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Effect of Post-Deposition Annealing on RF-Sputtered Catalyst-Free Grown ZnO Nanostructures

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Abstract

Catalyst-free zinc oxide (ZnO) nano-structures were synthesized on silicon (100) substrate by radio frequency sputtering. The as-deposited films were post-annealed at 200°C, 400°C, 600°C, and 800°C. The effects of annealing temperature on the structural, morphological and optical properties of these nanostructures were investigated using x-ray diffraction (XRD), atomic force microscopy (AFM) and spectroscopic ellipsometry. XRD showed c-axis-oriented growth with the increase in crystallinity at the higher annealing temperature of these ZnO nanostructures. The crystallite size calculated using Scherrer’s formula in the XRD data was found to increase with the annealing temperature. AFM images confirmed the growth of grains at higher annealing temperatures. Optical band gaps of these ZnO nanostructures were calculated using reflectance spectra in the ultraviolet–visible region and found to decrease from 3.19 eV to 3.09 eV as the annealing temperature increased from 200°C to 800°C. The decrease in band gap may be attributed to the decrease in oxygen vacancies at higher annealing temperatures and may be useful for different applications.

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References

  1. S.K. Arya, S. Saha, J.E. Ramirez-Vick, V. Gupta, S. Bhansali, and S.P. Singh, Rev. Anal. Chim. Acta 737, 1 (2012).

    Article  Google Scholar 

  2. S.E. Volkan, P. Suat, S.K. Adan, A. Tuna, E. Saliha, O. Soner, E. Naci, and M.B. Zafer, Appl. Surf. Sci. 318, 2 (2014).

    Article  Google Scholar 

  3. X. Duan, Y. Huang, Y. Cui, J. Wang, and C.M. Lieber, Nature 409, 66 (2001).

    Article  Google Scholar 

  4. J. Elias, J. Michler, L. Philippe, M.-Y. Lin, C. Couteau, G. Lérondel, and C. Lévy-Clément, J. Electron. Mater. 40, 728 (2011).

    Article  Google Scholar 

  5. J.F. Ghislain, F. Yamin, S. Moussa, and H. Xintang, Mater. Sci. Semicond. Process. 16, 652 (2013).

    Article  Google Scholar 

  6. K.J. Raied, A.H. Mohammed, and A.A. Kadhim, Mater. Lett. 132, 31 (2014).

    Article  Google Scholar 

  7. T.C. Zhang, Z.X. Mei, A.Y. Kuznetsov, and X.L. Du, J. Cryst. Growth 325, 93 (2011).

    Article  Google Scholar 

  8. A. Ismail and M.J. Abdullah, J. King Saud Univ. Sci. 25, 209 (2013).

    Article  Google Scholar 

  9. A.J. Hashim, M.S. Jaafar, J.G. Alaa, and N.M. Ahmed, Opt. Int. J. Light Electron. Opt. 124, 491 (2013).

    Article  Google Scholar 

  10. J.C. Hsiao, H.C. Chen, H.J. Yang, C.L. Wu, C.F. Huang, C.C. Lin, P. Yu, and J.C. Hwang, J. Taiwan Inst. Chem. Eng. 44, 758 (2013).

    Article  Google Scholar 

  11. A. Zaier, F. OumElaz, F. Lakfif, A. Kabir, S. Boudjadar, and M.S. Aida, Mater. Sci. Semicond. Process. 12, 207 (2009).

    Article  Google Scholar 

  12. G.C. Yi, C. Wang, and W. Park, Semicond. Sci. Technol. 20, S22 (2005).

    Article  Google Scholar 

  13. R.A. Asmar, G. Ferblantier, F. Mailly, P.G. Borrut, and A. Foucaran, Thin Solid Films 473, 49 (2005).

    Article  Google Scholar 

  14. J. Sengupta, R.K. Sahoo, K.K. Bardhan, and C.D. Mukherjee, Mater. Lett. 65, 2572 (2011).

    Article  Google Scholar 

  15. Y. Zhang, W. Fa, F. Yang, Z. Zheng, and P. Zhang, Ionics 16, 815 (2010).

    Article  Google Scholar 

  16. M. Rusop, K. Uma, T. Soga, and T. Jimbo, Mater. Sci. Eng. B 127, 150 (2006).

    Article  Google Scholar 

  17. B.L. Zhu, X.Z. Zhao, F.H. Su, G.H. Li, X.G. Wu, J. Wu, and R. Wu, Vacuum 84, 1280 (2010).

    Article  Google Scholar 

  18. Z.B. Fang, Z.J. Yan, Y.S. Tan, X.Q. Liu, and Y.Y. Wang, Appl. Surf. Sci. 241, 303 (2005).

    Article  Google Scholar 

  19. G.P. Daniel, V.B. Justinvictor, P.B. Nair, K. Joy, P. Koshy, and P.V. Thomas, Phys. B 405, 1782 (2010).

    Article  Google Scholar 

  20. K.S. Kim, H.W. Kim, and N.H. Kim, Phys. B 334, 343 (2003).

    Article  Google Scholar 

  21. J. Yang, M. Gao, Y. Zhang, L. Yang, J. Lang, D. Wang, H. Liu, Y. Liu, Y. Wang, and H. Fan, Superlattices Microstruct. 44, 137 (2008).

    Article  Google Scholar 

  22. J.F. Guojia, L. Dejie, and L.Y. Bao, Thin Solid Films 418, 156 (2002).

    Article  Google Scholar 

  23. J. Karamdel, C.F. Dee, and B.Y. Majlis, Sains Malays. 40, 209 (2011).

    Google Scholar 

  24. L.V. Azaroff, Elements of X-ray Crystallography (New York: McGraw Hill, 1968).

    Google Scholar 

  25. S. Mandal, R.K. Singha, A. Dhar, and S.K. Ray, Mater. Res. Bull. 43, 244 (2008).

    Article  Google Scholar 

  26. H.A. Wahab, A.A. Salama, A.A. El-Saeid, O. Nur, M. Willander, and I.K. Battisha, Results Phys. 3, 46 (2013).

    Article  Google Scholar 

  27. H.S. Kang, J.S. Kang, J.W. Kim, and S.Y. Lee, J. Appl. Phys. 95, 1246 (2004).

    Article  Google Scholar 

  28. C. Lee, J.H. Kim, and S.K. Shin, J. Korean Phys. Soc. 53, 3021 (2008).

    Article  Google Scholar 

  29. L.S. Mende and J.L. MacManus-Driscoll, Mater. Today 10, 40 (2007).

    Article  Google Scholar 

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Acknowledgements

The authors would like to acknowledge Technical Education Quality Improvement Programme—II and center for interdisciplinary research lab MNNIT, Allahabad, for their support.

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Authors and Affiliations

  1. Department of Physics, Motilal Nehru National Institute of Technology Allahabad, Allahabad, 211004, India

    Amit Srivastava & Naresh Kumar

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  1. Amit Srivastava
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  2. Naresh Kumar
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Correspondence to Naresh Kumar.

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Srivastava, A., Kumar, N. Effect of Post-Deposition Annealing on RF-Sputtered Catalyst-Free Grown ZnO Nanostructures. J. Electron. Mater. 46, 4842–4847 (2017). https://doi.org/10.1007/s11664-017-5443-7

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  • DOI: https://doi.org/10.1007/s11664-017-5443-7

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