Abstract
In this paper, we propose a MEMS based electro-thermal actuator which can achieve minimum step sizes less than 100 nm. Configuration of the proposed actuator consists of slider, substrate and gripper. In the structure of the slider, two chevrons are used which lead to 1-D motion of the slider. Structure of the gripper comprises of clutch and the chevrons. The gripper is used to stabilized the slider via connecting the slider to the substrate. The chevrons of the gripper are used to pull and to release the clutch of the gripper. By applying a DC voltage of 0.5 V to the chevrons of the slider, a force of 8 mN and a stroke of 2.2 μm are produced by the slider. That is necessary to say that normally latched or zero-power latching scheme is an important property of the presented actuator.
Similar content being viewed by others
References
T. Risaku, Y. Eui-Hyeok, A normally latched, large-stroke inchworm microactuator. J. Micromech. Microeng. 17, 1715–1720 (2007)
L. Ristic, Sensor Technology and Devices (Artech House, Norwood, 1994)
C.S. Pan, W. Hsu, J. Micromech. Microeng. 7, 7–13 (1997)
C. Jacky, L. Yongjun, Displacement sensing of a micro-electro-actuator using a monolithically integrated thermal sensor. Sensors Actuators A 150, 137–143 (2009)
M.P. De Boer, D.L. Luck, W.R. Ashurst, R. Maboudian, A.D. Corwin, J.A. Walraven, J.M. Redmond, A high-performance surface-micromachined inchworm actuator. J. Microelectromech. Syst. 13, 63–74 (2004)
J.S. Park, L.L. Chu, A.D. Oliver, Y.B. Gianchandani, Bent-beam electrothermal actuators: Part II. linear and rotary microengines. J. Microelectromech. Syst. 10, 255–262 (2001)
J.K. Luo, A.J. Flewitt, S.M. Spearing, N.A. Fleck, W.I. Milne, Modelling of microspring thermal actuator. Proc. NSTI-Nanotech (Boston) 1, 355–358 (2004)
Z. Yong, C. Alberto, D.E. Horacio, A thermal actuator for nanoscale in situmicroscopy testing: design and characterization. J. Micromech. Microeng. 16, 242–253 (2006)
D. Hill, W. Szyszkowski, E. Bordatchev, On modeling and computer simulation of an electro-thermally driven cascaded nickel micro-actuator. Sensors Actuators A 126, 253–263 (2006)
I.H. Hwang, J.H Lee, Novel measurement system of the friction coefficients for the DRIE sidewalls. IEEE MEMS (Istanbul) pp 210–213 (2006)
M. Chiao, L. Lin, Self-buckling of micromachined beams under resistive heating. J. Microelectromech. Syst. 9, 146–151 (2000)
W.N. Sharpe Jr., K.M. Jackson, K.J. Hemker, Z. Xie, Effect of specimen size on Young’s modulus and fracture strength of polysilicon. J. Microelectromech. Syst. 10, 317–326 (2001)
C.D. Lott, T.W. McLain, J.N. Harb, L.L. Howell, Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator. Sensors Actuators A 101, 239–250 (2002)
A.A. Geisberger, N. Sarkar, M. Ellis, G. Skidmore, Electrothermal properties and modeling of polysilicon microthermal actuators. J. Microelectromech. Syst. 12, 513–523 (2003)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Atashzaban, E., Nasiri, M. A novel MEMS based linear actuator for mirror shape correction applications. J Opt 42, 247–256 (2013). https://doi.org/10.1007/s12596-013-0127-z
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s12596-013-0127-z