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A review of vibration-based MEMS hybrid energy harvesters

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Abstract

Energy harvesters based on Micro-electromechanical systems (MEMS) are well known nowadays due to their small features, ability for monolithic integration with the integrated circuit in a single platform, robust, and easily fabricated in bulk. The piezoelectric (PZT) and the electromagnetic (EM) generators are examples of such energy harvesters. To further increase their effectiveness in harvesting ambient energy, researchers started to venture into hybrid energy harvesters. Few literature reviews may be found on MEMS harvesting devices, but not on hybrid harvesters in specific. This paper intended to further elaborate on the hybrid energy harvesters, reported Literature on such harvesters for recent years with different architectures, models, and results are presented. Table of power comparison between the reported harvesters is presented and discussed.

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Correspondence to Mohammed Salim.

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Recommended by Associate Editor Seong-Chan Jun

Mohammed Salim received B.Sc. degree in materials and production engineering from University of Technology, Baghdad, Iraq. He joined the Iraqi Ministry of Irrigation, Dams & Reservoir Establishment as a mechanical engineer. He received his M.Sc. degree in mechanical engineering from Malaya University in Malaysia in 2010. He received a Ph.D. degree in MEMS from Tenaga University, Malaysia in 2014. He has contributed papers in international conferences and journals in the MEMS field.

Dhia Salim received B.Sc. in mechanical engineering from Cardiff University, UK, MSc in Fluid Power Design and Control from Bath University, UK 1980. He joined many Iraqi establishments including Iraqi Atomic Energy Organization and Iraqi Ministry of Science and Technology. He works as a consultant engineer, particularly in rotating machinery and vibrations, contributed papers in international journal.

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Salim, M., Sultan Aljibori, H.S., Salim, D. et al. A review of vibration-based MEMS hybrid energy harvesters. J Mech Sci Technol 29, 5021–5034 (2015). https://doi.org/10.1007/s12206-015-1050-9

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  • DOI: https://doi.org/10.1007/s12206-015-1050-9

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