Gas-phase reactions in plasmas of SF6 with O2 in He K. R. RyanI. C. Plumb OriginalPaper Pages: 263 - 280
Gas-phase combination reactions of SF4 and SF5 with F in plasmas of SF6 K. R. RyanI. C. Plumb OriginalPaper Pages: 281 - 291
Reactions of water vapor or molecular hydrogen with trichloroethylene in a microwave plasma reactor Joseph W. BozzelliRobert B. Barat OriginalPaper Pages: 293 - 314
Large-area microwave and radiofrequency plasma etching of polymers A. M. WrobelB. LamontagneM. R. Wertheimer OriginalPaper Pages: 315 - 329
Plasma-assisted etching of paper S. SapiehaA. M. WrobelM. R. Wertheimer OriginalPaper Pages: 331 - 346