Plasma-chemical reactions in weakly decomposed CCl4 F. -W. BreitbarthH. -J. TillerR. Reinhardt OriginalPaper Pages: 293 - 316
Doppler-broadened line shapes of atomic hydrogen in a parallel-plate radio frequency discharge Anthony L. CappelliRichard A. GottschoTerry A. Miller OriginalPaper Pages: 317 - 331
Plasma etching of refractory metals (W, Mo, Ta) and silicon in SF6 and SF6-O2. An analysis of the reaction products A. PicardG. Turban OriginalPaper Pages: 333 - 351
Glow discharge deposition of tetramethylsilane films Y. CatherineA. Zamouche OriginalPaper Pages: 353 - 368
Plasma reactions of methane in nitrogen and nitrogen/oxygen carriers by matrix isolation FTIR spectroscopy David E. Tevault OriginalPaper Pages: 369 - 390
Particle dynamics and particle heat and mass transfer in thermal plasmas. Part II. Particle heat and mass transfer in thermal plasmas Y. C. LeeY. P. ChyouE. Pfender OriginalPaper Pages: 391 - 414