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Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD

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Abstract

The high-density carbon nanotubes (CNTs) are synthesized on Fe/Si substrate in the mixture of acetylene and hydrogen gas by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of substrate temperature on the growth of CNTs are studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The quality of CNTs is improved considerably by increasing the substrate temperature while the beam density is increased and graphitization degree (I D/I G) is enhanced. The best aligned CNTs are prepared at 750 °C, the beam D density is about 1.6 × 103/μm2, and I D/I G is about 0.93. Temperature influence is also discussed.

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Authors and Affiliations

  1. Tianjin Key Laboratory of Film Electronic & Communication Devices, School of Electronics Information Engineering, Tianjin University of Technology, Tianjin, 300384, China

    Kai-liang Zhang  (张楷亮), Xin-yuan Lin  (林新元), Wang Xu  (许旺), Yin-ping Miao  (苗银萍), Kai Hu  (胡凯) & Yong Zhang  (张勇)

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  1. Kai-liang Zhang  (张楷亮)
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  2. Xin-yuan Lin  (林新元)
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  3. Wang Xu  (许旺)
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  4. Yin-ping Miao  (苗银萍)
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  5. Kai Hu  (胡凯)
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  6. Yong Zhang  (张勇)
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Corresponding author

Correspondence to Kai-liang Zhang  (张楷亮).

Additional information

This work has been supported by the National Natural Science Foundation of China (No.60806030), Tianjin Natural Science Foundation (Nos. 08JCYBJC14600 and 10SYSYJC27700), and Tianjin Science and Technology Developmental Funds of Universities and Colleges (No. ZD200709).

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Zhang, Kl., Lin, Xy., Xu, W. et al. Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD. Optoelectron. Lett. 7, 85–87 (2011). https://doi.org/10.1007/s11801-011-0169-x

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  • DOI: https://doi.org/10.1007/s11801-011-0169-x

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