Copper-Based Metallization in ULSI Structures Jian LiTom E. SeidelJim W. Mayer Copper Metallization in Industry 26 September 2020 Pages: 15 - 22
Materials Issues in Copper Interconnections J. M. E. HarperE. G. ColganC. E. Uzoh Copper Metallization in Industry 26 September 2020 Pages: 23 - 29
Barriers Against Copper Diffusion into Silicon and Drift Through Silicon Dioxide Shi-Qing Wang Copper Metallization in Industry 26 September 2020 Pages: 30 - 40
Chemical Vapor Deposition of Copper for IC Metallization: Precursor Chemistry and Molecular Structure Pascal DoppeltThomas H. Baum Copper Metallization in Industry 26 September 2020 Pages: 41 - 48
Chemical Vapor Deposition of Copper for Advanced On-Chip Interconnects A. V. GelatosA. JainC. J. Mogab Copper Metallization in Industry 26 September 2020 Pages: 49 - 54
Electro less Copper Deposition on Metals and Metal Suicides Cecilia Y. Mak Copper Metallization in Industry 26 September 2020 Pages: 55 - 62
Planarized Copper Multilevel Interconnections for ULSI Applications N. MisawaT. OhbaH. Yagi Copper Metallization in Industry 26 September 2020 Pages: 63 - 67
Copper Metallization Technology for Deep Submicron ULSIs Y. AritaN. AwayaM. Sato Copper Metallization in Industry 26 September 2020 Pages: 68 - 74
European Copper Interconnection Project J. Torres Copper Metallization in Industry 26 September 2020 Pages: 75 - 75
C-MRS and E-MRS to Hold Symposium on Electronic and Optoelectronic Materials International Union of Materials Research Societies 26 September 2020 Pages: 76 - 76
Short Courses About Internet and Federal Materials Research Programs Debut at 1994 MRS Fall Meeting MRS News 26 September 2020 Pages: 77 - 77
Nominations Being Accepted for MRS Outstanding Young Investigator Award MRS News 26 September 2020 Pages: 77 - 77