Mechanism of silicon film deposition in the RF plasma reduction of silicon tetrachloride G. BrunoP. CapezzutoF. Cramarossa OriginalPaper Pages: 109 - 125
Tomographic reconstruction of volume emission coefficients from line integral data J. R. Fincke OriginalPaper Pages: 127 - 141
Effects of UV light irradiation on propane in an argon plasma P. Meubus OriginalPaper Pages: 143 - 157
A study of chromic oxide decomposition in an RF argon plasma P. MeubusA. Huczko OriginalPaper Pages: 159 - 177
Ammonia synthesis by means of plasma over MgO catalyst Kazuo SugiyamaKiyoshi AkazawaOkio Nomura OriginalPaper Pages: 179 - 193
