Volume 1222, Issue 1 | MRS Online Proceedings Library

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Volume 1222, Issue 1

December 2009

Symposium DD — Microelectromechanical Systems — Materials and Devices III

Issue Editors:

J. Bagdahn,
N. C. Sheppard,
K. Turner,
S. Vengallatore

30 articles in this issue

Towards NEMS Fluid Sensors Based on Suspended Nanomaterials
Luis A. Jauregui
Hao Lu
Yong P. Chen
OriginalPaper 01 April 2010 Article: 531
A Low-Range Drift-Free Bio-compatible Pressure Sensor Based on P(VDF-TrFE) Piezoelectric Thin Film
Xiaoyang Li
Timothy Reissman
Edwin C. Kan
OriginalPaper 01 April 2010 Article: 529
Fabrication of Microfluidic Devices in Thermoplastic Elastomeric Materials for DNA Detection on Thermal Plastic Substrate
Kebin Li
Daniel Brassard
Teodor Veres
OriginalPaper 01 April 2010 Article: 524
Control and Operation Schemes for Micro-Thermal Conductivity Detectors in Gas Chromatography
Bradley C. Kaanta
Hua Chen
Xin Zhang
OriginalPaper 01 April 2010 Article: 520
Fabrication, Transport and Raman Studies of Pulsed Laser Deposited Al/Ga Doped PBCO Thin Films
Hom Kandel
TarPin Chen
Dever Norman
OriginalPaper 01 April 2010 Article: 516
Liquid Encapsulation by Bonding-In-Liquid Technique
Yoshiyuki Okayama
Keijiro Nakahara
Norihisa Miki
OriginalPaper 01 April 2010 Article: 515
Microwave Absorbing Ferrite Thin Films for Microwave Heating of Microstructured Reactors
Pengzhao Gao
Evgeny V. Rebrov
Gregory Kozlowski
OriginalPaper 01 April 2010 Article: 509
A Simple Technique for Sub-10 nm Planar Nanofluidic Channel Fabrication
Chunrong Song
Pingshan Wang
OriginalPaper 01 April 2010 Article: 508
Synthesis and Characterization of Nanocomposite Thin Films for MEMS Applications
Kaushik Das
Cheol Park
Srikar Vengallatore
OriginalPaper 01 April 2010 Article: 506
Microscale Patterning of Single Crystal Diamond Using Sidero-Metal/Diamond Thermochemical Reaction
Yuko Morofushi
Hajime Matsushita
Norihisa Miki
OriginalPaper 01 April 2010 Article: 505
Advanced wet etch bulk micromachining in {100} silicon wafers
Prem Pal
Kazuo Sato
OriginalPaper 01 April 2010 Article: 504
Densely-Packed Microbowl Array with Balanced Dielectrophoretic Forces for Single-Cell Microarray
Maesoon Im
Dong-Haan Kim
Yang-Kyu Choi
OriginalPaper 01 April 2010 Article: 503
Polycrystalline Silicon-Germanium Electrode Contact Technology Improvement for MEMS Applications
Gert Claes
Simone Severi
Ann Witvrouw
OriginalPaper 01 April 2010 Article: 403
Aluminum Thermo Compression Bonding Characterization
E. Cakmak
V. Dragoi
T. Alford
OriginalPaper 01 April 2010 Article: 402
Piezoresistive Cantilever Optimization and Applications
Joseph C. Doll
Sung-Jin Park
Beth L. Pruitt
OriginalPaper 01 April 2010 Article: 306
In-situ Measurement of Actuation in Thin Films of Conducting Polymers
Lauren C. Montemayor
Priam V. Pillai
Ian W. Hunter
OriginalPaper 01 April 2010 Article: 302
Thickness-Dependant Electrical Characteristics of Nitrogen-Doped Polycrystalline 3C-SiC Thin Films Deposited by LPCVD
Man I. Lei
Te-Hao Lee
Mehran Mehregany
OriginalPaper 01 April 2010 Article: 233
Fourier Transform Infrared Spectroscopy Characterization of AlN Thin Films Grown on Sacrificial Silicon Oxide Layers via Metal Organic Vapor Phase Expitaxy
Sridhar Kuchibhatla
L. E. Rodak
D. Korakakis
OriginalPaper 01 April 2010 Article: 228
The Tunability in Mechanical Properties and Fracture Toughness of Sputtered Silicon Oxynitride Thin Films for MEMS-based Infrared Detectors
I-Kuan Lin
Ping-Hsin Wu
Xin Zhang
OriginalPaper 01 April 2010 Article: 220
Suppression of Inelastic Deformation in Multilayer Microcantilevers with Nanoscale Coating
I-Kuan Lin
Xin Zhang
Yanhang Zhang
OriginalPaper 01 April 2010 Article: 219
Thin Film Bulk Acoustic Wave Resonators for Continuous Monitoring in the Physical, Chemical and Biological Realms
Greg Ashley
Jack Luo
Dave Cullen
OriginalPaper 01 April 2010 Article: 218
Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments
Kuang-Shun Ou
I-Kuan Lin
Xin Zhang
OriginalPaper 01 April 2010 Article: 214
Effect of Humidity on Dielectric Charging Process in Electrostatic Capacitive RF MEMS Switches Based on Kelvin Probe Force Microscopy Surface Potential Measurements
U. Zaghloul
G. J. Papaioannou
R. Plana
OriginalPaper 01 April 2010 Article: 211
The Effect of Ion Delivery on Polypyrrole Strain and Strain Rate under Elevated Temperature
Yenmei Keng
Priam V. Pillai
Ian W. Hunter
OriginalPaper 01 April 2010 Article: 210
Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method
Takuya Nomura
Kazunori Koga
Masaru Hori
OriginalPaper 01 April 2010 Article: 209
Measuring the Young’s Relaxation Modulus of PDMS Using Stress Relaxation Nanoindentation
Ping Du
Hongbing Lu
Xin Zhang
OriginalPaper 01 April 2010 Article: 203
Micromachined Active Piezoelectric Structures for Applications above 600 °C
Jan Sauerwald
Denny Richter
Bertram Schmidt
OriginalPaper 01 April 2010 Article: 107
Effect of Thin Aluminum Coatings on Structural Damping of Silicon Microresonators
Guruprasad Sosale
Sairam Prabhakar
Srikar Vengallatore
OriginalPaper 01 April 2010 Article: 106
ZnO thin film surface acoustic wave based lab-on-a-chip
J. K. Luo
Y. Q. Fu
W. I. Milne
OriginalPaper 01 April 2010 Article: 105
MEMS Microresonators for High Temperature Sensor Applications
Dharanipal Doppalapudi
Richard Mlcak
Harry Tuller
OriginalPaper 01 April 2010 Article: 102