Design of Compliant Mechanisms: Applications to MEMS Sridhar KotaJinyong JooJeff Sniegowski OriginalPaper Pages: 7 - 15
The Atomic Limit of Finite Element Modeling in MEMS: Coupling of Length Scales Robert E. Rudd OriginalPaper Pages: 17 - 26
Automated Generation of Compact Models for Fluidic Microsystems Marek TurowskiZhijian ChenAndrzej Przekwas OriginalPaper Pages: 27 - 36
Behavioral Modeling and Simulation of Optical Integrated Devices P. BontouxI. O'ConnorG. Jacquemod OriginalPaper Pages: 37 - 47
THERMODEL: A Tool for Thermal Model Generation, and Application for MEMS V. SzékelyM. RenczB. Courtois OriginalPaper Pages: 49 - 59
Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor J. M. KyynäräinenA. S. OjaH. Seppä OriginalPaper Pages: 61 - 70
Microbeams with Electronically Controlled High Thermal Impedance S. MirF. ParrainD. Veychard OriginalPaper Pages: 71 - 83
Mathematical Modelling on the Quadrature Error of Low-rate Microgyroscope for Aerospace Applications Bao Y. YehYung C. LiangFrancis E. H. Tay OriginalPaper Pages: 85 - 94
Design of an APS CMOS Image Sensor for Low Light Level Applications Using Standard CMOS Technology J. GoyB. CourtoisF. Pressecq OriginalPaper Pages: 95 - 104
Signal-Processing Electronics for a Capacitive Micro-Sensor Gilles AmendolaGuo-Neng LuLionel Babadjian OriginalPaper Pages: 105 - 113
Modelling, Design and Test of a Monolithic Integrated Magnetic Sensor in a Digital CMOS Technology Using a Switched Current Interface System C. RubioS. BotaJ. Samitier OriginalPaper Pages: 115 - 126
Mixed-Technology System-Level Simulation J. A. MartinezT. P. KurzwegD. M. Chiarulli OriginalPaper Pages: 127 - 149
High-Level Fault Modeling in Surface-Micromachined MEMS N. DebR. D. (Shawn) Blanton OriginalPaper Pages: 151 - 158