Volume 101, Issue 1

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December 1987

Symposium B — Laser and Particle-Beam Chemical Processing for Microelectronics

Issue Editors:

D.J. Ehrilich,
G.S. Higashi,
M.M. Oprysko

77 articles in this issue

Recent Progress in Excimer Laser Lithography
I. Higashikawa
M. Nonaka
Y. Horiike
OriginalPaper 26 February 2011 Pages: 3 - 12
Optical Considerations for Excimer Projection Systems
M. Rothschild
D. J. Ehrlich
OriginalPaper 26 February 2011 Pages: 13 - 20
Soft Vacuum, Pulsed Electron Beam Processing of Polyimides
J. Krishnaswamy
L. Li
Mary Ann Caolo
OriginalPaper 26 February 2011 Pages: 21 - 26
Excimer Laser Induced Micron-Size Pattern Etching By Image Projection
James H. Brannon
OriginalPaper 26 February 2011 Pages: 27 - 31
193-Nm Excimer Laser-Assisted Etching of Polysilicon Films Using Cl₂
Son Van Nguyen
S. Fridmann
J. Rembetski
OriginalPaper 26 February 2011 Pages: 33 - 40
Laser Direct Writing of Aluminum
T. Cacouris
G. Scelsi
R. R. Krchnavek
OriginalPaper 26 February 2011 Pages: 43 - 48
Limiting Steps at Low Temperature in Direct Writing of Al on Si From Tma
J. Flicstein
J. E. Bouree
A. M. Pougnet
OriginalPaper 26 February 2011 Pages: 49 - 54
Room Temperature Uv Laser Continuous Direct Writing of Al From Tma
J. E. Bouree
J. Flicstein
OriginalPaper 26 February 2011 Pages: 55 - 60
Low Resistivity Contact Formation for Lsi Interconnection With Short-Pulse-Laser Induced Mo Cvd
F. Uesugi
Y. Morishige
K. Matsumoto
OriginalPaper 26 February 2011 Pages: 61 - 65
Direct Writing of Carbon Interconnections
Alan M. Lyons
C. W. Wilkins Jr.
F. T. Mendenhall
OriginalPaper 26 February 2011 Pages: 67 - 73
Laser-Induced Metal Deposition on Silicon Membranes for X-Ray Lithography
H.-C. Petzold
R. Putzar
I. Wilke
OriginalPaper 26 February 2011 Pages: 75 - 80
Compact Laser Source for Metal Deposition
G. Arjavalingam
M. M. Oprysko
J. E. Hurst Jr.
OriginalPaper 26 February 2011 Pages: 81 - 87
Periodic Structure Formation During Laser Direct-Writing of Palladium Acetate Films: An Optically Regulated Mechanism
L. Baufay
M. E. Gross
OriginalPaper 26 February 2011 Pages: 89 - 94
Direct Writing of Copper Lines From Copper Formate Film
Arunava Gupta
Rangarajan Jagannathan
OriginalPaper 26 February 2011 Pages: 95 - 100
Laser Induced Metal Deposition on Semiconductor, Metallic and Polymeric Substrates From Electroplating Solutions
J. Zahavi
S. Tamir
M. Halliwell
OriginalPaper 26 February 2011 Pages: 101 - 106
Modeling of Pyrolytic Laser-Assisted Chemical Vapor Deposition: Effects of Kinetics and Choice Of Substrate
D. C. Skouby
K. F. Jensen
OriginalPaper 26 February 2011 Pages: 107 - 112
Stokes/Anti-Stokes Raman Microprobe Analysis of Laser-Heated Silicon Microstructures on Silicon Dioxide
Gregory D. Pazionis
Hua Tang
Irving P. Herman
OriginalPaper 26 February 2011 Pages: 113 - 118
Initial Stages of Silicon Growth on the (100) Surface of Silicon By Localized Laser Cvd
David E. Kotecki
Irving P. Herman
OriginalPaper 26 February 2011 Pages: 119 - 124
Localized Laser-Assisted Deposition of Silicon,Silicon Nitride and Silicon Dioxide
Geoffrey Auvert
Yves Pauleau
Didier Tonneau
OriginalPaper 26 February 2011 Pages: 125 - 130
Computer Simulation of Laser Induced Temperatures for the Laser Direct Writing technique
Didier Tonneau
Geoffroy Auvert
OriginalPaper 26 February 2011 Pages: 131 - 136
Fundamentals of Laser Photochemistry for Surface Modification
M. Stake
Y. Zhang
S. Küper
OriginalPaper 26 February 2011 Pages: 139 - 150
Xps, Ups, and Hreels Studies of Excimer-Laser-Induced Dissociation of Al₂(Ch₃) Adsorbed on Si(100) Surfaces
D. Lubben
T. Motooka
W. R. Salaneck
OriginalPaper 26 February 2011 Pages: 151 - 157
Adsorbed Tma on Dielectric Oxide Surfaces
A. C. Engelsberg
J. J. Chera
G. M. Korenowski
OriginalPaper 26 February 2011 Pages: 159 - 164
Low Temperature UV Photodeposition of Aluminum from TMA: Characterization and Control of Deposit Composition
T. E. Orlowski
D. A. Mantell
OriginalPaper 26 February 2011 Pages: 165 - 170
XPS Surface Composition Analysis During UV Laser Photodeposition of Al From Tiba on Si (100) Substrates: Direct Observation of the Prenucleation Regime
David A. Mantell
T. E. Orlowski
OriginalPaper 26 February 2011 Pages: 171 - 176
Surface Chemical Reactions in the Mocvd of Aluminum Films
Brian E. Bent
