Abstract
Successful implementation of simple mechanism on silicon chip is a prerequisite for monolithic microrobotic systems. This paper describes the integrated fabrication of polycrystalline silicon microgripper. Link, fixed and active joint, and sliding flange structures with dimensions of micrometers have been fabricated on the substrate of monocrystalline silicon using silicon microfabrication technology. This microgripper, which may be applied to transducers or sensors, can be batch-fabricated in IC-compatible process. The movable mechanical elements are built on layers that are later removed, so that they are free for translation and rotation. Under external driving, a microgripper cut from substrate would be able to catch tiny filament or small particle with dimension of 10∼200 micrometers.
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References
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Project supported by the Natural Science Foundation of Shanghai (94ZD14025) and the Main Subject Foundation of Shanghai Municipal Commission of Education
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Lu, Jt., Dong, M., Song, Hb. et al. Integrated fabrication of a microgripper. J. of Shanghai Univ. 3, 345–347 (1999). https://doi.org/10.1007/s11741-999-0019-2
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DOI: https://doi.org/10.1007/s11741-999-0019-2