1. Foreword to the Special Issue on Atomic and Close-to-Atomic Scale Metrology

   • Gaoliang Dai
   • Daesung Park
   • Ndubuisi George Orji

   Foreword Open access 18 June 2022 Pages: 81 - 82

2. Research Activities of Nanodimensional Standards Using Atomic Force Microscopes, Transmission Electron Microscope, and Scanning Electron Microscope at the National Metrology Institute of Japan

   • Ichiko Misumi
   • Ryosuke Kizu
   • Tomoo Sigehuzi

   Review Paper Open access 04 November 2021 Pages: 83 - 90

   

3. Comparison of EUV Photomask Metrology Between CD-AFM and TEM

   • Gaoliang Dai
   • Kai Hahm
   • Markus Heidelmann

   Original Article Open access 03 February 2022 Pages: 91 - 100

   

4. DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images

   • Hongchu Du

   Original Article Open access 24 May 2022 Pages: 101 - 111

   

5. Slice Thickness Optimization for the Focused Ion Beam-Scanning Electron Microscopy 3D Tomography of Hierarchical Nanoporous Gold

   • Alexander Shkurmanov
   • Tobias Krekeler
   • Martin Ritter

   Original Article Open access 30 March 2022 Pages: 112 - 118

   

6. Automatic Measurement of Silicon Lattice Spacings in High-Resolution Transmission Electron Microscopy Images Through 2D Discrete Fourier Transform and Inverse Discrete Fourier Transform

   • Fang Wang
   • Yushu Shi
   • Wei Li

   Review Paper Open access 06 April 2022 Pages: 119 - 126

   

7. AFM Measurements and Tip Characterization of Nanoparticles with Different Shapes

   • Roberto Bellotti
   • Gian Bartolo Picotto
   • Luigi Ribotta

   Original Article Open access 21 February 2022 Pages: 127 - 138

   

8. Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation

   • Janik Schaude
   • Tino Hausotte

   Original Article Open access 11 June 2022 Pages: 139 - 148

   

9. Analysis of Line-Edge Roughness Using EUV Scatterometry

   • Analía Fernández Herrero
   • Frank Scholze
   • Victor Soltwisch

   Original Article Open access 02 March 2022 Pages: 149 - 158

   

10. Polarization Measurement Method Based on Liquid Crystal Variable Retarder (LCVR) for Atomic Thin-Film Thickness

    • Yucong Yuan
    • Chengyuan Yao
    • Chunguang Hu

    Original Article Open access 06 April 2022 Pages: 159 - 166

    

11. Origins of Ultrafast Pulse Laser-Induced Nano Straight Lines with Potential Applications in Detecting Subsurface Defects in Silicon Carbide Wafers

    • Tan Shu
    • Feng Liu
    • Gary J. Cheng

    Original Article 13 April 2022 Pages: 167 - 178

    

12. Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication

    • Xiao Deng
    • Wen Tan
    • Tongbao Li

    Original Article Open access 26 April 2022 Pages: 179 - 187