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Deformation characteristics of various grain boundary angles on AFM-based nanolithography using molecular dynamics

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Abstract

Molecular dynamics simulations are performed to verify the deformation characteristics of grain boundaries on the AFM-based nanolithography. The model used has about 750,000 (Cu) atoms and is composed of two different crystal orientations. The grain boundaries are located in the center of model and have 45, 90, 135, and −135 degree angles in the xz-plane. The tool is made of rigid diamond-like carbon and is in the shape of the Berkovich indenter. The simulation has four different stages: relaxation, indentation, re-relaxation, and lithography. The simulation results reveal that the lithography deforms the grain boundary shape by the tool. The deformation of grain boundary’s angle proceeds to minimize the total potential energy of whole system. Consequently, the grain boundary angle is changed about 90 degrees.

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Authors and Affiliations

  1. Institute of Mechanical Engineering Technology, Kyungpook National University, Daegu, 702-701, Korea

    Chan Il Kim

  2. Department of Mechanical Engineering, Kyungpook National University, Daegu, 702-701, Korea

    Seung Han Yang & Young Suk Kim

Authors
  1. Chan Il Kim
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  2. Seung Han Yang
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  3. Young Suk Kim
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Correspondence to Young Suk Kim.

Additional information

Recommended by Editor Maenhyo Cho

Chan Il Kim received his B.S., M.S. and Ph.D degrees from the School of Mechanical Engineering at Kyungpook National University in Daegu, Korea, in 2000, 2002 and 2008, respectively. He is a research professor at the Institute of Mechanical Engineering Technology in Kyungpook National University. His main research interests include molecular dynamics and material processing.

Seung-Han Yang received his B.S. degree from Seoul National University, Republic of Korea, in 1986. He obtained his M.S. from University of Illinois Chicago and Ph.D from the University of Michigan Ann Arbor in 1988 and 1995, respectively. He is currently a professor at the School of Mechanical Engineering at Kyungpook National University in Daegu, Korea. His main research interest is manufacturing system control with focus on the accurate measurement system.

Young Suk Kim is currently a professor, School of Mechanical Engineering at Kyungpook National University in Daegu, Korea. He received his Ph.D from Kobe University, Japan, in 1986. His main research interests include nano/micro mechanics, biomechanics and sustainable material processing.

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Kim, C.I., Yang, S.H. & Kim, Y.S. Deformation characteristics of various grain boundary angles on AFM-based nanolithography using molecular dynamics. J Mech Sci Technol 26, 1841–1847 (2012). https://doi.org/10.1007/s12206-012-0428-1

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  • DOI: https://doi.org/10.1007/s12206-012-0428-1

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