Electron scattering and dissociative attachment by SF6 and its electrical-discharge by-products H. -X. WanJ. H. MooreR. J. Van Brunt OriginalPaper Pages: 1 - 16
Negative ion formation in compounds relevant to SF6 decomposition in electrical discharges I. SauersL. G. ChristophorouS. M. Spyrou OriginalPaper Pages: 17 - 35
Mechanisms of surface processes in silicon etching Yu. E. BabanovV. B. Svetovoy OriginalPaper Pages: 37 - 59
Laser studies of the reactivity of SiO with the surface of a depositing film Richard J. BussPauline HoM. E. Weber OriginalPaper Pages: 61 - 76
Application of a rotating high-pressure glow discharge for the dissociation of hydrogen sulfide I. TrausH. SuhrD. R. Evans OriginalPaper Pages: 77 - 91
Spectroscopic investigation of the discharge for PA-CVD of TiN K. -T. RieA. GebauerJ. Wöhle OriginalPaper Pages: 93 - 101
Air microwave-induced plasma: Relation between ion density and atomic oxygen density J. Al AndariA. M. DiamyR. I. Ben-Aim OriginalPaper Pages: 103 - 116
Catalytic effect of iron wires on the syntheses of ammonia and hydrazine in a radio-frequency discharge Haruo UyamaToshiyuki NakamuraOsamu Matsumoto OriginalPaper Pages: 117 - 131
Steel surface processing by a continuous optical discharge plasma B. G. Gireń OriginalPaper Pages: 133 - 140
Pulverized coal plasma gasification R. A. KalinenkoA. P. KuznetsovA. B. Ustimenko OriginalPaper Pages: 141 - 167