1. Kinetics and Mechanisms of Reactive-Ion Etching of Si and SiO₂ in a Plasma of a Mixture of HBr + O₂

   • A. M. Efremov
   • V. B. Betelin
   • K.-H. Kwon

   OriginalPaper 27 January 2021 Pages: 379 - 384

   

2. Technology of Nanosized Metal Layers for Forming a Reliable Contact to the Drain Area of Silicon Transistors

   • T. A. Ismailov
   • A. R. Shakhmaeva
   • B. A. Shangereeva

   OriginalPaper 27 January 2021 Pages: 385 - 388

   

3. Thermal Atomic Layer Deposition of TiN_x Using TiCl₄ and N₂H₄

   • A. I. Abdulagatov
   • M. Kh. Rabadanov
   • I. M. Abdulagatov

   OriginalPaper 27 January 2021 Pages: 389 - 403

   

4. Microwave Characteristics of Amplifiers on Nanoheterostructures of Gallium Nitride in the 80–100 GHz Frequency Range

   • D. L. Gnatyuk
   • R. R. Galiev
   • Yu. V. Fedorov

   OriginalPaper 27 January 2021 Pages: 404 - 410

   

5. Injection Diffusion-Drift Pulse Former

   • D. S. Gaev
   • S. Sh. Rekhviashvili

   OriginalPaper 27 January 2021 Pages: 411 - 415

   

6. Amorphization of Vanadium Oxides during the Reversible Insertion of Lithium

   • A. M. Skundin
   • A. A. Mironenko
   • O. E. Kuznetsov

   OriginalPaper 27 January 2021 Pages: 416 - 422

   

7. Effect of Point Defects on the Electromigration Rate at the Interface of Joined Materials

   • T. M. Makhviladze
   • M. E. Sarychev

   OriginalPaper 27 January 2021 Pages: 423 - 430

8. Spots Concept for Problems of Artificial Intelligence and Algorithms of Neuromorphic Systems

   • N. A. Simonov

   OriginalPaper 27 January 2021 Pages: 431 - 444

   

9. Simulation of a Normally-off HEMT Transistor Based on a GaN/AlGaN with a p-Gate

   • V. I. Egorkin
   • V. E. Zemlyakov
   • O. B. Kukhtyaeva

   OriginalPaper 27 January 2021 Pages: 445 - 451

   

10. Modeling of the Crystallization and Correlation of the Properties with the Composition and Particle Size in Two-Dimensional GaS_xSe_{1 – x} (0 ≤ х ≤ 1)

    • S. M. Asadov
    • S. N. Mustafaeva
    • V. F. Lukichev

    OriginalPaper 27 January 2021 Pages: 452 - 465