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Thermal analysis of wirelessly powered thermo-pneumatic micropump based on planar LC circuit

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Abstract

This paper studies the thermal behavior of a wireless powered micropump operated using thermo-pneumatic actuation. Numerical analysis was performed to investigate the temporal conduction of the planar inductor-capacitor (LC) wireless heater and the heating chamber. The result shows that the temperature at the heating chamber reaches steady state temperature of 46.7°C within 40 seconds. The finding was further verified with experimental works through the fabrication of the planar LC heater (RF sensitive actuator) and micropump device using MEMS fabrication technique. The fabricated device delivers a minimum volume of 0.096 μL at the temperature of 29°C after being thermally activated for 10 s. The volume dispensed from the micropump device can precisely controlled by an increase of the electrical heating power within the cut-off input power of 0.22 W. Beyond the power, the heat transfer to the heating chamber exhibits non-linear behavior. In addition, wireless operation of the fabricated device shows successful release of color dye when the micropump is immersed in DI-water containing dish and excited by tuning the RF power.

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Authors and Affiliations

  1. Faculty of Electrical Engineering, Universiti Teknologi Malaysia, Skudai, 81310, Malaysia

    Pei Song Chee, Marwan Nafea, Pei Ling Leow & Mohamed Sultan Mohamed Ali

  2. Faculty of Engineering and Science, Universiti Tunku Abdul Raham, Bandar Sungai Long, 43000, Malaysia

    Pei Song Chee

  3. Flex, Pelabuhan Tanjung Pelepas (PTP), 81560, Gelang Patah, Johor, Malaysia

    Mohamed Sultan Mohamed Ali

Authors
  1. Pei Song Chee
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  2. Marwan Nafea
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  3. Pei Ling Leow
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  4. Mohamed Sultan Mohamed Ali
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Correspondence to Mohamed Sultan Mohamed Ali.

Additional information

Recommended by Associate Editor Jaewon Chung

Pei Song Chee received his B. Eng. degree with honours in Control and Instrumentation Engineering and Ph.D. degree in Electrical Engineering from Universiti Teknologi Malaysia (UTM), Malaysia in 2010 and 2014, respectively. He was a Post-Doctoral Fellow at UTM, working on radio frequency (RF) controlled Micro-electro-mechanical system (MEMS) based device. He is currently an Assistant Professor in Universiti Tunku Abdul Rahman (UTAR). His research interests are Lab on chip (LOC), microfluidic technology including sensor and soft actuator integration, microfabrication and finite element modelling.

Mohamed Sultan Mohamed Ali received the B. Eng. and M. Eng. degrees in electrical engineering from Univer-siti Teknologi Malaysia, Skudai, Malaysia, in 2006 and 2008, respectively, and the Ph.D. degree in electrical and computer engineering from the Department of El-ectrical and Computer Engineering, The University of British Columbia, Vancouver, BC, Canada, in 2012. From 2001 to 2007, he held various engineering positions at Flextronics International Ltd. and Jabil Circuit, Inc. He is currently a Senior Lecturer with the Facultyof Electrical Engineering, Universiti Teknologi Malaysia. His research interests are in the areas of MEMS, nanotechnology, and micro/nanofabrication technologies, including wireless microdevices, integration of microst-ructures, and microrobotics.

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Chee, P.S., Nafea, M., Leow, P.L. et al. Thermal analysis of wirelessly powered thermo-pneumatic micropump based on planar LC circuit. J Mech Sci Technol 30, 2659–2665 (2016). https://doi.org/10.1007/s12206-016-0527-5

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  • DOI: https://doi.org/10.1007/s12206-016-0527-5

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