Abstract
Piezoelectric resonators are widely used in frequency reference devices, mass sensors, resonant sensors (such as gyros and accelerometers), etc. Piezoelectric resonators usually work in a special resonant mode. Obtaining working resonant mode with high quality is key to improve the performance of piezoelectric resonators. In this paper, the resonance characteristics of a rectangular lead zirconium titanate (PZT) piezoelectric resonator are studied. On the basis of the field-programmable gate array (FPGA) embedded system, direct digital synthesizer (DDS) and automatic gain controller (AGC) are used to generate the driving signals with precisely adjustable frequency and amplitude. The driving signals are used to excite the piezoelectric resonator to the working vibration mode. The influence of the connection of driving electrodes and voltage amplitude on the vibration of the resonator is studied. The quality factor and vibration linearity of the resonator are studied with various driving methods mentioned in this paper. The resonator reaches resonant mode at 330 kHz by different driving methods. The relationship between resonant amplitude and driving signal amplitude is linear. The quality factor reaches over 150 by different driving methods. The results provide a theoretical reference for the efficient excitation of the piezoelectric resonator.
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The authors thank to the Center for Advanced Electronic Materials and Devices (AEMD) for providing micromachining processes.
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Foundation item: the Micro/Nano Fabrication Laboratory Foundation (No. 9140C790402150C79005), and the Shanghai Pujiang Program (No. 14PJD022)
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Wang, Z., Wu, X. & Shu, S. Resonance Characteristics of Piezoelectric Resonator Based on Digital Driving Circuit of Field-Programmable Gate Array. J. Shanghai Jiaotong Univ. (Sci.) 24, 1–6 (2019). https://doi.org/10.1007/s12204-019-2034-1
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DOI: https://doi.org/10.1007/s12204-019-2034-1