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Thermodynamic Assessment of the Si-Ta and Si-W Systems

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Abstract

The knowledge of phase diagram and thermodynamic properties of the Si-Ta and Si-W systems is of technical importance for metallic contacts between Ta, W, and SiC in electrical and electronic devices. The phase diagram and thermodynamic properties of the Si-Ta and Si-W systems were assessed using the CALPHAD approach with available experimental data. The intermetallic compounds of the two systems were modeled as stoichiometric ones. A set of self-consistent thermodynamic parameters were obtained and the calculated phase equilibria were found to be in reasonable agreement with most experimental data. The calculated enthalpies of formation of the silicides in the Si-Ta and Si-W systems were compared with the reported values. The enthalpies of mixing of liquid at 2000 K in similar Si-transition metal systems were used for comparison in order to judge the rationality of the calculations. The assessed thermodynamic descriptions of the Si-Ta and Si-W binary systems will serve as part of the thermodynamic database for the Si-C-M (M: Ta and W) alloys.

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Acknowledgments

The authors gratefully acknowledge the use of Thermo-Calc and Pandat programs, respectively, provided by Thermo-Calc Software AB (Stockholm Technology Park, Sweden) and CompuTherm LLC (Madison, USA). The authors also thank Drs. S. L. Chen and Y. Yang for helpful discussions. This work was financially supported by the National Natural Science Foundation of China (No. 50772012), the Chinese Ministry of Education through New Century Excellent Academician Supported Project (NCET-06-0086) and the program for Changjiang Scholars and Innovative Research Team in University (PCSIRT, No. IRT0708).

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Authors and Affiliations

  1. Department of Chemistry, School of Applied Science, University of Science and Technology Beijing, Beijing, 100083, P.R. China

    Zhongnan Guo, Wenxia Yuan, Yu Sun & Zhoufei Cai

  2. Department of Physical Chemistry, School of Metallurgical and Ecological Engineering, University of Science and Technology Beijing, Beijing, 100083, P.R. China

    Zhiyu Qiao

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Correspondence to Wenxia Yuan.

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Guo, Z., Yuan, W., Sun, Y. et al. Thermodynamic Assessment of the Si-Ta and Si-W Systems. J. Phase Equilib. Diffus. 30, 564–570 (2009). https://doi.org/10.1007/s11669-009-9579-x

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