Abstract
ZnO thin films were prepared by chemical vapour transport method in inductively coupled plasma (ICP). The films were synthesized at different substrate positions and various oxygen/argon ratios. X-ray diffraction (XRD) revealed that all the synthesized films at different positions are mixture of hexagonal ZnO and hexagonal Zn phases. The relative peak integrated intensity (RPII) of the ZnO phase is 83.6, 25.3 and 45.3%, for positions 1, 2 and 3, respectively. Morphology of ZnO films was found to be sensitive to substrate position. Flat flakes, bended nanowires (NWs) and nanoparticles morphologies are observed for positions 1, 2 and 3, respectively. The sample synthesized at 1 is stoichiometric, whereas the samples prepared in positions 2 and 3 are sub-stoichiometric. The films prepared at positions 1 and 3 have relatively high transmittance and low reflectance values, whereas the film prepared at position 2 has low transmittance and high reflectance. The ZnO film prepared at position 2 is hydrophobic with water contact angle of 112.2°, which can be used as self-cleaning coating. For ZnO films prepared with various O2 ratios, the RPII was 83.2, 88.0, 96.4 and 100% for films prepared with 10, 20, 30 and 40%, respectively. With increasing O2 ratio, the nanograins became bigger and the stoichiometry improved. The transmittance and optical bandgap increased, whereas the reflectance and refractive index decreased with increase in O2 ratio. The ZnO film synthesized with 30% O2 ratio has the highest figure of merit (FOM) value; thus, this film may be considered as the best ZnO film for transparent conducting coating applications.
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Lee H-Y, Cheng C-Y and Lee C-T 2020 Mater. Sci. Semicond. Proc. 119 105223
Xu Q, Hong R, Cheng Q, Chen X, Zhang F, Feng J et al 2018 Physica E 104 16
Çiçek O, Kurnaz S, Bekar A and Öztürk Ö 2019 Compos. B: Eng. 174 106987
Echendu O K, Werta S Z, Dejene F B and Craciun V 2018 J. Alloys Compd. 769 201
Bose S, Mandal S, Barua A K and Mukhopadhyay S 2020 J. Mater. Sci. Technol. 55 136
Wu J and Xue D 2011 Sci. Adv. Mater. 3 127
Meng L, Chai H, Yang X, Lv Z and Yang T 2019 Sol. Energy Mater. Sol. C 191 459
Jang J S, Kim J, Ghorpade U, Shin H H, Gang M G, Park S D et al 2019 J. Alloys Compd. 793 499
Ahn B D, Kim J H, Kang H S, Lee C H, Oh S H, Kim K W et al 2008 Thin Solid Films 516 1382
El Mir L, Ayadi Z B, Saadoun M, Djessas K, von Bardeleben H J and Alaya S 2007 Appl. Surf. Sci. 254 570
Kim I Y, Shin S W, Gang M G, Lee S H, Gurav K V, Patil P S et al 2014 Thin Solid Films 570 321
Minami T, Ida S, Miyata T and Minamino Y 2003 Thin Solid Films 445 268
Upadhaya D and Purkayastha D D 2020 Mater. Today-Proc. In press: https://doi.org/10.1016/j.matpr.2020.05.815
Li L, Li B, Dong J and Zhang J 2016 J. Mater. Chem. A 4 13677
Li X, Reinhoudt D and Crego-Calama M 2007 Chem. Soc. Rev. 36 1350
Zhang X, Shi F, Niu J, Jiang Y and Wang Z 2008 J. Mater. Chem. 18 621
Yao L and He J 2014 Prog. Mater. Sci. 61 94
Askar K, Phillips B M, Fanga Y, Choia B, Gozubenli N, Jiang P et al 2013 Colloids Surf. A: Physicochem. Eng. Aspects 439 84
