Thermally Induced Viscous Flow of Borophosphosilicate-Glass Thin Films on Stepped Surfaces, Part 1: A Review of Quantitative Studies on Furnace and Rapid Thermal Annealing V. Y. Vasilev OriginalPaper Pages: 125 - 135
Selective Anodizing for Making Multilevel Interconnections A. I. Vorob'evaV. A. SokolV. M. Parkun OriginalPaper Pages: 136 - 144
Formation and Properties of an Oxide Film on an Si3N4Surface under Thermal Oxidation A. E. IvanchikovA. M. Kisel'V. E. Borisenko OriginalPaper Pages: 145 - 150
Mechanism of the Ultradeep Anisotropic Chemical Etching of Si(100) in the Microfabrication of Piezoresistive Pressure Sensors L. V. SokolovS. V. ArkhipovV. M. Shkol'nikov OriginalPaper Pages: 151 - 157
Al x Ga1 – x As/GaAs/Al x Ga1 – x As Double Quantum Well with a Thin AlAs Interwell Barrier: Structural Characterization by SIMS and XRD A. M. Afanas'evG. B. GalievM. A. Chuev OriginalPaper Pages: 158 - 164
Quantitative Optical Inspection of Mirror-Like Wafer Surfaces S. F. Sen'koA. S. Sen'koE. G. Puglachenko OriginalPaper Pages: 165 - 171
Triple-Collector Lateral Bipolar Magnetotransistor: Response Mechanism and Relative Sensitivity A. V. KozlovM. A. KorolevR. D. Tikhonov OriginalPaper Pages: 172 - 177
Fractal Analysis of Digital Systems: The Structure and Properties of the Scale Factor P. A. Arutyunov OriginalPaper Pages: 178 - 181
Delay-Conscious Switch-Level Modeling of MOS LSI Circuits L. A. Zolotorevich OriginalPaper Pages: 182 - 188
