ion Etching of III-V Semiconductors with SIMS Plasma Probe Diagnostics
Douglas L. Melville
J. G. Simmons
D. A. Thompson
OriginalPaper 01 December 1993 Pages: 323 - 328
In-Situ Monitoring by Mass Spectrometry for GaAs Etched with an Electron Cyclotron Resonance Source
D. J. Kahaian
S. W. Pang
OriginalPaper 01 December 1993 Pages: 329 - 334
AlGaAs Microelectronic Device Processing Using an as Capping Layer
J.K. Grepstad
H. Husby
B.-O. Fimland
OriginalPaper 01 December 1993 Pages: 335 - 340
Optical Emission End-Point Detection for Via Hole Etching in InP and GaAs Power Device Structures
S. J. Pearton
F. Ren
C. Constantine
OriginalPaper 01 December 1993 Pages: 341 - 346
Reactive Sputtering in Oxidizing/Reducing Atmospheres
J. D. Klein
A. Yen
S. L. Clauson
OriginalPaper 01 December 1993 Pages: 347 - 352