System Level Modeling of Microsystems Using Order Reduction Methods Sven ReitzJens BastianPeter Schwarz OriginalPaper Pages: 7 - 16
First Harmonic (2f) Characterisation of Resonant Frequency and Q-Factor of Micromechanical Transducers V.J. LogeeswaranF.E.H. TayY.C. Liang OriginalPaper Pages: 17 - 33
A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation Dirk ScheibnerJürgen WibbelerWolfram Dötzel OriginalPaper Pages: 35 - 43
Experimental Determination of Micromachined Discrete and Continuous Device Spring Constants Using Nanoindentation Method M.L. ChanFrancis E.H. TayF.S. Chau OriginalPaper Pages: 45 - 56
A Novel Approach to Implementing On-Chip Synchronous Detection for CMOS Optical Detector Systems G.N. LuP. PittetA. El Mourabit OriginalPaper Pages: 57 - 66