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Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer

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Abstract

High-g accelerometers are widely used in explosion and shock measurement. This paper describes a MEMS piezoresistive high-g accelerometer whose range is more than 50000g. It is designed on the basis of silicon on insulator (SOI) solid piezoresistive chip. The chip has a structure where both ends of the beam are fixed. Through the stress analysis and mode analysis of the accelerometer, the detailed parameters of the structure are established. The experimental results obtained from the drop hammer shock machine test and live-fire test show good properties of the accelerometer such as good output characteristic, repeatability and fast response speed. Therefore, the accelerometer in this paper meets the requirement of explosion and shock measurement basically.

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Authors and Affiliations

  1. State Key Laboratory for Mechanical Manufacturing System, Xi’an Jiaotong University, Xi’an, 710-049, China

    Yulong Zhao, Xiaobo Li, Jing Liang & Zhuangde Jiang

Authors
  1. Yulong Zhao
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  2. Xiaobo Li
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  3. Jing Liang
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  4. Zhuangde Jiang
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Corresponding author

Correspondence to Yulong Zhao.

Additional information

Recommended by Associate Editor Jong Soo Ko

Yulong Zhao received his B.S., M.S. and Ph.D. degrees in 1991, 1999 and 2003, respectively. Dr. Zhao is currently a professor of Xi’an Jiaotong University, China. His main research fields include MEMS sensors, biosensors, precise instrument and micro/nano manufacturing technology.

Xiaobo Li received his B.S. in Mechanical Engineering from Xi’an Jiaotong University in 2011. He is currently a graduate student at Xi’an Jiaotong University. His research interests are MEMS sensors and micro/nano manufacturing technology.

Jing Liang received her B.S. Mechanical Engineering from Xi’an Jiaotong University in 2009. She is currently a graduate student at Xi’an Jiaotong University. Her research interests are MEMS sensors and micro/nano manufacturing technology.

Zhuangde Jiang received his B.S. and M.S. and Ph.D. in 1977, 1988 and 2011, respectively. His research interests are MEMS and nano manufacturing technology, precise instrument and sensor technology, precise and super-precise manufacturing technology.

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Zhao, Y., Li, X., Liang, J. et al. Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer. J Mech Sci Technol 27, 831–836 (2013). https://doi.org/10.1007/s12206-013-0133-8

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  • DOI: https://doi.org/10.1007/s12206-013-0133-8

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