Volume 29, Issue 1

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December 1983

Symposium I — Laser-Controlled Chemical Processing of Surfaces

Issue Editors:

A. W. Johnson,
D. J. Ehrlich,
H. R. Schlossberg

58 articles in this issue

Limiting and Enhancement Effects in Laser Chemical Vapor Deposition
S. D. Allen
R. Y. Jan
S. D. Vernon
OriginalPaper 01 September 1983 Pages: 1 - 8
Silicon CVD by Twin-Beam Processing
T. David Binnie
M. J. Colles
J. West
OriginalPaper 01 September 1983 Pages: 9 - 14
Plasma-Initiated Laser Deposition of Polycrystalline and Monocrystalline Silicon Films
J. M. Gee
P. J. Hargis Jr.
R. W. Light
OriginalPaper 01 September 1983 Pages: 15 - 20
Laser-Induced Deposition of Silicon Films and Cars Diagnostics
M. Hanabusa
H. Kikuchi
OriginalPaper 01 September 1983 Pages: 21 - 27
Wafer-Scale Laser Pantography: IV. Physics of Direct Laser-Writing Micron-Dimension Transistors
Irving P. Herman
Bruce M. McWilliams
Lowell L. Wood
OriginalPaper 01 September 1983 Pages: 29 - 34
Complete Fabrication of Bipolar Devices in Silicon
M. L. Lloyd
K. G. Ibbs
OriginalPaper 01 September 1983 Pages: 35 - 39
Chemical Vapor Deposition of Silicon Films by Pulsed CO₂ Laser Irradiaton of Silane
Y. Pauleau
R. Stawski
G. Auvert
OriginalPaper 01 September 1983 Pages: 41 - 46
Temperature Distributions in CW Laser Induced Pyrolytic Deposition
Klaus Piglmayer
Josef Doppelbauer
Dieter Bäuerle
OriginalPaper 01 September 1983 Pages: 47 - 54
Laser Direct Write Technologies as Tools for Gate-Array Development
D. J. Silversmith
D. J. Ehrlich
J. H. C. Sedlacek
OriginalPaper 01 September 1983 Pages: 55 - 59
Laser-Induced Chemical Vapor Deposition of Silicon Nitride Films
Gary A. West
Arunava Gupta
OriginalPaper 01 September 1983 Pages: 61 - 66
UV Laser-Initiated Deposition of Al₂O₃ Films: The Effect of Surface Irradiation
T. F. Deutsch
D. J. Silversmith
R. W. Mountain
OriginalPaper 01 September 1983 Pages: 67 - 72
Excimer Laser-Induced Deposition of InP and Indium-Oxide Films
V. M. Donnelly
M. Geva
R. F. Karlicek
OriginalPaper 01 September 1983 Pages: 73 - 79
Beam-Assisted CVD of Microelectronic Films
K. A. Emery
L. R. Thompson
G. J. Collins
OriginalPaper 01 September 1983 Pages: 81 - 92
Column IIIA Metal film Deposition by Laser Photoionization of Metal-Halide Molecules in the Vapor Phase
D. B. Geohegan
A. W. McCown
J. G. Eden
OriginalPaper 01 September 1983 Pages: 93 - 100
Laser-Induced Photodeposition of Fe Films from Iron Carbonyl
P. J. Love
R. T. Loda
Victor Rehn
OriginalPaper 01 September 1983 Pages: 101 - 108
Photochemical Vapor Deposition of Amorphous Silicon Using Mercury Photosensitization of Disilane
Yasuo Tarui
Katsumi Aota
Tadashi Saitoh
OriginalPaper 01 September 1983 Pages: 109 - 114
Recent Advances in UV Laser Photodeposition
J. Y. Tsao
D. J. Ehrlich
OriginalPaper 01 September 1983 Pages: 115 - 126
The Resolution of Photoelectrochemically Etched Features
J. Cheng
P. A. Kohl
OriginalPaper 01 September 1983 Pages: 127 - 132
Laser Fabrication of Micron-Size Structures on CdS
V. Daneu
J. Peers
A. Sanchez
OriginalPaper 01 September 1983 Pages: 133 - 137
Direct Holographic Processing Using Laser Chemistry
H. H. Gilgen
D. Podlesnik
R. M. Osgood Jr.
OriginalPaper 01 September 1983 Pages: 139 - 144
Laser Photochemical Etching of GaP in KOH Aqueous Solutions
A. Wayne Johnson
Gary C. Tisone
OriginalPaper 01 September 1983 Pages: 145 - 150
Localized Photoprocesses at Semiconductor-Electrolyte Interfaces Using a Programmable Laser Spot Scanner
C. A. Kavassalis
D. H. Longendorfer
R. D. Rauh
OriginalPaper 01 September 1983 Pages: 151 - 159
Deep-UV, Light-Assisted, Wet Etching of Compound Semiconductors
D. V. Podlesnik
H. H. Gilgen
R. M. Osgood
OriginalPaper 01 September 1983 Pages: 161 - 165
Single-Crystal Silicon Etching Characteristics Using Excimer Laser Cℓ₂ Gas
T. Arikado
M. Sekine
Y. Horiike
OriginalPaper 01 September 1983 Pages: 167 - 172
Photoenhancement of Gas-Solid Reactions by Surface Excitation
