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A carbon nanotube-based sensing element

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Abstract

A carbon nanotube-based(CNT) sensing element is presented, which consists of substrate, insulating layer, electrodes, carbon nanotube and measuring circuit. The sensing components are a single or array of CNTs, which are located on the two electrodes. The CNT-based sensing element is fabricated by CVD (chemical vapor deposition)-direct-growth on micro-electrodes. The sensing model and measurement method of electromechanical property are also presented. Finally, the voltage-current characteristics are measured, which show that the CNT-based sensing element has good electrical properties.

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Authors and Affiliations

  1. MEMS Lab., Department of Precision Instruments & Mechanology, Tsinghua University, Beijing, 100084, China

    Yang Xing, Zhou Zhao-ying & Wu Ying

  2. State Key Lab. of Precision Measurement Technology and Instrumentation, Tsinghua University, Beijing, 100084, China

    Yang Xing, Zhou Zhao-ying & Wu Ying

  3. Micro-nano technology research center, Tsinghua University, Beijing, 100084, China

    Yang Xing, Zhou Zhao-ying & Wu Ying

  4. Department of Chemistry, Peking University, Beijing, 100871, China

    Zhang Jin & Zhang Ying-ying

Authors
  1. Yang Xing
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  2. Zhou Zhao-ying
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  3. Wu Ying
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  4. Zhang Jin
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  5. Zhang Ying-ying
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Additional information

Antrag GZ 398, Ghinesisch-Deutsches Zentrum für Wissenschaftsförderung.

This work is partially granted by National Natural Science Foundation of China (No.50505018), Specialized Research Fund for the Doctoral Program of Higher Education (No. 20030003024) and China Postdoctoral Science Foundation Grant (No. 2005038068).

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Yang, X., Zhou, Zy., Wu, Y. et al. A carbon nanotube-based sensing element. Optoelectron. Lett. 3, 81–84 (2007). https://doi.org/10.1007/s11801-007-7023-1

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  • DOI: https://doi.org/10.1007/s11801-007-7023-1

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