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Bottom-up scalable temporally-shaped femtosecond laser deposition of hierarchical porous carbon for ultrahigh-rate micro-supercapacitor

利用时域整形的飞秒激光自下而上沉积多级多孔碳 材料用于超高速率微型超级电容器

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Abstract

With the accelerated development of electronic devices, micro-supercapacitors (MSCs), as energy storage devices that can charge and discharge quickly, have attracted considerable attention. To improve the rate capability of MSCs with consideration of the energy density remains a challenge. We demonstrated a facile method for the preparation of thin films through bottom-up femtosecond pulsed laser deposition. The femtosecond laser irradiated the polyimide film through a transparent substrate to uniformly sputter the electrode material onto the lower surface of the substrate. We successfully deposited porous amorphous carbon, graphene, and carbon quantum dots with controllable properties by temporally shaping the femtosecond laser. The resulting MSC exhibited an ultrahigh frequency response and good performance at scan rates up to 10,000 V s−1. The characteristic frequency f0 of the MSC was as high as 42,000 Hz, and the relaxation time constant τ0 was 0.0238 ms. The MSC reached an impedance phase angle of −82.6° at a frequency of 120 Hz, an ultrahigh power density of more than 30 kW cm−3, and an energy density of 0.068 W h cm−3. This method provides a novel perspective for the preparation of ultrahigh frequency filters for future miniaturized portable electronic devices.

摘要

随着电子器件的飞速发展, 微型超级电容器作为一种能快速充 放电的储能装置受到了人们的广泛关注. 如何在考虑能量密度的前提 下进一步提高微型超级电容器的速率性能仍然是一个挑战. 我们提出 了一种简便的由下而上飞秒脉冲激光沉积制备薄膜的方法. 利用时域 整形飞秒激光通过透明基片照射聚酰亚胺薄膜, 使电极材料均匀地溅 射到基片的下表面, 成功地沉积了性能可控的多孔非晶碳、石墨烯和 碳量子点. 结果表明, 在10,000 V s−1的扫描速率下, 该微型超级电容器 具有超高频响应性能. 该微型超级电容器的特征频率f0高达42,000 Hz, 弛豫时间常数τ0为0.0238 ms, 在120 Hz频率下, 阻抗相位角为−82.6°, 同时还具有超高的功率密度(大于3 0 kW c m−3) 和能量密度 (0.068 W h cm−3). 本方法为未来小型化便携式电子器件的超高频滤波 器的制备提供了新的思路.

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Acknowledgements

This work was supported by the Outstanding Youth Science Foundation of China (51922005) and the National Natural Science Foundation of China (51775047 and 52105427).

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  1. These authors contributed equally to this work.

Authors and Affiliations

  1. Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, China

    Yongjiu Yuan  (原永玖), Zihao Zhang  (张子豪), Xin Li  (李欣), Lan Jiang  (姜澜), Xueqiang Zhang  (张学强), Pei Zuo  (左佩), Chenyang Xu  (许晨阳), Le Ma  (马乐) & Sumei Wang  (王素梅)

  2. Beijing Institute of Technology Chongqing Innovation Center, Chongqing, 401120, China

    Yongjiu Yuan  (原永玖), Zihao Zhang  (张子豪), Xin Li  (李欣), Lan Jiang  (姜澜), Xueqiang Zhang  (张学强), Pei Zuo  (左佩), Chenyang Xu  (许晨阳), Le Ma  (马乐) & Sumei Wang  (王素梅)

  3. Yangtze Delta Region Academy of Beijing Institute of Technology, Jiaxing, 314003, China

    Yongjiu Yuan  (原永玖), Zihao Zhang  (张子豪), Xin Li  (李欣), Lan Jiang  (姜澜), Xueqiang Zhang  (张学强), Pei Zuo  (左佩), Chenyang Xu  (许晨阳), Le Ma  (马乐) & Sumei Wang  (王素梅)

  4. Beijing Key Laboratory of Conversion Materials, School of Chemistry and Chemical Engineering, Beijing Institute of Technology, Beijing, 100081, China

    Yang Zhao  (赵扬) & Liangti Qu  (曲良体)

  5. Key Laboratory for Advanced Materials Processing Technology, Ministry of Education of China, State Key Laboratory of Tribology, Department of Mechanical Engineering, Department of Chemistry, Tsinghua University, Beijing, 100084, China

    Liangti Qu  (曲良体)

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  1. Yongjiu Yuan  (原永玖)
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  2. Zihao Zhang  (张子豪)
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  3. Xin Li  (李欣)
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  4. Lan Jiang  (姜澜)
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  11. Liangti Qu  (曲良体)
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Contributions

Yuan Y and Zhang Z conceived the idea of this study and wrote the paper; Li X, Jiang L, Zhang X, and Ma L contributed to the data analyses and manuscript preparation; Xu C, Zuo P, Wang S, Zhao Y and Qu L contributed to the experimental planning, data analyses, and manuscript preparation. All authors contributed to the general discussion.

Corresponding author

Correspondence to Lan Jiang  (姜澜).

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Supplementary information

Experimental details and supporting data are available in the online version of the paper.

Conflict of interest

The authors declare that they have no conflict of interest.

Yongjiu Yuan is a PhD candidate at the School of Mechanical Engineering, Beijing Institute of Technology, under the supervision of Prof. Lan Jiang. His current research focuses on the design of laser-induced nanomaterials and the fabrication of high-performance devices for energy storage.

Zihao Zhang received his ME degree from Beijing Institute of Technology in 2021. His research focuses on applied research of energy conversion.

Lan Jiang is a professor at the School of Mechanical Engineering, Beijing Institute of Technology. He received his PhD degree from Beijing Institute of Technology in 2000. His research interests include laser micro-nano manufacturing and laser-induced synthetic materials for energy storage.

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40843_2021_2011_MOESM1_ESM.pdf

Bottom-up scalable temporally-shaped femtosecond laser deposition of hierarchical porous carbon for ultrahigh-rate micro-supercapacitor

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Yuan, Y., Zhang, Z., Li, X. et al. Bottom-up scalable temporally-shaped femtosecond laser deposition of hierarchical porous carbon for ultrahigh-rate micro-supercapacitor. Sci. China Mater. 65, 2412–2420 (2022). https://doi.org/10.1007/s40843-021-2011-7

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