Ragesh P, Ganesh V A, Naira S V and Nair A S 2014 J. Mater. Chem. A 2 14773
Lee S, Kim W and Yong K 2011 Adv. Mater. 23 4398
Scardino A J, Zhang H, Cookson D J and Lamb R N 2009 Biofouling: J. Bioadhes. Biofilm Res. 25 757
Barshilia H C, John S and Mahajan V 2012 Sol. Energy Mater. Sol. C 107 219
Kim Y J and Kirn H J 1999 Mater. Lett. 41 159
El-Hossary F M, Mohamed S H, Noureldein E A and Abo EL-Kassem M 2020 Mater. Sci. Semicond. Proc. 120 105284
Bedia A, Bedia F Z, Aillerie M, Maloufi N and Benyoucef B 2015 Eng. Procedia 74 529
Jain N, Kumawat R and Sharma S K 2020 Mater. Today-Proc. 30 93
Marwoto P, Sugianto S, Aryanto D, Wibowo E and Wahyuningsih K 2014 Adv. Mater. Res. 896 237
Radjehi L, Djelloul A, Lamri S, Slim M F and Rahim M 2019 Surf. Eng. 35 520
Mohamed S H 2011 Phil. Mag. 91 3598
Tauc J C 1974 Amorphous and liquid semiconductors (New York: Plenum Press) Vol 159
Gonçalves R S, Barrozo P, Brito G L, Viana B C and Cunha F 2018 Thin Solid Films 661 40
Mohamed S H, Abd El-Rahman A M, Salem A M, Pichon L and El-Hossary F M 2006 J. Phys. Chem. Solids 67 2351
Mohamed S H, Ali H M, Mohamed H A and Salem A M 2005 Eur. Phys. J. Appl. Phys. 31 95
Wang Y, Chen J, Wang Y and Xiong W 2018 Vacuum 149 291
Sahu B B, Han J G, Kim J B, Kumar M, Jin S and Hori M 2016 Plasma Process. Polym. 13 134
Fujimura N, Nishihara T, Goto S, Xu J and Ito T 1993 J. Cryst. Growth 130 269
Hammad A H, Abdel-Wahab M S, Vattamkandathil S and Ansari A R 2018 Physica B 540 1
Abdel-Fattah E, Elsayed I A and Fahmy T 2018 J. Mater. Sci.: Mater. Electron. 29 19942
Mehan N, Gupta V, Sreenivas K and Mansingh A 2004 J. Appl. Phys. 96 3134
Ismail A and Abdullah M J 2013 J. King Saud Univ. Sci. 25 209
Mohamed S H, Kappertz O, Ngaruiya J M, Pedersen T P L, Drese R and Wuttig M 2003 Thin Solid Films 429 135
Mohamed S H and Drese R 2006 Thin Solid Films 513 64
Mohamed S H, Kappertz O, Pedersen T P L, Drese R and Wuttig M 2003 Phys. Status Solidi (a) 198 224
Jung Y S 2004 Solid State Commun. 129 491
Look D C, Hemsky J W and Sizelove J R 1999 Phys. Rev. Lett. 82 2552
Wang Y, Peng Z J, Wang Q and Fu X L 2017 Surf. Eng. 33 217
Tansley T L and Neely D F 1984 Thin Solid Films 121 95
Golovynskyi S, Ievtushenko A, Mamykin S, Dusheiko M, Golovynska I, Bykov O et al 2018 Vacuum 153 204
Robbins J J, Harvey J, Leaf J, Fry C and Wolden C A 2005 Thin Solid Films 473 35
Haacke G 1976 J. Appl. Phys. 47 4086
Zhu C, Zhou J, Li J, Yang Y, Xu W, Zhong L et al 2018 Ceram. Int. 44 369
Jayaraman V K, Maldonado-Alvarez A, Jimenez-Gonzalez A E and Olvera-Amador M D 2016 Mater. Lett. 181 52
Ma A, Rousseau F, Donsanti F, Lincot D and Morvan D 2015 Surf. Coat. Technol. 276 186
Abd El-Rahman A M and Mohamed S H 2020 Thin Solid Films 698 137864
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El-Hossary, F.M., Mohamed, S.H., Noureldein, E.A. et al. ZnO thin films prepared by RF plasma chemical vapour transport for self-cleaning and transparent conducting coatings. Bull Mater Sci 44, 82 (2021). https://doi.org/10.1007/s12034-021-02378-6
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DOI: https://doi.org/10.1007/s12034-021-02378-6