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Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films

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Abstract

We have made detailed observations of gold thin films and commercial aluminum-copper alloy films, using transmission electron microscopy. All of the films embody a strong <111> fiber texture. We have measured the misorientation distributions for the grain boundaries in these films, and also determined the “grain boundary character distribution” in terms of the coincident site lattice model. We show that in spite of their apparent similarity, these films embody significant differences in terms of these measures.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, State University of New York at Stony Brook, 11794-2275, Stony Brook, NY

    Varun V. Singh & Alexander H. King

  2. Semiconductor Process and Device Center, Texas Instruments, Inc., 13536 N. Central Expressway, 75243, Dallas, TX

    Girish Dixit

Authors
  1. Varun V. Singh
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  2. Alexander H. King
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  3. Girish Dixit
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Singh, V.V., King, A.H. & Dixit, G. Some further microstructural characteristics of face-centered cubic polycrystalline metal thin films. J. Electron. Mater. 26, 987–995 (1997). https://doi.org/10.1007/s11664-997-0235-0

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  • DOI: https://doi.org/10.1007/s11664-997-0235-0

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