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Effect of Microstructure on the Electrical Properties of Nano-Structured TiN Coatings Deposited by Vacuum Cold Spray

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Abstract

TiN coatings on Al2O3 substrates were fabricated by vacuum cold spray (VCS) process using ultrafine starting ceramic powders of 20 nm in size at room temperature (RT). Microstructure analysis of the samples was carried out by scanning electron microscopy, transmission electron microscopy, and x-ray diffraction. Sheet resistance of the VCS TiN coatings was measured with a four-point probe. The effects of microstructure on the electrical properties of the coatings were investigated. It was found that the sheet resistance and electrical resistivity of TiN coatings were significantly associating with the spray distance, nozzle traversal speed, and deposition chamber pressure. A minimum sheet resistance of 127 Ω was achieved. The microstructural changes can be correlated to the electrical resistivity of TiN coatings.

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References

  1. M. Levedev, J. Akedo, K. Mori, and T. Eiju, Simple Self-Selective Method of Velocity Measurement for Particles in Impact-Based Deposition, J. Vac. Sci. Technol. A, 2000, 18(2), p 563-566

    Article  ADS  Google Scholar 

  2. J. Akedo and M. Lebedev, Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)03) Thick Film Deposited with Aerosol Deposition Method, Jpn. J. Appl. Phys., 1999, 38(9B), p 5397-5401

    Article  CAS  ADS  Google Scholar 

  3. J. Akedo, Aerosol Deposition Method for Fabrication of Nano Crystal Ceramic Layer-Novel Ceramics Coating with Collision of Fine Powder at Room Temperature, Mater. Sci. Form, 2004, 449-452, p 43-48

    Article  CAS  Google Scholar 

  4. J. Akedo, Room Temperature Impact Consolidation (RTIC) of Fine Ceramic Powder by Aerosol Deposition Method and Applications to Microdevices, J. Therm. Spray Technol., 2008, 17(2), p 181-198

    Article  CAS  ADS  Google Scholar 

  5. H.J. Kim, Y.J. Yoon, J.H. Kim, and S.M. Nam, Application of Al2O3-Based Polyimide Composite Thick Films to Integrated Substrates Using Aerosol Deposition Method, Mater. Sci. Eng. B, 2009, 161, p 104-108

    Article  CAS  Google Scholar 

  6. J.M. Oh, N.H. Kim, S.C. Choi, and S.M. Nam, Thickness Dependence of Dielectric Properties in BaTiO3 Films Fabricated by Aerosol Deposition Method, Mater. Sci. Eng. B, 2009, 161, p 80-84

    Article  CAS  Google Scholar 

  7. K. Sahner, M. Kaspar, and R. Moos, Assessment of the Novel Aerosol Deposition Method for Room Temperature Preparation of Metal Oxide Gas Sensor Films, Sens. Actuators B, 2009, 139, p 394-399

    Article  Google Scholar 

  8. J.-J. Choi, B.-D. Hahn, J. Ryu, W.-H. Yoon, B.-K. Lee, and D.-S. Park, Preparation and Characterization of Piezoelectric Ceramic-Polymer Composite Thick Films by Aerosol Deposition for Sensor Application, Sens. Actuators A, 2009, 153, p 89-95

    Article  Google Scholar 

  9. S.-Q. Fan, G.-J. Yang, G.-J. Liu, C.-X. Li, C.-j. Li, and L.-Z. Zhang, Characterization of Microstructure of TiO2 Coating Deposited by Vacuum Cold Spraying, J. Therm. Spray Technol., 2006, 15(4), p 513-517

    Article  CAS  ADS  Google Scholar 

  10. T. Zhang, G. Zhao, and G. Han, Growth and Properties of TiN Films on Glass by Atmospheric Pressure Chemical Vapor Deposition, J. Vac. Sci. Technol., 2005, 25(4), p 309-311

    CAS  Google Scholar 

  11. L. Yi, W.j. Zhang, and J. Wu, Study of Metal Organic Chemical Vapor Deposition Tin Thin Films in Real Structures, Thin Solid Films, 2006, 515, p 2803-2806

    Article  CAS  ADS  Google Scholar 

  12. M. Popovic, M. Stojanovic, D. Perusko et al., Ion Beam Modification of Structural and Electrical Properties of Tin Thin Films, Nucl. Instrum. Methods B, 2008, 266, p 2507-2510

    Article  CAS  ADS  Google Scholar 

  13. M. Nose, T. Nagae, M. Yokota, S. Saji, M. Zhou, and M. Nakada, Electrical and Colorimetric Properties of Tin Thin Films Prepared by DC Reactive Sputtering in a Facing Targets Sputtering (FTS) System, Surf. Coat. Technol., 1999, 116-119, p 296-301

    Article  CAS  Google Scholar 

  14. P. Huber, D. Manova, S. Mandl, and B. Rauschenbach, Optical Characterization of Tin Produced by Metal-Plasma Immersion Ion Implantation, Surf. Coat. Technol., 2001, 142-144, p 418-423

    Article  CAS  Google Scholar 

  15. P.-H. Gao, Y.-G. Li, C.-J. Li, G.-J. Yang, and C.-X. Li, Influence of Powder Porous Structure on the Deposition Behavior of Cold-Sprayed WC-12Co Coatings, J. Therm. Spray Technol., 2008, 17(5-6), p 742-749

    Article  CAS  ADS  Google Scholar 

  16. Y. Ren-hong and J. Ming-xue, Properties and Applications of TiN and Techniques of Powder Preparation, Refractories, 2005, 36(5), p 386-389 (in Chinese)

    Google Scholar 

  17. L. Kai-Xing, “Influence of Powder Structure and Accelerating Gas Flow on Electron Transport Property of Nanostructured TiO2 Films Deposited by Vacuum Cold Spray”, Master Thesis, Xi’an Jiaotong University, May 2010, p 28-31

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Acknowledgment

The project was supported by National Natural Science Foundation of China (Contract No.: 50705075).

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Authors and Affiliations

  1. State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Shaanxi, 710049, China

    Y.-Y. Wang, Y. Liu, G.-J. Yang & J.-J. Feng

  2. Department of Mechanical Systems Engineering, Engineering Faculty of Gunma University, Gunma, 376-0052, Japan

    K. Kusumoto

Authors
  1. Y.-Y. Wang
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  2. Y. Liu
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  3. G.-J. Yang
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  4. J.-J. Feng
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  5. K. Kusumoto
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Corresponding author

Correspondence to Y.-Y. Wang.

Additional information

This article is an invited paper selected from presentations at the 4th Asian Thermal Spray Conference (ATSC 2009) and has been expanded from the original presentation. ATSC 2009 was held at Nanyang Hotel, Xi’an Jiaotong University, Xi’an, China, October 22-24, 2009, and was chaired by Chang-Jiu Li.

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Wang, YY., Liu, Y., Yang, GJ. et al. Effect of Microstructure on the Electrical Properties of Nano-Structured TiN Coatings Deposited by Vacuum Cold Spray. J Therm Spray Tech 19, 1231–1237 (2010). https://doi.org/10.1007/s11666-010-9541-9

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  • DOI: https://doi.org/10.1007/s11666-010-9541-9

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