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Performance improvement of RF MEMS switch with two movable plates

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Abstract

This paper reports a novel design and analysis of RF MEMS switch with two movable electrodes to achieve a simultaneous improvement in actuation voltage along with the switching time. About 30% improvement in the actuation voltage along with a 50% reduction in switching time can be obtained with such design. Moreover a stiction free fabrication methodology is presented to fabricate the switch, which involves the use of two bulk micromachined silicon substrates bonded together.

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Acknowledgments

The authors would like to acknowledge the Defense Research and Development Organization (DRDO), Ministry of Defense, Govt. of India and Indian Space research Organization (ISRO), Department of Space, Govt. of India for providing the necessary financial aid.

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Authors and Affiliations

  1. Department of Electronics and Telecommunication Engineering, IC Design and Fabrication Centre, Jadavpur University, Kolkata, 700032, India

    A. Kundu, S. Sethi, N. C. Mondal, B. Gupta & H. Saha

  2. Advanced Technology Development Center, Sponsored Research and Industrial Consultancy, I.I.T., Kharagpur, 721302, India

    S. K. Lahiri

Authors
  1. A. Kundu
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  2. S. Sethi
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  3. N. C. Mondal
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  4. B. Gupta
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  5. S. K. Lahiri
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  6. H. Saha
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Correspondence to H. Saha.

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Kundu, A., Sethi, S., Mondal, N.C. et al. Performance improvement of RF MEMS switch with two movable plates. Int J Adv Eng Sci Appl Math 2, 44–49 (2010). https://doi.org/10.1007/s12572-010-0010-y

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  • DOI: https://doi.org/10.1007/s12572-010-0010-y

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