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Sub-micrometer-thick and low-loss Ge20Sb15Se65 rib waveguides for nonlinear optical devices

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Abstract

We report the fabrication and optical properties of sub-micrometer-thick Ge20Sb15Se65 chalcogenide rib waveguides. The radio-frequency (RF) magnetron sputtering method is used to deposit 0.83 μm-thick films. A protective layer of SU-8 is employed to prevent the attack of the alkaline developer, and CHF3 is used as the etching plasma for reactive ion etching (RIE). Finally, the resulted rib waveguides with smooth sidewalls and vertical pattern profiles are rendered. The propagation losses for 4 μm-wide waveguides are measured to be 0.7 dB/cm for transverse electric (TE) modes and 0.68 dB/cm for transverse magnetic (TM) modes at 1 550 nm via the cutback method.

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Authors and Affiliations

  1. Laboratory of Infrared Material and Devices, Faculty of Information Science and Engineering, Advanced Technology Research Institute, Ningbo University, Ningbo, 315211, China

    Jun Li  (李军), Fen Chen  (陈芬), Xiang Shen  (沈祥), Shi-xun Dai  (戴世勋), Tie-feng Xu  (徐铁峰) & Qiu-hua Nie  (聂秋华)

Authors
  1. Jun Li  (李军)
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  2. Fen Chen  (陈芬)
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  3. Xiang Shen  (沈祥)
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  4. Shi-xun Dai  (戴世勋)
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  5. Tie-feng Xu  (徐铁峰)
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  6. Qiu-hua Nie  (聂秋华)
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Corresponding author

Correspondence to Jun Li  (李军).

Additional information

This work has been supported by the National Natural Science Foundation of China (No.61377061), the Public Project of Zhejiang Province (No.2014C31146), the Young Leaders of the Academic Climbing Project of the Education Department of Zhejiang Province (No.pd2013092), the Natural Science Foundation of Ningbo City (No.2014A610124), the Open Research Fund of the Most Important Specialty “Information and Communication Engineering” of Zhejiang Province (No.XKXL1321), and the Magna Fund sponsored by K. C. Wong in Ningbo University of China.

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Li, J., Chen, F., Shen, X. et al. Sub-micrometer-thick and low-loss Ge20Sb15Se65 rib waveguides for nonlinear optical devices. Optoelectron. Lett. 11, 203–206 (2015). https://doi.org/10.1007/s11801-015-4231-y

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  • DOI: https://doi.org/10.1007/s11801-015-4231-y

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