Abstract
(GaIn)2O3 (IGO) films with a Ga content of about 30% were deposited on sapphire substrates by magnetron sputtering followed by thermal annealing. Annealing temperatures from 600°C to 1000°C showed little influence on the structural and optical properties of the films. All the films showed smooth surfaces and high transmittances in the visible range. X-ray diffraction patterns identified the mixed phase structure of the obtained films. Only one absorption edge was identified for all the films, suggesting these films are suitable for fabricating high responsivity ultraviolet detectors.
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Y.N. Hou, Z.X. Mei, H.L. Liang, C.Z. Gu, and X.L. Du, Appl. Phys. Lett. 105, 133510 (2014).
X. Chen, K. Liu, Z. Zhang, C. Wang, B. Li, H. Zhao, D. Zhao, and D. Shen, ACS Appl. Mater. Interfaces 8, 4185 (2016).
S.-P. Chang, L.-Y. Chang, and J.-Y. Li, Sensors 16, 2145 (2016).
F. Zhang, H. Li, M. Arita, and Q. Guo, Opt. Mater. Express 7, 3769 (2017).
H.V. Wenckstern, D. Splith, M. Purfürst, Z. Zhang, C. Kranert, S. Müller, M. Lorenz, and M. Grundmann, Semicond. Sci. Technol. 30, 024005 (2015).
T.H. Chang, S.J. Chang, C.J. Chiu, C.Y. Wei, Y.M. Juan, and W.Y. Weng, IEEE Photonic Technol. Lett. 27, 915 (2015).
J. Yu, C.-X. Shan, Q. Qiao, X.-H. Xie, S.-P. Wang, Z.-Z. Zhang, and D.-Z. Shen, Sensors 12, 1280 (2012).
M.M. Fan, K.W. Liu, Z.Z. Zhang, B.H. Li, X. Chen, D.X. Zhao, C.X. Shan, and D.Z. Shen, Appl. Phys. Lett. 105, 011117 (2014).
R.C. Boutwell, M. Wei, and W.V. Schoenfeld, Appl. Phys. Lett. 103, 031114 (2013).
F. Zhang, K. Saito, T. Tanaka, M. Nishio, and Q. Guo, Solid State Commun. 186, 28 (2014).
F. Zhang, H. Jan, K. Saito, T. Tanaka, M. Nishio, T. Nagaoka, M. Arita, and Q. Guo, Thin Solid Films 578, 1 (2015).
Y.Z. Yoo, Y. Osaka, T. Fukumura, Z. Jin, M. Kawasaki, H. Koinuma, T. Chikyow, P. Ahmet, A. Setoguchi, and S.F. Chichibu, Appl. Phys. Lett. 78, 616 (2001).
R.V. Muniswami Naidu, A. Subrahmanyam, A. Verger, M.K. Jain, S.V.N. Bhaskara Rao, S.N. Jha, and D.M. Phase, Electron. Mater. Lett. 8, 457 (2012).
S. Zhang, P. Song, J. Zhang, H. Yan, J. Li, Z. Yang, and Q. Wang, Sens. Actuators B Chem. 242, 983 (2017).
H.Y. Yu, M.F. Li, B.J. Cho, C.C. Yeo, M.S. Joo, D.L. Kwong, J.S. Pan, C.H. Ang, J.Z. Zheng, and S. Ramanathan, Appl. Phys. Lett. 81, 376 (2002).
A. Larena, F. Millán, G. Pérez, and G. Pinto, Appl. Surf. Sci. 187, 339 (2002).
P. Prathap, Y.P.V. Subbaiah, M. Devika, and K.T.R. Reddy, Mater. Chem. Phys. 100, 375 (2006).
I. Hamberg and C.G. Granqvist, J. Appl. Phys. 60, R123 (1986).
M.-M. Fan, K.-W. Liu, X. Chen, X. Wang, Z.-Z. Zhang, B.-H. Li, and D.-Z. Shen, ACS Appl. Mater. Interfaces 7, 20600 (2015).
X.H. Xie, Z.Z. Zhang, C.X. Shan, H.Y. Chen, and D.Z. Shen, Appl. Phys. Lett. 101, 081104 (2012).
T. Kawashima, T. Ezure, K. Okada, H. Matsui, K. Goto, and N. Tanabe, J. Photochem. Photobiol. A 164, 199 (2004).
J. Sheng, E.J. Park, B. Shong, and J.-S. Park, ACS Appl. Mater. Interfaces. 9, 23934 (2017).
Acknowledgments
This work was partially supported by National Natural Science Foundation of China (61764001); Guangxi Science and Technology Base and Talent Special Project (AD18281084); Guangxi Key Laboratory of Precision Navigation Technology and Application (DH201808); One Hundred Person Project of Guangxi as well as the Thousands of Key Teacher Training Project of GED.
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Zhang, F., Sun, J., Li, H. et al. Mixed Phase (GaIn)2O3 Films with a Single Absorption Edge Grown by Magnetron Sputtering. J. Electron. Mater. 48, 8061–8066 (2019). https://doi.org/10.1007/s11664-019-07645-1
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DOI: https://doi.org/10.1007/s11664-019-07645-1