Intermediate and high-mass ion beams from a 10-cm Duopigatron P. D. WeberR. M. Gilgenbach OriginalPaper Pages: 75 - 88
Mass spectrometric diagnosis of the surface nitriding mechanism in a d.c. glow discharge Andreas SzaboHerbert Wilhelmi OriginalPaper Pages: 89 - 105
Mass spectrometer-wall probe diagnostic of Ar discharges containing SF6 and/or O2: Reactive ions in etching plasmas H. G. LergonM. VenugopalanK. G. Müller OriginalPaper Pages: 107 - 118
H2 plasma development of X-ray imaged patterns on plasma-polymerized resists Masaru HoriTetsuya MiwaShinzo Morita OriginalPaper Pages: 119 - 127
Effects of metallic vapor on the properties of an argon arc plasma J. Mostaghimi-TehraniE. Pfender OriginalPaper Pages: 129 - 139
