Volume 17, Issue 1

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December 1982

Symposium I — Laser Diagnostics and Photochemical Processing for Semiconductor Devices

Issue Editors:

R. M. Osgood,
S. R. J. Brueck,
H. R. Schlossberg

34 articles in this issue

Laser Fabrication of Microstructures: Effect of Geometrical Scaling on Chemical Reaction Rates
D. J. Ehrlich
J. Y. Tsao
OriginalPaper 15 July 1982 Pages: 3 - 8
Wafer-Scale Laser Lithography: I. Pyrolytic Deposition of Metal Microstructures
Irving P. Herman
Roderick A. Hyde
Lowell L. Wood
OriginalPaper 15 July 1982 Pages: 9 - 18
Production of Microstructures by Laser Pyrolysis
Dieter Bäuerle
OriginalPaper 15 July 1982 Pages: 19 - 28
Laser-Initiated Ga-Deposition on Quartz Substrates
Y. Eytz-Froidevaux
R. P. Salathe
H. H. Gilgen
OriginalPaper 15 July 1982 Pages: 29 - 34
UV Photodecomposition for Metal Deposition: Gas vs. Surface Phase Processes
Thomas H. Wood
J. C. White
B. A. Thacker
OriginalPaper 15 July 1982 Pages: 35 - 41
Laser Chemical Etching of Conducting and Semiconducting Materials
T. J. Chuang
OriginalPaper 15 July 1982 Pages: 45 - 56
High Resolution Etching of GaAs and CdS Crystals
D. V. Podlesnik
H. H. Gilgen
V. Daneu
OriginalPaper 15 July 1982 Pages: 57 - 63
Light Induced Etching of GaAs in a Zinc Atmosphere
R. P. Salathe
G. Baskhara Rao
OriginalPaper 15 July 1982 Pages: 65 - 71
Laser-Controlled Etching of Chromium-Doped and N-Doped <100> GaAs
Gary C. Tisone
A. Wayne Johnson
OriginalPaper 15 July 1982 Pages: 73 - 78
Optical Microanalysis of Small Semiconductor Structures
D. V. Murphy
S. R. J. Brueck
OriginalPaper 15 July 1982 Pages: 81 - 94
Raman Scattering as a Temperature Frobe for Laser Heating of Si
Dimitry Kirillov
James L. Merz
OriginalPaper 15 July 1982 Pages: 95 - 102
Measurement of Grain Boundary Parameters by Laser-Spot Photoconductivity
E. Poon
H. L. Evans
E. S. Yang
OriginalPaper 15 July 1982 Pages: 103 - 108
High Resolution Laser Diagnostics for Direct Gap Semiconductor Materials
R. P. Salathe
H. H. Gilgen
OriginalPaper 15 July 1982 Pages: 109 - 116
Laser Photolytic Deposition of Thin Films
P. K. Boyer
C. A. Moore
George J. Collins
OriginalPaper 15 July 1982 Pages: 119 - 127
UV Laser-Initiated Formation of Si₃N₄
T. F. Deutsch
D. J. Silversmith
R. W. Mountain
OriginalPaper 15 July 1982 Pages: 129 - 134
Evidence for Laser Induced Surface Silanol Formation
D. F. Muller
M. Rothschild
C. K. Rhodes
OriginalPaper 15 July 1982 Pages: 135 - 139
Selective Mn Doping of Thin Film ZnS:Mn Electroluminescent Devices by Laser Photochemical Vapor Deposition
A. Kitai
G. J. Wolga
OriginalPaper 15 July 1982 Pages: 141 - 147
Laser Spectroscopic Investigation of Gas-Phase Processes Relevant to Semiconductor Device Fabrication
R. F. Karlicek Jr.
V. M. Donnelly
W. D. Johnston Jr.
OriginalPaper 15 July 1982 Pages: 151 - 160
Laser-Induced Fluorescence Diagnostics of CF₄/O₂/H₂ Plasma Etching
S. Pang
S. R. J. Brueck
OriginalPaper 15 July 1982 Pages: 161 - 168
Spectroscopy and Photoreactions of Organometallic Molecules on Surfaces
C. J. Chen
R. M. Osgood Jr.
OriginalPaper 15 July 1982 Pages: 169 - 175
The Spectroscopy and Photolysis of Metallo-Organic Precursors to III–V Compounds
Martin R. Aylett
John Haigh
OriginalPaper 15 July 1982 Pages: 177 - 182
Semiconductor Thin Films Grown by Laser Photolysis
J. G. Eden
J. E. Greene
H. D. Desai
OriginalPaper 15 July 1982 Pages: 185 - 192
Laser Stimulated Growth of Epitaxial GaAs
Walter Roth
Herbert Kräutle
Heinz Beneking
OriginalPaper 15 July 1982 Pages: 193 - 198
Laser Induced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon
Renzo Bilenchi
Iva Gianinoni
Roberto Murri
OriginalPaper 15 July 1982 Pages: 199 - 205
Direct Writing Using Laser Chemical Vapor Deposition
S. D. Allen
A. B. Trigubo
R. Y. Jan
OriginalPaper 15 July 1982 Pages: 207 - 214
IR Laser-Induced Deposition of Silicon Thin Films
T. R. Gattuso
M. Meunier
J. S. Haggerty
OriginalPaper 15 July 1982 Pages: 215 - 222
Pulsed UV Excimer Laser Doping of Semiconductors
T. F. Deutsch
OriginalPaper 15 July 1982 Pages: 225 - 234
Submicrometer-Linewidth Laser Doping
J. Y. Tsao
D. J. Ehrlich
OriginalPaper 15 July 1982 Pages: 235 - 242
Characteristics of Laser Implantation Doping
K. G. Ibbs
M. L. Lloyd
OriginalPaper 15 July 1982 Pages: 243 - 248
Using Optical Fibers in Laser Processing
L. D. Laude
L. Baufay
A. Pigeolet
OriginalPaper 15 July 1982 Pages: 249 - 253
Laser-Pulsed Plasma Chemistry: Surface Oxidation of Niobium
R. F. Marks
R. A. Pollak
Ph. Avouris
OriginalPaper 15 July 1982 Pages: 257 - 264
Photoelectrochemical Deposition of Metal Patterns on Semiconductors
Timothy L. Rose
Ronald H. Micheels
R. David Rauh
OriginalPaper 15 July 1982 Pages: 265 - 272
Analysis of Laser-Enhanced Adsorption/Desorption Processes on Semiconductor Surfaces via Electronic Surface State Excitation
William C. Murphy
A. C. Beri
Jui-Teng Lin
OriginalPaper 15 July 1982 Pages: 273 - 282
Formation of CdO and Cu₂O Films by Laser Irradiation of the Corresponding Metallic Films in Air
Rod Andrew
Luc Baufay
Michel Wautelet
OriginalPaper 15 July 1982 Pages: 283 - 289

Volume 17, Issue 1

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