Abstract
Successive reactive-ion etching and microphotoluminescence (PL) intensity mapping have been performed in order to investigate the sources of epitaxial growth-induced stacking faults (SFs) in thick 4H-SiC epilayers. Three kinds of SFs, i.e., 4SSFs, 3SSFs, and 2SSFs, have been identified in the samples. Two of these (3SSFs and 2SSFs) show similar nucleation behaviors, and their formation may be due to stress within the epitaxial layer. In contrast, 4SSFs nucleate at the epilayer–substrate interface and might be related to an unknown dislocation, which shows a rounded-shape etch pit in the substrate.
Similar content being viewed by others
References
H. Matsunami and T. Kimoto, Mater. Sci. Eng. R. 20, 125 (1997).
M. Skowronski and S. Ha, J. Appl. Phys. 99, 011101 (2006).
H. Fujiwara, T. Kimoto, T. Tojo, and H. Matsunami, Appl. Phys. Lett. 87, 051912 (2005).
S. Izumi, H. Tsuchida, I. Kamata, and K. Izumi, Appl. Phys. Lett. 86, 202108 (2005).
T. Kuhr, J.Q. Liu, H.J. Chung, and M. Skowronski, J. Appl. Phys. 92, 5863 (2002).
G. Feng, J. Suda, and T. Kimoto, Appl. Phys. Lett. 94, 091910 (2009).
H. Tsuchida, I. Kamata, and M. Nagano, J. Cryst. Growth 30, 757 (2008).
J. Hassan, A. Henry, I.G. Ivanov, and J.P. Bergman, J. Appl. Phys. 105, 123513 (2009).
S.I. Maximenko, J.A. Freitas, P.B. Klein, A. Shrivastava, and T.S. Sudarshan, Appl. Phys. Lett. 94, 092101 (2009).
J.D. Caldwell, P.B. Klein, M.E. Twigg, R.E. Stahlbush, O.J. Glembocki, K.X. Liu, K.D. Hobart, and F. Kub, Appl. Phys. Lett. 89, 103519 (2006).
T. Kimoto, S. Nakazawa, K. Hashimoto, and H. Matsunami, Appl. Phys. Lett. 79, 2761 (2001).
G. Feng, J. Suda, and T. Kimoto, Appl. Phys. Lett. 92, 221906 (2008).
S. Bai, G. Wagner, E. Shishkin, W.J. Choyke, R.P. Devaty, M. Zhang, P. Pirouz, and T. Kimoto, Mater. Sci. Forum 389–393, 589 (2002).
G. Feng, J. Suda, and T. Kimoto, Phys. B: Condens. Matter 404, 4745 (2009).
H. Fujiwara, T. Kimoto, T. Tojo, and H. Matsunami, Mater. Sci. Forum 483–485, 151 (2005).
T.A. Kuhr, J.Q. Liu, H.J. Chung, Q. Li, M. Skowronski, and F. Szmulowic, J. Appl. Phys. 92, 5863 (2003).
B. Kallinger, S. Polster, P. Berwian, J. Friedrich, A. Danilewsky, A. Wehrhahn, and A.-D. Weber, 13th International Conference on Silicon Carbide and Related Materials (Nürnberg, Germany, Oct. 2009), Mo-P-35.
H. Tsuchida, I. Kamata, and M. Nagano, J. Cryst. Growth 306, 254 (2007).
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Feng, G., Suda, J. & Kimoto, T. Sources of Epitaxial Growth-Induced Stacking Faults in 4H-SiC. J. Electron. Mater. 39, 1166–1169 (2010). https://doi.org/10.1007/s11664-010-1192-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11664-010-1192-6