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Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

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Abstract

Diamond-like carbon (DLC) films were successfully prepared on glass substrates and surfaces of selenium drums via radio frequency plasma enhanced chemical vapor deposition method. The microstructure, surface morphology, hardness, film adhesion, and tribological properties of the films were characterized and evaluated by X-ray photoelectron spectroscopy, atomic force microscopy, and micro-sclerometer and friction-wear spectrometer. The results showed that DLC films have smooth surfaces, homogeneous particle sizes, and excellent tribological properties, which can be used to improve the surface quality of the selenium drums and prolong their service life.

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Authors and Affiliations

  1. Key Laboratory of Liquid Structure and Heredity of Materials (Ministry of Education), Shandong University, Jinan, 250061, China

    Ning Cao, Zhen-yi Fei, Yong-xin Qi, Wen-wen Chen, Lu-lu Su, Qi Wang & Mu-sen Li

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  1. Ning Cao
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  2. Zhen-yi Fei
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  3. Yong-xin Qi
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  4. Wen-wen Chen
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  5. Lu-lu Su
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  6. Qi Wang
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  7. Mu-sen Li
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Correspondence to Mu-sen Li.

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Cao, N., Fei, Zy., Qi, Yx. et al. Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique. Front. Mater. Sci. China 3, 409–414 (2009). https://doi.org/10.1007/s11706-009-0070-8

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  • DOI: https://doi.org/10.1007/s11706-009-0070-8

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