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The process planning in laser thermal adjustment of three cut-outs actuators

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Abstract

Laser thermal adjustment as an application of laser forming in micro systems attracts much attention. Previous work on laser thermal adjustment of the two-bridge actuator shows that the deformations are always limited. In this paper, an actuator with three cut-outs is designed to enlarge the deformation range. A simple deformation formula is also established for such actuator based on the deformation behavior of two-bridge actuators. Four cases of the location relation between the target position and the calculated set point are considered in planning the process parameters to reach the designed target position. The planning process is validated by the numerical simulation and experiments.

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Authors and Affiliations

  1. School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China

    Hong Shen, Han Wang, Jun Hu & Zhenqiang Yao

  2. State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University, Shanghai, 200240, China

    Hong Shen & Zhenqiang Yao

Authors
  1. Hong Shen
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  2. Han Wang
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  3. Jun Hu
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  4. Zhenqiang Yao
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Correspondence to Hong Shen.

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Shen, H., Wang, H., Hu, J. et al. The process planning in laser thermal adjustment of three cut-outs actuators. Int. J. Precis. Eng. Manuf. 16, 2475–2482 (2015). https://doi.org/10.1007/s12541-015-0318-4

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  • DOI: https://doi.org/10.1007/s12541-015-0318-4

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