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Depth-detection methods for microgripper based CNT manipulation in a scanning electron microscope

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Abstract

Current research work on the development of different depth-detection methods for supporting pick-and-place manipulations of carbon nanotubes (CNTs) in a scanning electron microscope (SEM) is presented. A nanorobot station capable of performing this manipulation task in the SEM’s vacuum chamber has been developed, consisting of two cooperating nanorobots. One robot carries an electrothermal microgripper and also performs the coarse approach between microgripper and CNT. The second robot serves as sample holder and realizes the fine positioning of the CNT sample. For a reliable fine approach between microgripper and CNT as well as an intended future automation of handling tasks, depth-detection methods are required in order to precisely measure and align the z-position of microgripper and CNT. Two different methods for z-position estimation are proposed. The depth from focus method uses the focusing information of SEM images whereas the touchdown sensor concept relies on a bimorph piezo bending actuator. The feasibility of both approaches is shown and first experimental results are discussed. Future work has to show how the proposed methods will increase the efficiency of nanorobotic manipulation and how these methods can advance the automation of nanohandling tasks.

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Acknowledgment

We would like to thank the Engineering Department at the University of Cambridge, United Kingdom for supporting the gripping experiments by supplying arrays of vertical aligned carbon nanotubes.

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Authors and Affiliations

  1. Division Microrobotics and Control Engineering, University of Oldenburg, 26111, Oldenburg, Germany

    Volkmar Eichhorn, Sergej Fatikow, Thomas Wich, Christian Dahmen & Torsten Sievers

  2. Department of Micro- and Nanotechnology (MIC), NanoDTU, Technical University of Denmark, 2800, Kongens Lyngby, Denmark

    Karin Nordström Andersen, Kenneth Carlson & Peter Bøggild

Authors
  1. Volkmar Eichhorn
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  2. Sergej Fatikow
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  3. Thomas Wich
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  4. Christian Dahmen
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  5. Torsten Sievers
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  6. Karin Nordström Andersen
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  7. Kenneth Carlson
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  8. Peter Bøggild
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Corresponding author

Correspondence to Volkmar Eichhorn.

Additional information

This work was supported in part by the European Community: NANORAC (STRP 013680) and NANOHAND (IP 034274).

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Eichhorn, V., Fatikow, S., Wich, T. et al. Depth-detection methods for microgripper based CNT manipulation in a scanning electron microscope. J. Micro-Nano Mech. 4, 27–36 (2008). https://doi.org/10.1007/s12213-008-0001-2

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  • DOI: https://doi.org/10.1007/s12213-008-0001-2

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