Carol I. H. Ashby
OriginalPaper 01 September 1983 Pages: 173 - 178
Excimer-Laser-Initiated, Dry Etching of Single Crystal GaAs
P. Brewer
S. Halle
R. M. Osgood
OriginalPaper 01 September 1983 Pages: 179 - 184
Laser-Induced Chemical Etching of Solids: Promises and Challenges
T. J. Chuang
OriginalPaper 01 September 1983 Pages: 185 - 194
Spatial-Resolution Limits of Laser Patterning: Submicrometer Projection Microchemistry
D. J. Ehrlich
J. Y. Tsao
OriginalPaper 01 September 1983 Pages: 195 - 202
Mechanism of Laser-Enhanced Etching of Silicon
F. A. Houle
OriginalPaper 01 September 1983 Pages: 203 - 209
Laser-Assisted Local Etching of Gallium Arsenide
M. Takai
J. Tokuda
S. Namba
OriginalPaper 01 September 1983 Pages: 211 - 216
Real-Time Diagnosis of Etching and Deposition Processes by Spectroscopic Ellipsometry
D. E. Aspnes
R. P. H. Chang
OriginalPaper 01 September 1983 Pages: 217 - 224
Laser-Excited Fluorescence Detection of Si₂ During Silane CVD
William G. Breiland
Michael E. Coltrin
Pauline Ho
OriginalPaper 01 September 1983 Pages: 225 - 230
Local Crystal Orientation in Laser Annealed Silicon Using a Raman Microprobe
L. A. Farrow
J. B. Hopkins
G. J. Fisanick
OriginalPaper 01 September 1983 Pages: 231 - 236
Sensitive, Non-Intrusive, In Situ Measurements of Plasma Electric Fields
Richard A. Gottscho
Cameron A. Moore
Glenn P. Davis
OriginalPaper 01 September 1983 Pages: 237 - 242
Laser Investigations of the Dynamics of Molecule-Surface Interaction
J. Hager
H. Walther
OriginalPaper 01 September 1983 Pages: 243 - 252
UV Absorption Spectra and Photolysis of Some Group II and Group VI Alkyls
S. J. C. Irvine
J. B. Mullin
J. L. Glasper
OriginalPaper 01 September 1983 Pages: 253 - 258
Gas Phase Spectroscopy of a Ge Film LCVD Reactor
J. F. Osmundsen
C. C. Abele
J. G. Eden
OriginalPaper 01 September 1983 Pages: 259 - 267
Laser-Induced Fluorescence Detection of Diatomic Products of Reactive Ion Etching: SiN, SiO, and SiF
R. Walkup
Ph. Avouris
G. S. Selwyn
OriginalPaper 01 September 1983 Pages: 269 - 274
Study of Photo-Induced Thin Film Growth on Cds Substrates
C. Arnone
C. Cali’
S. Riva-Sanseverino
OriginalPaper 01 September 1983 Pages: 275 - 281
Time-Resolved Optical Reflectivity and Transmission During Laser-Induced Oxidation of Cadmium Films
L. Baufay
M. Wautelet
R. Andrew
OriginalPaper 01 September 1983 Pages: 283 - 287
Laser-Induced Oxidation and Crystallization of Thin Amorphous Sputtered Cr Films
M. I. Birjega
C. A. Constantin
C. Sarbu
OriginalPaper 01 September 1983 Pages: 289 - 294
Electromagnetically-Induced Surface Microstructures and Enhanced Field Effects in Laser Processing
S. R. J. Brueck
D. J. Ehrlich
J. Y. Tsao
OriginalPaper 01 September 1983 Pages: 295 - 300
Mechanism of Laser-Assisted Evaporation of II–VI Semiconductors
J. T. Cheung
OriginalPaper 01 September 1983 Pages: 301 - 309
Infrared Laser-Induced Heterogeneous Reactions: Fluence-Dependent Branching Ratios in 2-Propanol with CuO
William E. Farneth
Patrick G. Zimmerman
Derk J. Hogenkamp
OriginalPaper 01 September 1983 Pages: 311 - 317
Ion Dynamics in Low Frequency RF Plasmas
Richard A. Gottscho
Daniel L. Flamm
Vincent M. Donnelly
OriginalPaper 01 September 1983 Pages: 319 - 324
Recent Advances in Laser-Enhanced Plating
R. J. Von Gutfeld
M. H. Gelchinski
L. T. Romankiw
OriginalPaper 01 September 1983 Pages: 325 - 332
Spectral Widths in the Rate Equations for Photodesorption by Laser Infrared
Joachim Heidberg
OriginalPaper 01 September 1983 Pages: 333 - 339
Infrared Laser Photodesorption of Adsorbed Phases
Ingo Hussla
T. J. Chuang
OriginalPaper 01 September 1983 Pages: 341 - 346
Pyrolytic Laser Activation of CdS Thin Film Photoconductors
A. H. Kitai
G. J. Wolga
OriginalPaper 01 September 1983 Pages: 347 - 352
Local Doping of GaAs by Laser-Stimulated Diffusion from the Gas Phase
H. Kräutle
W. Roth
H. Beneking
OriginalPaper 01 September 1983 Pages: 353 - 357

Volume 29, Issue 1

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