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Temperature distribution measurement of Au micro-heater in microfluidic channel using IR microscope

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Abstract

The temperature control and measurement of micro-heater in microfluidic devices are very essential in various application fields such as gas sensors, flow sensors and bio-sensors. In this study, the temperature of a micro-heater was measured while applying voltages to micro-heaters with 100 μm width in microfluidic devices using infrared microscope. The Au micro-heater was fabricated onto a sapphire substrate with good infrared transmission. In order to measure the temperature of Au micro-heater from the back side of sapphire substrate using infrared microscope, the adhesion layer was not used during e-beam evaporation. To overcome the poor adhesion force between sapphire substrate and Au thin-film, thermal annealing was carried out at 400°C. This measurement method enables us directly to measure the IR emissivity of Au micro-heater in aqueous media without infrared diffraction, absolution and reflection. Based on the calibration curve, we could measure the real temperature of Au micro-heater with 100 μm width at atmospheric environment and in aqueous media. Consequently, we could measure the temperature range at atmosphere and in DI water. The companion computational fluid dynamics simulation studies showed that the measured temperature of Au micro-heater was in accordance with the simulated results within 5 K in average sense.

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References

  1. Chung, G. S., “Fabrication and Characterization of Micro-Heaters with Low-Power Consumption using SOI Membrane and Trench Structures,” Sensors and Actuators A: Physical, Vol. 112, No. 1, pp. 55–60, 2004.

    Article  Google Scholar 

  2. Lee, D. W. and Oh, I. K., “Micro/Nano-Heater Integrated Cantilevers for Micro/Nano-Lithography Applications,” Microelectronic Engineering, Vol. 84, No. 5, pp. 1041–1044, 2007.

    Article  Google Scholar 

  3. Zhang, K. L., Chou, S. K., and Ang, S. S., “Fabrication, Modeling and Testing of a Thin Film Au/Ti Microheater,” International Journal of Thermal Sciences, Vol. 46, No. 6, pp. 580–588, 2007.

    Article  Google Scholar 

  4. Martinez-Quijada, J., Caverhill-Godkewitsch, S., Reynolds, M., Gutierrez-Rivera, L., Johnstone, R., et al., “Fabrication and Characterization of Aluminum Thin Film Heaters and Temperature Sensors on a Photopolymer for Lab-on-Chip Systems,” Sensors and Actuators A: Physical, Vol. 193, pp. 170–181, 2013.

    Article  Google Scholar 

  5. Qu, W. and Mudawar, I., “Flow Boiling Heat Transfer in Two-Phase Micro-Channel Heat Sinks-I. Experimental Investigation and Assessment of Correlation Methods,” International Journal of Heat and Mass Transfer, Vol. 46, No. 15, pp. 2755–2771, 2003.

    Article  Google Scholar 

  6. Astarita, T., Cardone, G., Carlomagno, G. M., and Meola, C., “A Survey on Infrared Thermography for Convective Heat Transfer Measurements,” Optics & Laser Technology, Vol. 32, No. 7, pp. 593–610, 2000.

    Article  Google Scholar 

  7. Köck, H., Košel, V., Djelassi, C., Glavanovics, M., and Pogany, D., “IR Thermography and FEM Simulation Analysis of On-Chip Temperature during Thermal-Cycling Power-Metal Reliability Testing using in Situ Heated Structures,” Microelectronics Reliability, Vol. 49, No. 9, pp. 1132–1136, 2009.

    Article  Google Scholar 

  8. Hetsroni, G., Gurevich, M., Mosyak, A., and Rozenblit, R., “Surface Temperature Measurement of a Heated Capillary Tube by Means of an Infrared Technique,” Measurement Science and Technology, Vol. 14, No. 6, pp. 807–814, 2003.

    Article  Google Scholar 

  9. Patil, V. A. and Narayanan, V., “Measurement of Near-Wall Liquid Temperatures in Single-Phase Flows through Silicon Microchannels,” Proc. of ASME 3rd International Conference on Microchannels and Minichannels, pp. 343–349, 2005.

    Chapter  Google Scholar 

  10. Hetsroni, G., Mosyak, A., Pogrebnyak, E., and Rozenblit, R., “Infrared Temperature Measurements in Micro-Channels and Micro- Fluid Systems,” International Journal of Thermal Sciences, Vol. 50, No. 6, pp. 853–868, 2011.

    Article  Google Scholar 

  11. Zhao, J., Sheadel, D. A., and Xue, W., “Surface Treatment of Polymers for the Fabrication of all-Polymer MEMS Devices,” Sensors and Actuators A: Physical, Vol. 187, pp. 43–49, 2012.

    Article  Google Scholar 

  12. Talaei, S., Frey, O., Van Der Wal, P., De Rooij, N., and Koudelka- Hep, M., “Hybrid Microfluidic Cartridge Formed by Irreversible Bonding of SU-8 and PDMS for Multi-Layer Flow Applications,” Procedia Chemistry, Vol. 1, No. 1, pp. 381–384, 2009.

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of MEchanical System Design Engineering, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul, 139-743, South Korea

    Jung Min Son, Jun Hyung Lee, Jungwoo Kim & Young Hak Cho

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  1. Jung Min Son
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  2. Jun Hyung Lee
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  3. Jungwoo Kim
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  4. Young Hak Cho
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Correspondence to Young Hak Cho.

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Son, J.M., Lee, J.H., Kim, J. et al. Temperature distribution measurement of Au micro-heater in microfluidic channel using IR microscope. Int. J. Precis. Eng. Manuf. 16, 367–372 (2015). https://doi.org/10.1007/s12541-015-0048-7

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  • DOI: https://doi.org/10.1007/s12541-015-0048-7

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