Ralph G. Nuzzo
Lawrence H. Dubois
OriginalPaper 26 February 2011 Pages: 177 - 182
Surface Chemical Modification for Via-Hole Filling Using Tri-Isobutylaluminum Chemical Vapor Deposition
C. G. Fleming
G. E. Blonder
G. S. Higashi
OriginalPaper 26 February 2011 Pages: 183 - 187
Al/Si Interface Characteristics Formed by Partially Ionized Beam Deposition at 2.5Kv
J. Wong
C. Lam
T.-M. Lu
OriginalPaper 26 February 2011 Pages: 189 - 193
Thermal Stability of Metal Films Deposited by Ionized Cluster Beams
I. Yamada
H. Usui
T. Takagi
OriginalPaper 26 February 2011 Pages: 195 - 200
Laser-Assisted Deposition of Fe and W: Photodecomposition of Fe(CO)₅, and W(CO)₆ on Si(111)-(7×7)
Jon R. Swanson
C. M. Friend
Y. J. Chabal
OriginalPaper 26 February 2011 Pages: 201 - 206
Quartz Crystal Microbalance Determination of Laser Photochemical Deposition Rates: Mechanism of Laser Photochemical Deposition From the Group 6 Hexacarbonyls
Robert L. Jackson
George W. Tyndall
OriginalPaper 26 February 2011 Pages: 207 - 212
Distinguishing Laser Induced Thermal and Photochemical Surface Reactions by Photodeposit Morphology
Wesley C. Natzle
OriginalPaper 26 February 2011 Pages: 213 - 216
Excimer Laser Photolysis of Organometallic Compounds Adsorbed on Substrates
Hideyuki Suzuki
Koji Mori
Hiroyasu Sato
OriginalPaper 26 February 2011 Pages: 217 - 220
Laser-Stimulated Noble Metal Deposition From Gaseous and Condensed Acetylacetonates. Photoreactions in the Supersonic Jet and Above Silicon
Joachim Heidberg
Rahman Daghighi-Ruhi
Achim Habekost
OriginalPaper 26 February 2011 Pages: 221 - 229
Laser Ablation-Molecular Beam System. Reactions of Electrons or Ions From Metal Substrates With Organometallic, Metal Carbonyl and Organic Molecules
Kenzo Toya
Tadashi Oka
Hiroyasu Sato
OriginalPaper 26 February 2011 Pages: 231 - 235
Laser Induced Forward Transfer
R. J. Baseman
A. Gupta
C. Progler
OriginalPaper 26 February 2011 Pages: 237 - 242
An Analysis of the Effect of System Variables on the Quality of Thin Films and Powders Produced by Laser-Breakdown Chemical Vapor Deposition
E. L. Joyce Jr.
T. R. Jervis
OriginalPaper 26 February 2011 Pages: 243 - 247
Mass Spectrometric Study of Laser-Induced Chemical Vapor Deposition of Gold
Toivo T. Kodas
Paul B. Comita
OriginalPaper 26 February 2011 Pages: 249 - 254
Microstructure of Gold Films Grown by Ion Induced Deposition
J. S. Ro
A. D. Dubner
J. Melngailis
OriginalPaper 26 February 2011 Pages: 255 - 260
Buried Metal Deposition on Gallium Arsenide by Laser-Induced Thermochemical Reaction
Jun Tokuda
Mikio Takai
Susumu Namba
OriginalPaper 26 February 2011 Pages: 261 - 266
Superconductors With Structured Surfaces: Fields and Currents
Z. C. Wu
Daniel A. Jelski
Thomas F. George
OriginalPaper 26 February 2011 Pages: 267 - 272
Photo-Assisted Molecular Layer Epitaxy
Jun-Ichi Nishizava
Toru KurabayashI
OriginalPaper 26 February 2011 Pages: 275 - 284
Laser Enhanced Selective Epitaxy of ιii-V Compounds
N. H. Karam
H. Liu
G. Rozgonyi
OriginalPaper 26 February 2011 Pages: 285 - 290
Effects of Excimer Laser Irradiation on Mbe and Mo-Mbe Growth of (Al)Gaas On Gaas And (Ca,Sr)F₂/Gaas Substrates
V. M. Donnelly
C. W. Tu
R. C. Farrow
OriginalPaper 26 February 2011 Pages: 291 - 299
Reactions in Omcvd: Detection of Gas Phase Radicals In Gaas Deposition Under Single Gas-Surface Collision Conditions
D. W. Squire
C. S. Dulcey
M. C. Lin
OriginalPaper 26 February 2011 Pages: 301 - 306
Excimer Laser Irradiation Effect on Metalorganic Molecular Beam Deposition of Al and Alas : Prospects for Laser-Assisted Epitaxial Growth of Gaalas
Eisuke Tokumitsu
Takumi Yamada
Kiyoshi Takahashi
OriginalPaper 26 February 2011 Pages: 307 - 312
Photolytic Deposition of Insb Films
S. P. Zuhoski
K. P. Killeen
R. M. Biefeld
OriginalPaper 26 February 2011 Pages: 313 - 318
Excimer Laser-Assisted Movpe of Cdte on Gaas (100): Crystal Growth and Mechanisms
J. J. Zinck
P. D. Brewer
L. W. Tutt
OriginalPaper 26 February 2011 Pages: 319 - 326
Photodissociation Dynamics of Alkyltellurides
P. D. Brewer
J. E. Jensen
J. J. Zinck
OriginalPaper 26 February 2011 Pages: 327 - 330
Thermal and Photon-Induced Chemistry of Adsorbed Cadmium and Tellurium Alkyls
C. D. Stinespring
A. Freedman
OriginalPaper 26 February 2011 Pages: 331 - 335

Volume 101, Issue 1

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