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Junctionless Gate-all-around Nanowire FET with Asymmetric Spacer for Continued Scaling

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Abstract

In this paper, we have performed the scaling of asymmetric junctionless (JL) SOI nanowire (NW) FET at 10 nm gate length (LG). To study the device electrical performance various DC metrics like SS, DIBL, ION/IOFF ratio are discussed. Even at 5 nm, the device has good electrical properties with subthreshold swing (SS) = ~64 mV/dec, drain induced barrier lowering (DIBL) = ~45 mV/V, and switching ratio (ION/IOFF) = ~106 shows a higher level of electrostatic integrity. At 5 nm LG with optimized spacer dielectric the device exhibits ~5 orders of improvement in IOFF and the improvement is less than ~2 orders at 20 nm LG. Thus, from the result analysis, the spacer dielectrics are essential at lower LG for better performance. For continued scaling, the HfO2 spacer dielectric ensures high performance with the lowest downfall in ION with 11.24% and the decline is 15.8% and 13.26% with no spacer and Si3N4 respectively. With SiO2, Si3N4, and HfO2 spacers the asymmetric spacer ensures an ION/IOFF of ~106 which is permissible for ITRS low power requirements. Moreover, to study scaling flexibility towards analog/RF applications various parameters like transconductance (gm), transconductance generation factor (TGF), total gate capacitance (Cgg), and cutoff frequency (fT) are also determined. Furthermore, the scaling impact on dynamic power (DP) and static power (SP) consumption are also presented. The findings of the study show that asymmetric JL NW FET is one of the potential candidates for future technology nodes.

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Acknowledgements

The authors thank to the department of Electronics and Communications Engineering, NIT Warangal for providing the TCAD Tools.

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  1. Department of Electronics & Communication Engineering, National Institute of Technology Warangal, Warangal, Telangana, -506004, India

    V. Bharath Sreenivasulu & Vadthiya Narendar

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  1. V. Bharath Sreenivasulu
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  2. Vadthiya Narendar
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Contributions

V. Bharath Sreenivasulu: Writing- Original draft preparation, Formal Analysis, Investigation, Simulation, Data Curation.

V. Narendar: Supervision, Resources.

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Correspondence to V. Bharath Sreenivasulu.

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Sreenivasulu, V.B., Narendar, V. Junctionless Gate-all-around Nanowire FET with Asymmetric Spacer for Continued Scaling. Silicon 14, 7461–7471 (2022). https://doi.org/10.1007/s12633-021-01471-z

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