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On-machine volumetric-error measurement and compensation methods for micro machine tools

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Abstract

The CNC micro machine tool is an essential of the micro machining process for manufacturing miniature high-tech products. A software-based error compensation method based on measured volumetric errors that can pre-compensate cutting path can further enhance a machine’s accuracy without increasing its manufacturing cost. Considering the limited workspace of a micro machine tool and the instrument cost, an on-machine and vision-based measurement method integrating machine vision method with use of 3 COMs and homogeneous transformation method was proposed in this study. Sensitivity analysis was conducted to analyze the influence of the CMOS pixel error to the measurement accuracy. To improve the machining accuracy, the measured errors were directly compensated to the machining trajectory with use of an error compensation method that consists of an element-free error interpolation scheme and a recursive software error compensation scheme. Experiments on a toggle-type micro machine tool were conducted to verify the effectiveness of the proposed methods. The results have shown that the feasibility and effectiveness of the proposed methods. The tracking errors of the machine was further improved from (x = 7.9 μm, y = 4.1 μm) to (x = 5 μm, y = 3.7 μm).

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Abbreviations

c:

positive constant

γ:

positive constant

R1:

a local reference coordinate frame

P:

assigned on the left-up corner of the image

C and S:

cosine and sine, respectively

i and j:

the image errors in x- and y-axis

x′, y′, z′:

measured coordinates with errors

δ(I):

smaller than a pre-defined tolerance value

Pc :

the error compensated coordinates

P0:

machining position

M:

machine coordinate frame

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Authors and Affiliations

  1. Department of Mechanical Engineering, Chung Yuan Christian University, Chung-Li, Taiwan, 32023, ROC

    Shih-Ming Wang & Ji-Jun Lin

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  1. Shih-Ming Wang
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  2. Ji-Jun Lin
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Correspondence to Shih-Ming Wang.

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Wang, SM., Lin, JJ. On-machine volumetric-error measurement and compensation methods for micro machine tools. Int. J. Precis. Eng. Manuf. 14, 989–994 (2013). https://doi.org/10.1007/s12541-013-0131-x

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  • DOI: https://doi.org/10.1007/s12541-013-0131-x

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